本文關(guān)鍵詞： 氦質(zhì)譜檢漏 真空 PLC　出處：《中國(guó)計(jì)量學(xué)院》2014年碩士論文　論文類(lèi)型：學(xué)位論文

【摘要】：本課題對(duì)熱力膨脹閥氦質(zhì)譜檢漏技術(shù)進(jìn)行了研究并對(duì)現(xiàn)有檢漏工藝進(jìn)行優(yōu)化，設(shè)計(jì)研發(fā)一套適應(yīng)批量化生產(chǎn)模式的熱力膨脹閥氦質(zhì)譜自動(dòng)檢漏系統(tǒng)。 論文首先分析了熱力膨脹閥傳統(tǒng)檢漏方法在效率和精度上的弊端，闡述了氦質(zhì)譜檢漏的原理和方法以及漏率的計(jì)算，在此基礎(chǔ)上研究了國(guó)內(nèi)外氦質(zhì)譜檢漏技術(shù)的發(fā)展現(xiàn)狀，指出研制熱力膨脹閥氦質(zhì)譜自動(dòng)檢漏系統(tǒng)對(duì)熱力膨脹閥生產(chǎn)及檢測(cè)行業(yè)具有重要的意義。 然后，論文提出了熱力膨脹閥氦質(zhì)譜自動(dòng)檢漏系統(tǒng)的整機(jī)設(shè)計(jì)方案，主要可以分為氣路系統(tǒng)、電氣控制系統(tǒng)和測(cè)試軟件三部分。氣路系統(tǒng)負(fù)責(zé)實(shí)現(xiàn)對(duì)產(chǎn)品的檢漏工作，包括獲得穩(wěn)定的檢漏氣體和檢漏所需的真空度等；電氣控制系統(tǒng)實(shí)現(xiàn)對(duì)各部件協(xié)調(diào)控制，使各工位之間交錯(cuò)測(cè)試，互不干擾地完成整個(gè)檢漏流程。測(cè)試軟件包括人機(jī)交互界面和PLC軟件兩部分。 最后，分析了影響檢漏系統(tǒng)運(yùn)行的因素，，研究了抽真空過(guò)程中的數(shù)學(xué)模型，對(duì)系統(tǒng)管路大小和排布進(jìn)行了計(jì)算分析，保證了管路流導(dǎo)與真空泵抽速相匹配，實(shí)現(xiàn)了整個(gè)系統(tǒng)的優(yōu)化。通過(guò)實(shí)驗(yàn)和數(shù)據(jù)分析表明，系統(tǒng)可以檢測(cè)到的最小漏率可達(dá)1107mbar l/s，檢漏節(jié)拍最快可達(dá)15s/只，與傳統(tǒng)的檢漏方法相比大大提高了檢漏精度和節(jié)拍，實(shí)現(xiàn)了產(chǎn)品的高精度快速在線檢測(cè)。
[Abstract]:In this paper, the leak detection technology of thermal expansion valve helium mass spectrometry is studied, and the existing leak detection technology is optimized. An automatic leak detection system for thermal expansion valve helium mass spectrometry is designed and developed to fit the mass production mode. In this paper, the disadvantages of the traditional leak detection methods of thermal expansion valve in efficiency and precision are analyzed, the principle and method of helium mass spectrometry leak detection and the calculation of leakage rate are expounded. Based on this, the development status of helium mass spectrometry leak detection technology at home and abroad is studied. It is pointed out that the development of automatic leak detection system for helium mass spectrum of thermal expansion valve is of great significance to the production and detection of thermal expansion valve. Then, the paper puts forward the whole design scheme of the helium mass spectrum automatic leak detection system of thermal expansion valve, which can be divided into three parts: gas path system, electrical control system and test software. The gas path system is responsible for the leak detection of the product. It includes obtaining stable leak detection gas and vacuum degree needed for leak detection, etc. The electric control system realizes coordinated control of all parts, which makes the work stations interlaced with each other. The testing software includes two parts: the man-machine interface and the PLC software. Finally, the factors affecting the operation of the leak detection system are analyzed, and the mathematical model in the vacuum pumping process is studied. The pipe size and arrangement of the system are calculated and analyzed to ensure the matching of the pipeline flow guide with the pumping speed of the vacuum pump. The optimization of the whole system is realized. The experiment and data analysis show that the minimum leakage rate can be detected up to 1107 mbar l / s, and the fastest leak detection beat can be up to 15 s / s. Compared with the traditional leak detection method, the accuracy and rhythm of leak detection are greatly improved. The high precision and fast on-line detection of the product is realized.
【學(xué)位授予單位】：中國(guó)計(jì)量學(xué)院
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2014
【分類(lèi)號(hào)】：TB774.3

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