【摘要】：本文采用電弧離子鍍技術(shù)在M2高速鋼和316L不銹鋼基體上制備CrN_x薄膜。用X射線衍射儀(XRD)、掃描電鏡(SEM)、顯微硬度計和摩擦磨損試驗機等方法對制備的試樣進(jìn)行分析,研究考察真空室氣壓及氬氣/氮氣比例對CrN_x薄膜組織結(jié)構(gòu)、化學(xué)成分、顯微硬度及耐磨性能的影響。結(jié)果表明,在M2高速鋼上沉積CrN_x薄膜,氮氣氣壓的大小對薄膜的表面形貌有重大影響:隨著氮氣氣壓的升高,薄膜表面的大顆粒數(shù)量減少,尺寸減小,薄膜表面更加平整;隨著氮氣氣壓的升高,薄膜的相結(jié)構(gòu)由Cr+Cr_2N混合相轉(zhuǎn)變?yōu)镃r_2N+CrN混合相,高氮氣壓下(大于0.5Pa),薄膜的擇優(yōu)取向為Cr_2N(300),實驗中沒有發(fā)現(xiàn)CrN單相結(jié)構(gòu)。在M2高速鋼上沉積CrN_x薄膜,隨著氮氣氣壓的升高,薄膜的顯微硬度大大提高,氮氣氣壓為4.0Pa時,達(dá)到實驗所測的最大值2237 kg/mm2;隨著氮氣氣壓的升高,薄膜的摩擦系數(shù)明顯減少,氮氣氣壓為4.0Pa時,薄膜的摩擦系數(shù)最小。在316L不銹鋼上沉積CrN_x薄膜,氮氣氣壓的大小對薄膜的表面形貌有重大影響:隨著氮氣氣壓的升高,薄膜表面大顆粒數(shù)量減少,尺寸減小,薄膜表面更加平整;隨著氮氣氣壓的升高,薄膜的相結(jié)構(gòu)由Cr+Cr_2N混合相轉(zhuǎn)變?yōu)镃r_2N+CrN混合相,高氮氣壓下(大于0.5Pa),薄膜的擇優(yōu)取向為Cr_2N(300),實驗中沒有發(fā)現(xiàn)CrN單相薄膜。在M2高速鋼上沉積CrN_x薄膜,氬氣/氮氣比例大小對薄膜的表面形貌有重大影響:隨著氬氣/氮氣比例的升高,薄膜表面大顆粒數(shù)量增多,尺寸變大,薄膜表面變粗糙;氬氣/氮氣比例大小影響薄膜的相成分:實驗過程觀察膜層中存在Cr、CrN和Cr_2N三種相,氮氣/氬氣比例為0到40%時,膜層由Cr_2N+CrN混合相轉(zhuǎn)變?yōu)镃r_2N+Cr混合相,此時薄膜的擇優(yōu)取向為Cr_2N(300),實驗中沒有發(fā)現(xiàn)CrN單相薄膜。在M2高速鋼上沉積CrN_x薄膜,氬氣/氮氣比例大小影響薄膜的顯微硬度:隨著氬氣/氮氣比例的升高,薄膜的顯微硬度先降低后增加再降低,當(dāng)氬氣與氮氣比例為25%,達(dá)到極小值1776.1kg/mm2,氬氣與氮氣比例為40%,獲得實驗所測的最大值2263kg/mm2。在316L不銹鋼上沉積CrN_x薄膜,氬氣/氮氣比例大小對薄膜的表面形貌都有重大影響:隨著氬氣/氮氣比例的升高,薄膜表面大顆粒數(shù)量增多,尺寸變大,薄膜表面粗糙;氬氣/氮氣比例大小影響薄膜的相成分:實驗過程觀察膜層中存在Cr、CrN和Cr_2N三種相。氮氣/氬氣比例為0到40%時,膜層由Cr_2N+CrN混合相轉(zhuǎn)變?yōu)镃r_2N+Cr混合相,此時薄膜的擇優(yōu)取向為Cr_2N(300)。同樣實驗中沒有發(fā)現(xiàn)CrN單相薄膜。
[Abstract]:In this paper, CrN_x thin films were prepared on M2 high speed steel and 316L stainless steel by arc ion plating. The samples were analyzed by (XRD), scanning electron microscope (XRD),) microhardness tester and friction and wear tester. The microstructure and chemical composition of CrN_x films were investigated by vacuum chamber pressure and argon / nitrogen ratio. Effect of microhardness and wear resistance. The results show that the size of nitrogen gas pressure has a great influence on the surface morphology of CrN_x film deposited on M2 high speed steel. With the increase of nitrogen pressure, the number of large particles on the film surface decreases, the size decreases, and the film surface becomes more smooth. With the increase of nitrogen pressure, the phase structure of the film changed from Cr Cr_2N mixed phase to Cr_2N CrN mixed phase. At high nitrogen pressure (> 0.5Pa), the preferred orientation of the film was Cr_2N (300). No single phase structure of CrN was found in the experiment. With the increase of nitrogen pressure, the microhardness of CrN_x film on M2 high speed steel is greatly improved. When the nitrogen pressure is 4.0Pa, the maximum measured value is 2237 kg / m2, and the friction coefficient of the film decreases obviously with the increase of nitrogen pressure. When the nitrogen pressure is 4.0Pa, the friction coefficient of the film is the smallest. CrN_x films were deposited on 316L stainless steel. The surface morphology of the films was greatly affected by the nitrogen pressure. With the increase of nitrogen pressure, the number of large particles on the surface of the films decreased, the size decreased, and the surface of the films became more smooth. With the increase of nitrogen pressure, the phase structure of the film changed from Cr Cr_2N mixed phase to Cr_2N CrN mixed phase. At high nitrogen pressure (> 0.5Pa), the preferred orientation of the film was Cr_2N (300). No single phase CrN thin film was found in the experiment. CrN_x films were deposited on M2 high speed steel. The ratio of argon to nitrogen had a significant effect on the surface morphology of the films. With the increase of argon / nitrogen ratio, the number of large particles on the surface of the films increased, the size of the films became larger, and the surface of the films became rough. The phase composition of the film was influenced by the ratio of argon to nitrogen. During the experiment, there were three phases, Cr-CrN and Cr_2N. When the ratio of nitrogen to argon was 0 to 40, the film changed from Cr_2N CrN mixed phase to Cr_2N Cr mixed phase. The preferred orientation of the films is Cr_2N (300). No CrN single phase films were found in the experiment. CrN_x films were deposited on M2 high speed steel. The ar / nitrogen ratio affected the microhardness of the films. With the increase of argon / nitrogen ratio, the microhardness of the films decreased first and then decreased. When the ratio of argon to nitrogen is 25, the minimum value is 1776.1 kg / m2, and the ratio of argon to nitrogen is 40. The maximum measured value is 2263kg / mm ~ (-2). The surface morphology of CrN_x thin films deposited on 316L stainless steel is greatly influenced by the ratio of argon to nitrogen. With the increase of argon / nitrogen ratio, the number of large particles on the surface of the films increases, the size of the films becomes larger, and the surface of the films is rough. The phase composition of the film was influenced by the ratio of argon to nitrogen. Three phases, CrCrN and Cr_2N, were observed in the film during the experiment. When the ratio of nitrogen to argon is 0 to 40, the film changes from Cr_2N CrN mixed phase to Cr_2N Cr mixed phase, and the preferred orientation of the film is Cr_2N (300). In the same experiment, no CrN single phase film was found.
【學(xué)位授予單位】：沈陽理工大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2016
【分類號】：O484.1

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本文編號：2180503