本文關鍵詞：基于石墨烯與硅基納米光波導復合結構的電光調(diào)制技術研究　出處：《中北大學》2016年博士論文　論文類型：學位論文

  更多相關文章： 納米光波導 微環(huán)諧振腔 石墨烯 電光調(diào)制 類電磁誘導透明效應

【摘要】：隨著現(xiàn)代數(shù)字化電子信息產(chǎn)業(yè)的發(fā)展,人們對電子儲存器件的數(shù)據(jù)容量、電子信息處理器的運算速度提出的要求也越來越高。與電信號相比,光信號具有數(shù)據(jù)容量大、傳輸速度快、不受電磁場干擾等優(yōu)點,因而要達到大數(shù)據(jù)量存儲、高速處理和低功耗這些要求,急需通過光電芯片來打破微電子產(chǎn)業(yè)摩爾定律的限制。而硅基納米光波導是構成光電芯片的基礎單元,它可以在納米尺度下完成光信號的傳輸與處理,是實現(xiàn)光子器件小型化、集成化必不可少的單元。石墨烯作為一種新興的二維材料,其零帶隙具有線性色散的能帶結構、超高的載流子遷移速率以及電控可調(diào)的費米能級使石墨烯成為一種極具應用前景的光信號處理材料。然而,將石墨烯應用于高效的光電轉換器件最大挑戰(zhàn)之一就是單層石墨烯有限的光吸收率。而將石墨烯集成到光波導上通過石墨烯與波導表面倏逝波的相互作用則可以解決這一難題,不但可以增強光與石墨烯的相互作用,增大光電轉換效率,而且可以控制波導中光的傳輸,這對光信息芯片中不可或缺的電光調(diào)制、光電探測等器件具有重大的研究意義與應用前景。本文以目前國際最新研究成果為指引,圍繞石墨烯與納米光波導器件的集成,開展了基于石墨烯的硅基納米光波導電光調(diào)制特性的研究。對石墨烯-光波導復合材料的特性進行了分析研究,加工并制備出石墨烯-光波導光電集成結構,進行了實驗測試與結果分析。首次實驗制備出雙層石墨烯電容結構與硅基微環(huán)諧振腔相結合的電光調(diào)制結構,首次提出利用漸變微環(huán)諧振腔增大調(diào)制效率,首次利用石墨烯調(diào)控級聯(lián)光波導微環(huán)諧振腔中的類電磁誘導透明效應。相關研究內(nèi)容可歸結為以下幾個方面:1、對光波導的傳輸模式和單模傳輸條件進行了理論分析;通過對負責光輸入和輸出的光波導納米光柵各參數(shù)的仿真與優(yōu)化,提高了光柵的耦合效率;對核心單元微環(huán)諧振腔進行了理論分析。最后利用L-Edit軟件對微腔諧振器集成單元進行了優(yōu)化設計。利用電子束曝光以及感應耦合等離子體刻蝕等工藝完成了垂直耦合光柵作為光信號輸入輸出端的條形光波導以及微環(huán)諧振腔,對微環(huán)諧振腔的傳輸特性進行了測試分析,得到了品質(zhì)因子為105高Q值微環(huán)諧振腔。2、對石墨烯的結構性質(zhì)進行了理論分析,理論仿真了石墨烯費米能級、介電常數(shù)、等參數(shù)隨電壓的變化關系。通過化學氣相沉積的方法(CVD)在銅箔基底上生長了石墨烯薄膜,并通過濕法轉移的方法轉移到了硅光波導的表面。解決了石墨烯-納米光波導集成芯片加工過程中的多個工藝難點,并通過電子束蒸發(fā)、ALD原子沉積、紫外光刻等實現(xiàn)了石墨烯薄膜的圖形化以及電極的生長等工藝,最后與PCB板引線并鍵合,得到了石墨烯與納米光波導結合的光電調(diào)制芯片。3、對微環(huán)諧振腔-石墨烯復合結構進行了電光調(diào)制測試,設計并加工了新型的漸變微環(huán)諧振腔-石墨烯復合結構來增強石墨烯與光的相互作用,以增大調(diào)制效率,測試得到了高達26dB的調(diào)制深度,對測試結果進行了詳細分析。通過雙環(huán)級聯(lián)的納米光波導微環(huán)諧振腔的參數(shù)進行計算優(yōu)化,在芯片上觀察到了類電磁誘導透明效應,并將石墨烯的電控光吸收原理應用到級聯(lián)微環(huán)類電磁誘導透明效應中,并在實驗中實現(xiàn)了石墨烯對光波導中類電磁誘導透明效應的調(diào)控,對譜線的藍移和紅移進行了詳細的分析計算。
[Abstract]:With the development of modern digital electronic information industry, the people to the electronic data storage device capacity, electronic information processing speed requirements also increasingly high. Compared with electrical signals, optical signals with large data capacity, fast transmission speed, without electromagnetic interference and other advantages, and to achieve a large amount of data storage. High speed and low power consumption of these requirements, need to break through the photoelectric chip microelectronics industry Moore's law restrictions. While silicon nanometer waveguide is the basic unit of photoelectric chip, it can complete the transmission and processing of optical signals in the nanometer scale, is to realize the miniaturization of integrated photonic devices, essential graphite unit. Graphene as a new two-dimensional material, the zero band gap band structure with linear dispersion, the Fermi energy and electric charge carrier mobility high tunable graphene into For optical signal processing is a very promising material. However, graphene used in photoelectric converter, one of the biggest challenges is graphene limited light absorption rate. The graphene is integrated into the optical waveguide by means of interaction between graphene and the surface of the waveguide evanescent wave can solve this problem that can not only enhance the interaction between light and graphene, increasing photoelectric conversion efficiency, and can control the transmission of light in the waveguide, the electro-optic modulation an optical information chip, photoelectric detection device has the research significance and important application prospect. Based on