本文選題：硅光子學(xué)　切入點(diǎn)：微型諧振腔　出處：《華中科技大學(xué)》2016年博士論文　論文類型：學(xué)位論文

【摘要】：雖然在過去的半個(gè)多世紀(jì)里,高度集成的微電子技術(shù)為人們便利的生活、高速的信息互聯(lián)做出了卓越貢獻(xiàn),但是傳統(tǒng)的半導(dǎo)體工業(yè)將受限于物理極限而無法繼續(xù)遵循摩爾定律來進(jìn)一步發(fā)展,并且電子線路中的延遲、功耗和串?dāng)_等問題日益突出。硅光集成和互連技術(shù)能夠?qū)⒏鞣N光子器件集成到同一芯片上,利用光作為信息載體來進(jìn)行信號的傳輸和處理。由于具有超快的處理速率、高集成度和較低的功耗等優(yōu)勢,特別是與成熟的互補(bǔ)金屬氧化物半導(dǎo)體(CMOS)工藝相兼容,近十年來硅光芯片集成技術(shù)得到了高速發(fā)展,已經(jīng)成為了最具有發(fā)展前景的下一代光互連方案。微環(huán)等諧振器由于緊湊的尺寸和優(yōu)異的光學(xué)特性一直是硅基光子學(xué)的研究熱點(diǎn),已經(jīng)成為了硅光集成系統(tǒng)中的基本元件。首先,微環(huán)腔體的形成不需要腔面,從而能夠?qū)崿F(xiàn)極小尺寸的高度集成；其次,微環(huán)中的諧振光可以通過干涉加強(qiáng)而聚積至很高的能量,顯著加強(qiáng)了其中的非線性效應(yīng),從而對泵浦光能量的要求也較低。特別是硅基微環(huán)具有良好的熱光效應(yīng)和等離子色散效應(yīng),可以用來對微環(huán)的光譜進(jìn)行操控,基于這些原理已經(jīng)實(shí)現(xiàn)了性能優(yōu)良的可調(diào)光學(xué)濾波器、大規(guī)模陣列光開關(guān)、高速光調(diào)制器等多種功能器件。本論文詳細(xì)介紹了硅基微環(huán)的理論基礎(chǔ)、設(shè)計(jì)原則及工藝制作方法,并實(shí)際制作了由微環(huán)、微盤等構(gòu)成的多種器件,分別應(yīng)用于不同的全光信號處理領(lǐng)域,包括模擬微波光子系統(tǒng)和全光數(shù)字信號處理等。本論文的研究成果可以概括為以下幾個(gè)方面：(1)利用雙諧振模式的高Q值微盤實(shí)現(xiàn)了光生毫米波。利用微盤不同周期的間隔不等的雙諧振模式,就可以在光頻率梳中選出不同間隔的兩個(gè)光頻率,拍頻后就可以得到不同頻率的毫米波信號。最終實(shí)現(xiàn)了頻率277GHz、306GHz和335GHz的毫米波,諧波抑制比大于25dB。(2)利用級聯(lián)半徑不等的雙環(huán)結(jié)構(gòu),實(shí)現(xiàn)了大調(diào)諧范圍的微波光子濾波器(MPF)。由于游標(biāo)卡尺效應(yīng),雙環(huán)的傳輸譜為間隔成等差數(shù)列的周期性雙諧振峰。通過調(diào)節(jié)光載波波長對準(zhǔn)不同雙諧振峰中心以及在同一雙諧振峰中心附近微調(diào),實(shí)現(xiàn)了中心頻率和3dB帶寬分別從2.5GHz～17.5GHz和6GHz～9GHz可調(diào)的MPF,且抑制比大于40dB。接著,對濾波方案做了進(jìn)一步改進(jìn),設(shè)計(jì)并制作了三個(gè)并聯(lián)的電調(diào)微環(huán),從而實(shí)現(xiàn)了連續(xù)可調(diào)的MPF。通過加熱電極對微環(huán)傳輸譜的連續(xù)調(diào)控,可以得到“雙通道處理器”的濾波光譜,進(jìn)而實(shí)現(xiàn)了中心頻率和3dB帶寬分別從19GHz-40GHz和5.5GHz-17.5GHz連續(xù)可調(diào)的MPF。(3)通過優(yōu)化微盤參數(shù),實(shí)際制作出了Q值為1×105的硅基微盤。通過單邊帶調(diào)制和微盤的高Q諧振峰,實(shí)現(xiàn)了帶寬約為2GHz、抑制比40dB、中心頻率從6GHz-18GHz連續(xù)可調(diào)的MPF。接著,利用所得到的MPF響應(yīng)實(shí)現(xiàn)了10GHz范圍的微波頻率測量,測量誤差±0.1GHz,并且測量范圍和測量精度都可以調(diào)諧。(4)提出了光纖與硅基芯片聯(lián)合的機(jī)械結(jié)構(gòu)來實(shí)現(xiàn)路徑非對稱光傳輸�；诠饫w和芯片光柵間的熱輻射效應(yīng),設(shè)計(jì)了前向光纖固定而后向光纖自由懸浮的結(jié)構(gòu),實(shí)現(xiàn)了帶寬大于24nm、非對稱傳輸比高達(dá)63dB的光傳輸。然后還從實(shí)驗(yàn)中證明了此器件不僅對連續(xù)光工作,而且對高速調(diào)制信號同樣有效,非對稱傳輸比達(dá)到了56dB。(5)在純硅芯片上基于熱光效應(yīng)實(shí)現(xiàn)了全光順序路由傳輸,即光信號在芯片中按照特定的順序在不同端口間依次傳輸而反向截止。巧妙設(shè)計(jì)了由Y分支和兩個(gè)非對稱的上下路微環(huán)諧振器(上下路的耦合間距不同)構(gòu)成的光子回路,得到了三端口全光順序路由傳輸器件。此器件結(jié)構(gòu)具有可擴(kuò)展性,每增加一個(gè)微環(huán)就可以增加一個(gè)端口數(shù)。為了改善器件工作帶寬太窄的缺陷,后續(xù)又開發(fā)了六端口的傳輸器件。通過加熱電極將各個(gè)微環(huán)諧振波長與工作波長精確對準(zhǔn),不僅提高了阻隔比,而且也實(shí)現(xiàn)了工作范圍可調(diào),從一定程度上克服了諧振器用于非對稱傳輸時(shí)帶寬窄的缺陷。(6)利用硅基芯片實(shí)現(xiàn)了全光格雷碼編碼。首先設(shè)別判定比特狀態(tài)的光功率閾值,通過控制輸入微環(huán)的諧振光功率來調(diào)節(jié)微環(huán)譜線的紅移量,從而可以使微環(huán)的傳輸端和下載端的輸出比特狀態(tài)在“0”和“1”之間切換。控制不同微環(huán)相互獨(dú)立的兩個(gè)諧振波長的功率分別按照特定的順序變化,在純光域內(nèi)產(chǎn)生了4比特的格雷碼。此器件的結(jié)構(gòu)和方案原理具有可擴(kuò)展性：利用N個(gè)微環(huán)的N個(gè)獨(dú)立諧振峰就可以實(shí)現(xiàn)2N比特的全光格雷碼編碼。
