本文選題：微機(jī)電(MEMS)　切入點(diǎn)：能量收集器　出處：《南昌工程學(xué)院》2017年碩士論文

【摘要】：隨著微能源、MEMS、無線傳感器網(wǎng)絡(luò)等技術(shù)的飛速發(fā)展,使用壓電轉(zhuǎn)換振動能量收集原理(Piezoelectric Energy Harvester,PEH)收集流體機(jī)械能被越來越多的研究學(xué)者關(guān)注。壓電振動能量收集主要應(yīng)用于健康監(jiān)控、無線傳感器系統(tǒng)、微小型電機(jī)耦合器件等領(lǐng)域。同時(shí)我國是水電大國,水電裝機(jī)量大,目前國內(nèi)水電站內(nèi)傳感元件多是有源有線,所以在電站施工前就要做好提前布線的準(zhǔn)備,很多極端的環(huán)境下又會存在布線困難的情況。而且多而雜的電線電纜又會造成相當(dāng)大的成本消耗。對于一些極端環(huán)境的傳感元件,當(dāng)電池電量消耗殆盡時(shí),電源的更換又成為一個(gè)比較大的問題和挑戰(zhàn)。因此,研究壓電振動能量收集技術(shù)在水電站中的應(yīng)用具有廣闊的應(yīng)用前景和實(shí)用價(jià)值。本文研究了兩種機(jī)制的壓電振動能量采集器。在世界各國研究學(xué)者研究的基礎(chǔ)上,制作了兩種應(yīng)用于水電站監(jiān)測傳感元件供電的壓電能量收集器設(shè)計(jì)方案,通過理論與建模結(jié)合的方式提出了機(jī)電耦合模型,考慮實(shí)際應(yīng)用的環(huán)境來優(yōu)化了結(jié)構(gòu)尺寸,圍繞光刻刻蝕等MEMS技術(shù),采用彈性性能和抗疲勞優(yōu)異的磷青銅基片替代硅基片制作了分別應(yīng)用于兩個(gè)環(huán)境的渦激振動能量采集器與銅基振動能量采集器的實(shí)驗(yàn)樣機(jī),并搭建了兩套用于實(shí)驗(yàn)測試的平臺分別對兩種器件進(jìn)行測試。對所制備的實(shí)驗(yàn)樣機(jī)進(jìn)行了測試并得到了較高的輸出性能。1、提出了兩種應(yīng)用于水電站監(jiān)測傳感元件供電的壓電能量收集器設(shè)計(jì)方案。針對水電站監(jiān)測傳感器件的應(yīng)用點(diǎn),從結(jié)構(gòu)類型、原料選用、工作模式等方面進(jìn)行分析,結(jié)合制備工藝,設(shè)計(jì)了基于渦激振動與機(jī)械振動的兩款能量采集器。2、通過理論與建模結(jié)合的方式提出了機(jī)電耦合模型,考慮實(shí)際應(yīng)用的環(huán)境來優(yōu)化了結(jié)構(gòu)尺寸。3、研究了一種基于磷青銅基片的壓電能量收集器的制備方法。論文采用導(dǎo)電環(huán)氧樹脂作為中間粘結(jié)層實(shí)現(xiàn)PZT和磷青銅基片的結(jié)合;采用機(jī)械化學(xué)拋光等MEMS技術(shù)成功制備出了厚度可控、結(jié)構(gòu)致密以及性能優(yōu)異的壓電能量收集器。4、對兩個(gè)器件模型分別在水環(huán)境與機(jī)械電機(jī)振動環(huán)境中的輸出性能進(jìn)行了測試與闡述。主要的測試參數(shù)包括器件的諧振頻率、開路電壓輸出與負(fù)載電壓輸出、最佳功率值、LED點(diǎn)亮實(shí)驗(yàn)以及電容充電特性�；跍u激振動的水下能量收集器在0.8m/s的水流中輸出電壓峰峰值可達(dá)44V,基于機(jī)械電機(jī)振動的壓電能量收集器在3.0g的加速度振動中輸出電壓35V,并且在7g加速度的振動中也能有穩(wěn)定的輸出,達(dá)到了61.2V,功率密度8664μW/cm~3。
[Abstract]:With the rapid development of micro-energy sources, such as MEMS and wireless sensor networks, the application of piezoelectric Energy energy collection principle to the collection of fluid mechanical energy has attracted more and more researchers' attention. Piezoelectric vibration energy collection is mainly used in health monitoring. Wireless sensor systems, micro-motor couplers and other fields. At the same time, China is a large hydropower country, and the amount of hydropower installed is large. At present, most of the sensing elements in domestic hydropower stations are active wired, so we should prepare for the wiring in advance before the construction of the power station. In a lot of extreme environments, there will be a lot of difficult wiring, and a lot of miscellaneous wires and cables will cost a lot of money. For some sensor components in extreme environments, when the battery runs out of electricity, The replacement of power supply has become a big problem and challenge. The research on the application of piezoelectric vibration energy collection technology in hydropower stations has broad application prospect and practical value. In this paper, two kinds of piezoelectric vibration energy collectors are studied. Two design schemes of piezoelectric energy collector used in hydro-power station monitoring sensor power supply are made. The electromechanical coupling model is proposed by combining theory with modeling, and the structure size is optimized by considering the practical application environment. Around the MEMS technology such as lithography, the experimental prototypes of Vortex vibration energy collector and copper based vibration energy collector, which are used in two environments, have been made by replacing silicon substrate with phosphor bronze substrate with excellent elastic properties and fatigue resistance. Two sets of experimental test platforms were built to test the two kinds of devices respectively. The experimental prototype was tested and the output performance was higher. 1. Two kinds of sensors were proposed to monitor the hydropower station. Design scheme of piezoelectric energy collector for power supply. Two energy collectors based on vortex-induced vibration and mechanical vibration are designed by analyzing the structure type, selection of raw materials, working mode and so on. The electromechanical coupling model is proposed by combining theory with modeling. Considering the practical application environment, the structure size. 3 was optimized, and the preparation method of piezoelectric energy collector based on phosphor bronze substrate was studied. In this paper, conductive epoxy resin was used as the intermediate bonding layer to realize the combination of PZT and phosphor bronze substrate. The thickness is controlled by MEMS technology such as mechanochemical polishing. The piezoelectric energy collector with compact structure and excellent performance. The output performance of the two device models in water environment and mechanical motor vibration environment are tested and expounded respectively. The main test parameters include the resonant frequency of the device. Open circuit voltage output and load voltage output, The optimal power value and the characteristics of capacitive charging. The peak output voltage of underwater energy collector based on vortex-induced vibration in 0.8m/s water flow can reach 44V, and the piezoelectric energy collector based on mechanical motor vibration accelerates at 3.0g. The output voltage is 35V in the degree of vibration, and there is a steady output in the vibration of 7 g acceleration. The power density reached 61.2 V and the power density was 8664 渭 W / cm ~ 3.
【學(xué)位授予單位】：南昌工程學(xué)院
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2017
【分類號】：TV736

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本文編號：1656243