the current research results of the latest international guidelines, focus on integration graphene and nano optical waveguide devices, to carry out the research of graphene based nano silicon optical waveguide electro-optic modulator based on the characteristics of graphene. Characteristics of optical waveguide composites is analyzed. Study on processing and preparation of graphene optoelectronic integrated optical waveguide structure, were tested with the experimental results. Analysis of structure of electro-optic modulation experiment for the first time prepared bilayer graphene structure and capacitance silicon micro ring resonator with micro ring resonator is proposed for the first time, increase the modulation efficiency using gradient, the first use of graphene the regulation of cascaded optical waveguide micro ring resonator in electromagnetically induced transparency like effect. The related research contents can be summarized as follows: 1, the optical waveguide transmission mode and single-mode transmission condition are analyzed; through the simulation and optimization of the parameters of the optical waveguide grating for input and output, improve the coupling efficiency of the grating; the core unit of the micro ring resonator is analyzed. At the end of the micro resonator integrated unit was optimized by L-Edit software. By using electron beam lithography and sense Coupled plasma etching process should be completed in vertically coupled strip optical waveguide grating as the input optical signal output and the micro ring resonator, transmission characteristics of microring resonator are analyzed, the quality factor of 105 high Q micro ring resonator.2, structural properties of graphene were analyzed in theory the theoretical analysis, simulation of the graphene Fermi level, dielectric constant, parameters such as the relationship with voltage variation. By chemical vapor deposition (CVD) on copper substrate grown graphene films, and through the wet transfer to the surface of the silicon waveguide. To solve the more difficult process of graphite graphene nano optical waveguide integrated chip in machining process, and by electron beam evaporation, ALD atomic deposition, UV lithography to achieve the graphical and electrode growth process of graphene films, and finally lead and PCB board Bonding, obtained graphene and nano optical waveguide with the photoelectric modulation chip.3, the micro ring resonator graphene composite structure of electro-optic modulation test design and new gradient processing of micro ring resonator graphene composite structure to enhance the graphene and light interaction, in order to increase the modulation efficiency, measured the modulation depth of up to 26dB, the test results are analyzed in detail. Through optimized calculation of cascade of nano optical waveguide parameters of micro ring resonator, the chip was observed on electromagnetically induced transparency like effect, and the principle is applied to cascaded micro ring electromagnetically induced transparency like effect in electronic control graphene light absorption, and realize the regulation of graphene induced transparency effect on optical waveguide electromagnetic in the experiment, the spectral lines of blue and red shift was analyzed and calculated in detail.

【學位授予單位】：中北大學
【學位級別】：博士
【學位授予年份】：2016
【分類號】：TN761
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本文編號：1409318