本文選題：光傳操縱系統(tǒng) + 光學(xué)位移傳感器　； 參考：《中國(guó)科學(xué)技術(shù)大學(xué)》2017年博士論文

【摘要】：本論文研究了一種新型數(shù)字式波長(zhǎng)編碼光柵光學(xué)位移傳感器,作為關(guān)鍵硬件,用于飛行器光傳操縱系統(tǒng)中,取得了以下研究成果。1、提出了一種數(shù)字式波長(zhǎng)編碼光學(xué)位移傳感器的系統(tǒng)結(jié)構(gòu)。該傳感器的系統(tǒng)結(jié)構(gòu)簡(jiǎn)單緊湊,由讀碼系統(tǒng)和解調(diào)系統(tǒng)兩部分組成。讀碼系統(tǒng)的核心元件是一個(gè)由若干種等間距光柵單元編碼組成的編碼光柵,該編碼光柵上攜帶著與位移信息一一對(duì)應(yīng)的圖形編碼,通過(guò)編碼光柵的結(jié)構(gòu)設(shè)計(jì),可以調(diào)整光學(xué)位移傳感器的分辨率和量程。圖形編碼信息通過(guò)光柵的自準(zhǔn)直衍射轉(zhuǎn)化為波長(zhǎng)信息,傳輸至后續(xù)的解調(diào)系統(tǒng)中并輸出數(shù)字編碼,從而完成位移的測(cè)量。并通過(guò)編碼光柵的獨(dú)特設(shè)計(jì),從源頭上提高了傳感器的環(huán)境適應(yīng)能力。2、開(kāi)發(fā)了兩種結(jié)構(gòu)的組合編碼光柵,并形成了成熟的編碼解碼算法。組合編碼光柵采用單通道循環(huán)、多通道組合的方式,在不增加光柵種類的情況下,大幅度提高了編碼光柵的總編碼量;并通過(guò)錯(cuò)位結(jié)構(gòu)的應(yīng)用,不減小光柵單元格的尺寸,進(jìn)一步提高分辨率。編制了三套編碼算法程序,能快速有效的將組合編碼光柵的概念結(jié)構(gòu)具體化、數(shù)字化,并針對(duì)不同的參數(shù)要求,提供優(yōu)化設(shè)計(jì)的關(guān)鍵依據(jù)。根據(jù)大量計(jì)算結(jié)果,針對(duì)飛行器用光學(xué)位移傳感器的設(shè)計(jì)要求,本文優(yōu)先選擇擁有千級(jí)編碼量的"五位三分"或"六位二分"組合編碼光柵結(jié)構(gòu)。通過(guò)組合編碼光柵的結(jié)構(gòu)優(yōu)化,可以獲得十萬(wàn)級(jí)的編碼量,顛覆了傳統(tǒng)光學(xué)編碼盤主導(dǎo)的編碼方式,為大量程應(yīng)用領(lǐng)域的器件設(shè)計(jì)提供了新的有效思路。3、建立了成熟的組合編碼光柵制作工藝。設(shè)計(jì)了一套制作精度高、可重復(fù)性好的組合編碼光柵制作工藝,完成了量程100mm,分辨率100μm的"五位三分"錯(cuò)位組合編碼光柵的設(shè)計(jì)和制作,并利用光柵的復(fù)制技術(shù),實(shí)現(xiàn)了組合編碼光柵的標(biāo)準(zhǔn)化小批量產(chǎn)出。4、對(duì)光學(xué)位移傳感器整體搭建的系統(tǒng)性研究。通過(guò)對(duì)傳感器系統(tǒng)所有部件的制作、選型和匹配原則的研究,形成了理論與實(shí)踐結(jié)合的系統(tǒng)搭建思路。并從實(shí)際出發(fā),重點(diǎn)闡述了信號(hào)強(qiáng)度參考線的標(biāo)定方法和意義,提出了動(dòng)態(tài)信號(hào)強(qiáng)度參考線的標(biāo)定原則,為全面提高傳感器的穩(wěn)定性提供了技術(shù)支持。5、搭建了光學(xué)位移傳感器的臺(tái)架系統(tǒng)并完成其性能評(píng)估。搭建了傳感器的臺(tái)架系統(tǒng),并進(jìn)行信號(hào)響應(yīng)測(cè)試,實(shí)驗(yàn)結(jié)果表明"五位三分"錯(cuò)位組合編碼光柵的制作精度和系統(tǒng)各元件的選型與配合很好的滿足了傳感器光譜響應(yīng)的要求。同時(shí)在-55℃～70℃的溫度范圍內(nèi),測(cè)試了解調(diào)系統(tǒng)的輸出信號(hào),結(jié)果顯示光敏元件的信號(hào)幅值隨著溫度的升高而降低,呈近似線性變化,變化后的曲線依然在預(yù)先標(biāo)定的參考線之上,數(shù)字信號(hào)可以準(zhǔn)確輸出,即該傳感器系統(tǒng)展現(xiàn)了優(yōu)良的耐高低溫性能。
[Abstract]:In this paper, a new type of digital wavelength coded grating optical displacement sensor is studied, which is used as the key hardware in the optical control system of aircraft.A digital wavelength coded optical displacement sensor is proposed.The system structure of the sensor is simple and compact, which consists of read code system and demodulation system.The core component of the code reading system is a coded grating composed of several kinds of equal-distance grating units. The coding grating carries a graphic code corresponding to the displacement information, which is designed by the structure of the coded grating.The resolution and range of the optical displacement sensor can be adjusted.The image coding information is transformed into wavelength information by the self-collimation diffraction of the grating and transmitted to the subsequent demodulation system and the output digital code is output to complete the displacement