[Abstract]:Although in the past half century, highly integrated microelectronic technology for convenience of life, has made outstanding contributions to the high-speed interconnection of information, but the traditional semiconductor industry will be limited to the physical limit and can not continue to follow Moore's law to further development, and in the electronic circuit delay, power consumption and crosstalk and other issues have become increasingly prominent. Silicon optical integration and interconnection technology can be integrated into various photonic devices on the same chip, using light as an information carrier for transmission and signal processing. Due to its fast processing speed, high integration and low power consumption and other advantages, especially with the complementary metal oxide semiconductor (CMOS) technology is mature with nearly ten years of silicon chip technology has been rapid development, has become the next generation of optical interconnection scheme. The most promising micro ring resonator by compact The size and excellent optical properties has been a hot research in silicon photonics, has become the basic element of silicon optical integration system. Firstly, the formation of micro ring cavity to cavity surface, which enables the high integration small size; secondly, in the micro ring Xie Zhenguang can strengthen interference and accumulation to a high energy, significantly enhancing the nonlinear effect, which demands on the pump energy is low. Especially the silicon micro ring with thermo optic effect and plasma dispersion effect is good, can be used to control the micro ring spectrum, based on the principle has achieved tunable optical filter with good performance. Large scale optical switch array, high speed optical modulator and other functional devices. This paper introduces the basic theory of silicon based micro ring making method, design principle and process, and the actual production of the micro micro ring. A variety of devices composed of disc, are used in all-optical signal processing in different fields, including the simulation of microwave photonic systems and all-optical digital signal processing. The research results of this thesis can be summarized as follows: (1) the microdisk optical millimeter wave with high Q value. The use of double resonance mode micro disk different periodic intervals ranging from double resonant mode, two optical frequency can be selected at different intervals in the optical frequency comb in the millimeter wave signal frequency can be obtained after different frequency. Finally the frequency of the 277GHz, 306GHz and 335GHz of the millimeter wave, harmonic suppression ratio is greater than 25dB. (2) using the double loop cascade structure radius range, the microwave photonic filter large tuning range (MPF). The effect of vernier caliper, double loop transmission spectrum interval periodic double resonant peak of arithmetic progression. By adjusting the optical carrier wavelength alignment is With the double resonance peaks in the center and near the same double resonance peak center fine-tuning, realize the center frequency and bandwidth of 3dB from 2.5GHz ~ 17.5GHz and 6GHz ~ 9GHz adjustable MPF, and the inhibition ratio is greater than 40dB. then, the filtering scheme has been further developed the design and fabrication of three parallel micro power transfer ring, so as to realize the