【摘要】：針對(duì)微結(jié)構(gòu)和微光學(xué)元件等微小物體的表面定量檢測(cè),本文介紹了一種利用無透鏡數(shù)字全息的快速、無損的顯微成像方法。首先介紹了基于球面波的無透鏡數(shù)字全息顯微成像技術(shù)的基本原理,采用CCD作為光電轉(zhuǎn)換器件,基于邁克爾遜干涉光路,設(shè)計(jì)了無透鏡數(shù)字全息顯微成像系統(tǒng),利用反射鏡構(gòu)成折反式光路,系統(tǒng)結(jié)構(gòu)簡(jiǎn)單、緊湊,提升了系統(tǒng)便攜性。然后利用USAF1951分辨率板對(duì)構(gòu)建的成像系統(tǒng)進(jìn)行了標(biāo)定實(shí)驗(yàn),得出其橫向分辨率為6.69μm,放大倍率為3.375,系統(tǒng)工作距離為12.0mm。此外,還對(duì)晶圓表面結(jié)構(gòu)進(jìn)行實(shí)際測(cè)量。實(shí)驗(yàn)驗(yàn)證了該系統(tǒng)的可行性和有效性,有望進(jìn)一步應(yīng)用于MEMS、微光學(xué)元件、光學(xué)元件等表面形貌的定量測(cè)量中。
[Abstract]:In this paper, a fast and lossless microscopic imaging method based on lensless digital holography is introduced for the surface quantitative detection of micro objects such as microstructures and micro optical elements. Firstly, the basic principle of lensless digital holographic microscopic imaging technology based on spherical wave is introduced. A lensless digital holographic microscopic imaging system is designed based on Michelson interference light path and CCD as photoelectric conversion device. The system structure is simple and compact, and the system portability is improved. Then the calibration experiment of the imaging system was carried out using USAF1951 resolution board. The transverse resolution was 6.69 渭 m, the magnification was 3.375, and the operating distance of the system was 12.0mm. In addition, the surface structure of the wafer was measured. The experimental results show that the system is feasible and effective, and it is expected to be used in the quantitative measurement of surface morphology of MEMS, microoptical elements and optical elements.
【作者單位】： 北京理工大學(xué)光電學(xué)院光機(jī)電聯(lián)合研究中心;北京理工大學(xué)深圳研究院;
【基金】：教育部重點(diǎn)實(shí)驗(yàn)室2016開放基金(2016OEIOF05) 深圳市科技創(chuàng)新項(xiàng)目資助
【分類號(hào)】：TN26

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本文編號(hào)：2134399