measurement.Through the unique design of the coding grating, the environmental adaptability of the sensor is improved from the source. The combined coding grating with two structures is developed, and a mature coding and decoding algorithm is formed.The combined coding grating adopts the method of single channel cycle and multi-channel combination, without increasing the type of grating, the total coding amount of the coded grating is greatly increased, and the size of the grating cell is not reduced by the application of the dislocation structure.Further improve the resolution.Three sets of coding algorithm programs are developed, which can quickly and effectively concretize and digitize the conceptual structure of the composite coding grating, and provide the key basis for optimization design according to different parameter requirements.According to a large number of calculation results, according to the design requirements of optical displacement sensors for aircraft, this paper gives priority to the "five-bit three-point" or "six-bit dichotomous" combinatorial coding grating structure with thousands of coding quantities.By optimizing the structure of the combinatorial coding grating, we can obtain a number of codes of 100,000 levels, which overturn the traditional optical coding disk dominated coding method.It provides a new and effective method for device design in a large range of applications, and establishes a mature fabrication process of combinatorial coding grating.A set of high precision and repeatable composite coding grating fabrication technology is designed. The design and fabrication of the "five bits and three points" dislocation coded grating with a measuring range of 100 mm and a resolution of 100 渭 m are completed, and the replication technology of the grating is used.The standard small batch output. 4 of the combined coded grating is realized, and the systematic research on the whole building of the optical displacement sensor is carried out.Through the research on the principle of making, selecting and matching all the components of the sensor system, the idea of combining theory with practice is formed.The calibration method and significance of the signal intensity reference line are expounded, and the calibration principle of the dynamic signal intensity reference line is put forward.It provides technical support for improving the stability of the sensor. 5. The bench system of the optical displacement sensor is built and its performance evaluation is completed.The sensor bench system is built and the signal response is tested. The experimental results show that the fabrication accuracy of the "five-bit three-point" staggered combined coding grating and the selection and coordination of each component of the system can meet the requirements of the sensor spectral response.At the same time, in the temperature range of -55 鈩，

本文編號(hào)：1749600