【摘要】：精密位移測量是精密制造運行過程中最關鍵的物理量測量,也是產品質量保證的重要手段。常見精密位移測量以光學測量為主,其中以激光干涉儀和光柵傳感器為最主要的兩種測量方式。激光干涉儀價格昂貴且對環(huán)境要求高,而高精度光柵對基礎設施、制造工藝要求高,并且國外對我國實行嚴格技術封鎖,導致我國光學精密測量技術及設備遠遠落后于先進技術水平。基于此,本文在國家自然科學基金的資助下開展了構造運動光場的直線時柵位移傳感器研究。利用國內相對落后的光柵制作工藝和基礎設施,研制一種可以媲美國外高精度光柵的位移傳感器。主要研究內容和創(chuàng)新點如下:(1)將形式各異的位移測量方法,歸納成兩種主要的數學模型,并對其位移測量特征進行分析;同時歸納總結了時柵位移測量的數學模型,并解釋了時柵以“時間戳”實現位移測量的本質特征。(2)從旋轉磁場產生原理出發(fā),提出在光學領域對光強用精確的空間和時間調制,實現高精度運動光場的構建的方法。并設計一種光敏陣列直接調制的單柵式時柵傳感器樣機,用實驗驗證了這種利用光強空間和時間調制實現位移測量方案的可行性。(3)開展LED準直光源設計、仿真和制作研究工作。根據LED點光源特征,結合仿真軟件對光源模型進行仿真,并提出采用自由曲面準直透鏡設計方法,對LED進行二次配光設計。通過搭建3D仿真模型仿真、透鏡實際制作和光源效果測試,完成了四組出光角度±10°的準直光源設計與制作。(4)研究了高精度運動光場產生及控制方法。主要包括傳感器透光面空間結構設計、光源設計、高精度交變光場產生及高精度光電轉換電路設計等,為如何獲取高精度運動光場提供了依據。對最終合成運動光場的性能,在兩種不同結構的傳感器樣機上分別進行了測試,驗證了以上控制方法的可行性。(5)開展了兩種結構時柵傳感器的實驗研究工作,分別檢驗構造運動光場實現位移測量的實際效果和傳感器樣機的工作性能。對影響構造運動光場直線時柵傳感器系統(tǒng)的主要誤差源進行了分析和計算,并提出硬件和直線插補的軟件相結合的誤差修正方法。實驗結果表明,在150mm量程范圍內,四相透光式時柵測量準確度為±0.45μm,三相差動透光式時柵測量準確度為±0.4μm。(6)研究提高系統(tǒng)穩(wěn)定性的方法。對不同對極數、差動結構的傳感器系統(tǒng)穩(wěn)定性進行對比測量,并提出遞推平均濾波的數字濾波方法,以提高系統(tǒng)穩(wěn)定性。實驗證明,采用差動結構、多對極平均效應、遞推平均算法等方法后,可以獲取一個高穩(wěn)定性的測量系統(tǒng)。綜上所述,本文結合時柵測量原理,在光學領域提出用光強時空正交調制合成運動光場實現精密位移測量的方法,基于此方法,設計并研制了兩種不同結構的光場式時柵傳感器。實驗研究表明,所研制的光場式時柵傳感器具有制造成本低,而測量精度高、穩(wěn)定性好的優(yōu)點。因此,本文的研究,不僅為時柵傳感器構建了一個“光-電-磁”的完整研究體系,而且為光學位移測量提供了一種不依賴精密制造工藝,實現精密位移測量的新型測量方法。
[Abstract]:Precision displacement measurement is the most important measure of physical quantity in the operation of precision manufacturing, and it is also an important means of product quality assurance. The common precision displacement measurement is mainly optical measurement, in which laser interferometer and grating sensor are the two most important measurement methods. The laser interferometer is expensive and high in environment and high precision. The grating has high requirements for infrastructure, manufacturing technology and strict technical blockade in our country. The optical precision measurement technology and equipment in our country are far behind the advanced technology level. Based on this, this paper has carried out a linear time grating displacement sensor of the structural movement light field under the support of the National Natural Science Foundation. A relatively backward grating fabrication technology and infrastructure are developed to develop a displacement sensor which can match the high precision grating of foreign countries. The main research content and innovation points are as follows: (1) the displacement measurement methods of different forms are summed up into two main mathematical models, and their displacement measurement characteristics are analyzed; and the time grid is summarized and summarized. The mathematical model of displacement measurement is made and the essential characteristics of displacement measurement are realized by time stamp. (2) from the principle of rotating magnetic field, a method of precise space and time modulation in the field of optical intensity is proposed to realize the construction of high precision moving light field. The gate sensor prototype has verified the feasibility of using the light intensity space and time modulation to realize the displacement measurement scheme. (3) carry out the design, simulation and research work of the LED collimation light source. According to the characteristics of the LED point light source, the simulation software is used to simulate the light source model, and the design method of the free surface collimation lens is proposed, and the L is designed. ED carries out two light matching design. Through the simulation of 3D simulation model, the actual fabrication of lens and the test of light source effect, the design and production of four groups of collimating light sources with light angle of 10 degrees are completed. (4) the production and control methods of high precision moving light field are studied. The design of the spatial structure of the transmittance surface of the sensor, the design of the light source and the high precision alternating light are mainly included. The field generation and the high precision photoelectric conversion circuit design provide the basis for how to obtain the high precision moving light field. The performance of the final synthetic motion light field is tested on the two different structure sensor prototype, and the feasibility of the above control method is verified. (5) the experimental research work of two kinds of structure time grating sensors is carried out. The actual effect of the displacement measurement and the working performance of the sensor prototype are tested respectively. The main error sources of the grating sensor system which affect the straight line of the structural motion light field are analyzed and calculated, and the error correction method combined with the software of the hardware and the linear interpolation is put forward. The experimental results show that the 150mm quantity is at the same time. Within the range, the accuracy of the four phase transmittance grating measurement is + 0.45 m, and the accuracy of the three phase differential transmittance grating measurement is + 0.4 M. (6) to improve the stability of the system. The stability of the sensor systems with different opposite poles and differential structures is compared and measured, and the digital filtering method of recursive mean filtering is proposed to improve the system. The experimental results show that a high stability measurement system can be obtained by using the differential structure, the multiple pairs of polar mean effects and the recursive mean algorithm. In the light of the principle of the time grating measurement, this paper proposes a method for the precision displacement measurement by using the optical intensity space-time orthogonal modulation to synthesize the moving light field, based on this method. Two kinds of light field type time grating sensors are designed and developed. The experimental study shows that the developed light field grating sensor has the advantages of low manufacturing cost, high measurement precision and good stability. Therefore, this paper not only constructs a complete study system of "light electric magnetic" for the time grid sensor, but also is the light of light field sensor. Degree shift measurement provides a new measurement method without precise manufacturing technology to achieve precise displacement measurement.
【學位授予單位】：重慶大學
【學位級別】：博士
【學位授予年份】：2016
【分類號】：TP212

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