發(fā)布時間：2018-10-26 14:59

【摘要】：導(dǎo)電聚合物的發(fā)現(xiàn)對微電子、光電工業(yè)制造技術(shù)革新有著極其重要的影響。而構(gòu)造三維微納結(jié)構(gòu)的導(dǎo)電聚合物圖案,可以廣泛應(yīng)用于顯示器件、存儲器件、集成電路、高敏度傳感器等。本文通過紫外光刻及壓印的方法在基板上制備親、疏水的功能性聚合物表面,利用水溶性導(dǎo)電聚合物PEDOT:PSS在親水性表面的選擇性沉積構(gòu)筑成功導(dǎo)電聚合物圖案及微納電路。首先,我們選用PDMS一次復(fù)制竹葉表面結(jié)構(gòu)制備了具有仿生微納結(jié)構(gòu)的軟模板。經(jīng)過對模板壓印聚合物圖案性質(zhì)表征,確定軟模板完整復(fù)制了竹葉表面的微觀結(jié)構(gòu)且壓印聚合物圖案保持了竹葉表面的超疏水特性。其次,利用已制備的PDMS軟模板,結(jié)合紫外光刻法在玻璃基板上制備出不同尺寸的親疏水功能化聚合物表面。利用導(dǎo)電聚合物在親水性區(qū)域的選擇性沉積,通過旋涂法在聚合物表面上沉積DMSO摻雜的水溶性導(dǎo)電聚合物PEDOT:PSS。80℃退火5-10min制備了尺寸在50-500μm不等,且具有良好透光率和較高導(dǎo)電率的導(dǎo)電圖案。另外,為了解決光刻膠組分良好的蝕刻性確保在基板上獲得良好的導(dǎo)電聚合物圖案,本文制備了具有良好酸致降解性的壓印光刻膠,采用相同的導(dǎo)電圖案制備工藝亦可制備不同尺寸導(dǎo)電圖案。在酸性條件下,該光刻膠可降解剝離而不影響導(dǎo)電聚合物圖案的結(jié)構(gòu)完整性和光學(xué)電學(xué)性能。
[Abstract]:The discovery of conductive polymers has an extremely important impact on the innovation of manufacturing technology in microelectronics and optoelectronic industries. The conductive polymer pattern with 3D micro / nano structure can be widely used in display devices, memory devices, integrated circuits, high sensitivity sensors and so on. In this paper, the surface of hydrophobic functional polymer was prepared on the substrate by UV lithography and imprint. The patterns and microcircuits of conductive polymer were constructed by selective deposition of water-soluble conductive polymer PEDOT:PSS on the hydrophilic surface. Firstly, we prepared the soft template with biomimetic micro-nano structure by using PDMS to duplicate the surface structure of bamboo leaves at one time. By characterizing the properties of the template imprinted polymer pattern, it is determined that the soft template completely duplicates the microstructure of the bamboo leaf surface and the imprint polymer pattern keeps the superhydrophobic property of the bamboo leaf surface. Secondly, the hydrophobic functionalized polymer surfaces with different sizes were prepared on glass substrate by using the prepared PDMS soft template and UV lithography. Based on the selective deposition of conductive polymers in the hydrophilic region, DMSO doped water-soluble conductive polymers (PEDOT:PSS.80 鈩，

本文編號：2296097