【摘要】：飛秒激光誘發(fā)雙光子聚合是一種重要的微納米加工手段,它被廣泛應用于加工光學器件、生物傳感器件和微流體器件等微納米功能器件中。但是傳統(tǒng)飛秒激光加工是基于單點逐點掃描加工,這種加工方法效率很低,難以廣泛應用與實際生產中。為了提高加工效率,并行掃描加工方法被應用于加工陣列結構中,但這種多焦點并行掃描加工的方法只能加工陣列結構,并且對效率提升有限,尤其是在加工大尺度微納米器件時,加工所消耗的時間依然過長。無掩膜圖形化加工是一種可以有效提高飛秒激光雙光子聚合效率的方法,為了實現(xiàn)無掩膜圖形化加工,對光場的圖形化是至關重要的步驟,本文基于空間光調制器對焦平面光場進行調制,實現(xiàn)無掩膜圖形化加工。本文首先研究了空間光調制技術,介紹了相位型和振幅型空間光調制器,并針對相位型空間光調制器的調制原理采用瓊斯矩陣法進行分析,然后介紹了多種計算全息算法,并基于實驗的實際要求對算法做出了改進,為進一步實現(xiàn)圖形化光場打下了基礎。本文基于對結構光場的研究,提出一種快速加工管道結構的方法,該方法的核心是一種全新設計的環(huán)形菲涅爾透鏡,這種透鏡可以將平行入射光聚焦為均一的環(huán)形焦斑,并且焦斑的半徑可以靈活變化,通過改變環(huán)形菲涅爾波帶片的參數,我們甚至可以得到四邊形、六邊形和八邊形的空心焦斑,實現(xiàn)100%填充率細胞支架的快速加工。為了實現(xiàn)任意結構的快速加工,我們對計算全息算法進行了改進。當采用傳統(tǒng)計算全息算法生成圖形化光場時,光場中存在大量斑點噪聲,這些噪聲會導致加工結構質量下降。我們提出一種多次曝光的方法,利用斑點噪聲隨機分布的特點,通過疊加多張全息圖將斑點噪聲平均化低于雙光子加工的曝光閾值。通過這種多次曝光法,我們可以在數百毫秒內得到一個微米尺度的高質量微納米結構。采用這種方法加工出的達曼光柵具有良好的光學性能,并且相對于傳統(tǒng)逐點掃描加工方法可以節(jié)約95%的加工時間。但是,我們對于這個加工效率依然不滿足,為了實現(xiàn)更高效率的加工,我們采用能量密度更高的放大級激光器作為光源,并且針對放大級激光器的性質,優(yōu)化了一種新型計算全息算法,實現(xiàn)了任意微納米結構的快速加工,每個結構的加工時間約為5毫秒,在如此快的加工效率下,加工至厘米尺度所需時間也不過10分鐘,這已經與傳統(tǒng)紫外光刻的加工時間相近,但卻具有更高的靈活性、更高的分辨率并且無需掩膜�；谶@種快速加工方法,我們在厘米級別的管道內集成了微捕獲結構,實現(xiàn)微粒的捕獲功能。加工出的微流體器件在測試中展示出極佳的性能,也證明了這種方法在快速加工微流體功能器件中的應用價值。
[Abstract]:Femtosecond laser-induced two-photon polymerization is an important method of micro-nano fabrication, which is widely used in fabrication of optical devices, biosensors, micro-fluid devices and other micro-nano functional devices. However, the traditional femtosecond laser processing is based on single point by point scanning, this method is very inefficient and difficult to be widely used and practical production. In order to improve machining efficiency, parallel scanning machining method is applied to machining array structure, but this multi-focus parallel scanning processing method can only process array structure, and improve efficiency is limited. Especially in the fabrication of large-scale micro-nano devices, the processing time is still too long. Non-mask graphic machining is a method that can effectively improve the efficiency of femtosecond laser two-photon polymerization. In this paper, the focal plane light field is modulated based on spatial light modulator. This paper first studies the spatial light modulation technology, introduces the phase type and amplitude type spatial light modulator, and analyzes the modulation principle of the phase type spatial light modulator by Jones matrix method, and then introduces a variety of computational holographic algorithms. The algorithm is improved based on the practical requirements of the experiment, which lays a foundation for the further realization of the graphical light field. Based on the study of the light field of the structure, this paper presents a method for rapid fabrication of pipeline structure. The core of the method is a new ring Fresnel lens, which can focus the parallel incident light into a uniform ring focal spot. The radius of the focal spot can be changed flexibly. By changing the parameters of the annular Fresnel band plate, we can even obtain the hollow focal spot of quadrilateral, hexagonal and octagonal, and realize the rapid processing of 100% filled cell scaffold. In order to realize the fast machining of arbitrary structure, we improve the algorithm of CGH. When the traditional CGH algorithm is used to generate the graphical light field, there are a lot of speckle noises in the light field, which will lead to the deterioration of the quality of the machined structure. We propose a method of multiple exposures to average speckle noise below the exposure threshold of two-photon processing by superposing multiple holograms to make use of the random distribution of speckle noise. Through this multiple exposure method, we can obtain a high quality microstructure in hundreds of milliseconds. The Darman grating fabricated by this method has good optical properties and can save 95% processing time compared with the traditional point-by-point scanning processing method. However, we are still not satisfied with this processing efficiency. In order to achieve higher efficiency, we use amplifying stage lasers with higher energy density as the light source, and aim at the nature of amplifying stage lasers. A new computational holographic algorithm is optimized to realize the rapid processing of arbitrary micro and nano structures. The processing time of each structure is about 5 milliseconds, and at such a rapid processing efficiency, the processing time to centimeter scale is only 10 minutes. This is similar to the processing time of traditional UV lithography, but has higher flexibility, higher resolution and no mask. Based on this fast machining method, we integrate the micro-trapping structure in the centimeter-level pipeline to realize the capture function of the particles. The fabricated microfluidic devices show excellent performance in testing, which also proves the application value of this method in the rapid fabrication of microfluidic functional devices.
【學位授予單位】：中國科學技術大學
【學位級別】：博士
【學位授予年份】：2016
【分類號】：TN249

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