【摘要】：等離子體在放電過程中會受到不同因素的影響,比如電源的頻率、放電氣體種類、電極間距等。以往的控制方式多為手動操作,依舊操作者的經(jīng)驗、對實驗情況的掌握程度、對實驗操作的熟練程度來決定實驗結(jié)果,實驗的結(jié)果會因為操作者的不同而存在差異。本論文在這樣的基礎(chǔ)上設(shè)計了自由燃燒電弧電極間距控制系統(tǒng)和大氣壓射頻等離子體功率控制系統(tǒng),主要的研究工作包括:1)根據(jù)電路的工作原理,選擇了恰當?shù)恼�、濾波和穩(wěn)壓電路,并且根據(jù)實際需要,選擇了電路中各個元器部件,設(shè)計了供電電路。并且,根據(jù)控制需求和控制原理,通過對比不同的控制方式,選擇適合的PID參數(shù),編寫控制程序。2)根據(jù)實驗所需要達到的真空度要求,重新設(shè)計和改造了真空腔體。并且設(shè)計了電極間距控制系統(tǒng),制作電路板和控制盒,來保證在實際操作過程中的安全性。最后通過實驗,研究了在相同電流的工況下,改變電極間距對等離子體電弧的影響,同時進行研究的還有,在電極間距保持不變的情況下,改變電流對于等離子體電弧的影響,通過實驗來驗證控制效果。3)針對實驗室中需要處理的對象,重新設(shè)計了大氣壓射頻等離子體發(fā)生器的結(jié)構(gòu),并且根據(jù)進氣量的需求優(yōu)化了發(fā)生器的進氣結(jié)構(gòu),讓進氣更加均勻。設(shè)計了光強度的反饋系統(tǒng)來控制控制放電電源。最后通過實驗,研究了在相同的進氣量條件下,功率的變化對于光強度變化的影響;同樣進行的還有在保證功率不變的情況下,改變進氣量對于放電光強度的影響。
[Abstract]:The plasma is affected by different factors, such as the frequency of power supply, the type of discharge gas, the distance between electrodes and so on. In the past, most of the control methods are manual operation, but the experience of the operator is still the same. The degree of mastery of the experimental situation and the proficiency of the experimental operation determine the results of the experiment, and the results of the experiment will be different because of the difference of the operator. In this paper, a free combustion arc electrode spacing control system and an atmospheric pressure RF plasma power control system are designed. The main research work includes: 1) according to the working principle of the circuit, the appropriate rectifier is selected. Filter and voltage stabilizer circuit, and according to the actual needs, selected the various components of the circuit, designed the power supply circuit. According to the control requirements and control principles, by comparing different control methods, selecting suitable PID parameters, writing control program .2) according to the vacuum degree requirements of the experiment, the vacuum cavity is redesigned and modified. The control system of electrode spacing is designed, and the circuit board and control box are made to ensure the safety in practical operation. Finally, the influence of changing the electrode spacing on the plasma arc is studied under the same current condition, and the influence of changing the current on the plasma arc is also studied when the electrode spacing remains constant. The structure of the atmospheric pressure RF plasma generator is redesigned and the intake structure is optimized according to the demand of the air intake to make the air intake more uniform. A light intensity feedback system is designed to control the discharge power supply. Finally, the influence of the power change on the light intensity is studied under the condition of the same air intake, and the influence of the change of the air intake on the discharge light intensity is also studied under the condition of keeping the same power.
【學位授予單位】：華北理工大學
【學位級別】：碩士
【學位授予年份】：2017
【分類號】：TP273;O53

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本文編號：2151831