continuous control of continuous adjustable MPF. by heating the electrode of the micro ring transmission spectrum, can get the "double channel spectral filtering processor", so as to realize the center frequency and bandwidth of 3dB respectively from 19GHz-40GHz and 5.5GHz-17.5GHz continuously adjustable MPF. (3) by optimizing the parameters of the micro disk, the actual produce the Q value is 1 * 105 silicon micro disc. By single sideband modulation and high Q resonant micro disk, the bandwidth is about 2GHz. The inhibition ratio of 40dB, from the 6GHz-18GHz center frequency tunable MPF. then produced by MPF in response to achieve 10 Microwave frequency measurement range of GHz + 0.1GHz, the measurement error, and measurement range and measurement accuracy can be tuned. (4) presents the mechanical structure of combined fiber and silicon chip to realize the path of asymmetric light transmission. The heat radiation effect and optical fiber grating chip on the basis of the design to optical fiber fixing and structure the fiber free floating, the bandwidth is more than 24nm, asymmetric transmission ratio of optical transmission up to 63dB. And then from the experiment proved that this device not only for continuous light work, but also to the high speed modulation signal, asymmetric transmission ratio reached 56dB. (5) in pure silicon chip based on thermo optic effect realization the full order routing, namely the optical signal in the chip in a specific order in different ports in transmission. The reverse cut-off cleverly designed by Y bifurcation and two non symmetrically on the road on the road (micro ring resonator The different coupling spacing) photonic circuit structure, obtained the three port optical transmission devices. The order routing device structure is extensible, every increase of one micro ring can increase a number of ports. In order to improve the device defects bandwidth is too narrow, the subsequent transmission devices and the development of the six ports by heating. Each electrode micro ring resonant wavelength and wavelength precise alignment, not only improves the blocking ratio, but also realize the scope of work can be adjusted in a certain extent overcome the defects when the resonator for asymmetric transmission bandwidth. (6) the use of silicon chip to achieve all-optical gray encoding. First determine optical power equipment the threshold bit state, the resonant optical power by controlling the input micro ring to adjust the micro ring redshift of the spectrum, which can make the output bit micro ring transmission terminal and the download end in "0" and "1" Switch between different power control micro ring resonant wavelength of two independent respectively in accordance with the order of specific changes, resulting in 4 bit gray code in pure optical domain. The principle structure and scheme of this device is scalable: All-optical gray encoding with N N independent micro ring resonant peak can be the 2N bit.

【學(xué)位授予單位】：華中科技大學(xué)
【學(xué)位級別】：博士
【學(xué)位授予年份】：2016
【分類號】：TN911.7
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本文編號：1595029