本文選題：電工薄膜 + 空間磁場(chǎng)仿真分布��； 參考：《蘭州交通大學(xué)》2015年博士論文

【摘要】：電工鋼是電力、電訊和儀表工業(yè)中不可缺少的重要磁性材料,與一個(gè)國(guó)家的電能消耗量密切相關(guān)。一直以來(lái),電工鋼的生產(chǎn)工藝復(fù)雜,制造技術(shù)嚴(yán)格;國(guó)內(nèi)外的生產(chǎn)技術(shù)都以專利形式加以保護(hù),視為企業(yè)的生命。電工用硅鋼的制造技術(shù)和產(chǎn)品質(zhì)量是衡量一個(gè)國(guó)家特殊鋼生產(chǎn)和科技發(fā)展水平的重要標(biāo)志之一。隨著汽車、能源、化工、裝備制造等主導(dǎo)產(chǎn)業(yè)的的高速增長(zhǎng),電工鋼生產(chǎn)在質(zhì)量、資源和環(huán)境等方面不斷面臨新的機(jī)遇和挑戰(zhàn)。本論文利用大型真空磁控濺射綠色鍍膜裝備和技術(shù),以冷軋鋼卷為基材,通過(guò)在真空環(huán)境下對(duì)基材添加硅元素及制備基材表面電工絕緣薄膜,進(jìn)行綠色鍍膜工藝及其鍍膜過(guò)程動(dòng)態(tài)穩(wěn)定控制和靜態(tài)穩(wěn)定控制的研究,力圖探索和尋找提高電工鋼性能及制備電工鋼絕緣膜的綠色無(wú)污染的工藝和自動(dòng)化技術(shù)。論文研究了磁控濺射的工作機(jī)理,分析了磁控濺射過(guò)程中低溫等離子體的產(chǎn)生及微觀物理過(guò)程。在上述基礎(chǔ)上,依據(jù)能量守恒,建立了大型真空磁控濺射的控制模型。在建模過(guò)程和控制過(guò)程中,試圖將原子尺度上的帶電粒子和中性粒子的碰撞過(guò)程和集體效應(yīng)與米量級(jí)的大尺度等離子體行為聯(lián)系起來(lái),并進(jìn)行穩(wěn)定控制。依據(jù)磁控濺射工作的特點(diǎn),控制過(guò)程采用了自適應(yīng)模糊PI控制策略。利用PI控制的快速性以及沒(méi)有靜態(tài)誤差的特點(diǎn),磁控濺射放電可由正常輝光放電快速進(jìn)入異常輝光放電階段;且在系統(tǒng)達(dá)到穩(wěn)態(tài)階段時(shí),使磁控濺射鍍膜系統(tǒng)的實(shí)際離子濺射工作電流與所期望的離子濺射工作電流完全一致。同時(shí),利用模糊參數(shù)自整定技術(shù),在線自適應(yīng)整定PI控制器的控制參數(shù),使動(dòng)態(tài)響應(yīng)好的模糊控制與穩(wěn)態(tài)特性好的PI控制相結(jié)合,可以有效解決常規(guī)PI控制器對(duì)磁控濺射鍍膜工作系統(tǒng)的控制存在大過(guò)調(diào)或振蕩的問(wèn)題,使模糊PI控制的大型真空磁控濺射鍍膜系統(tǒng)的動(dòng)態(tài)響應(yīng)等離子體離子電流值不會(huì)躍出界限,保證磁控濺射過(guò)程不會(huì)由異常輝光放電階段意外進(jìn)入弧光放電階段,從而保證磁控濺射電源及真空設(shè)備不會(huì)受到損壞,實(shí)現(xiàn)磁控濺射鍍膜過(guò)程的動(dòng)態(tài)穩(wěn)定及靜態(tài)穩(wěn)定控制。磁控濺射鍍膜過(guò)程是一個(gè)動(dòng)態(tài)的過(guò)程,為實(shí)現(xiàn)工藝需要,本文提出了利用偏差變化變量以及偏差變量判定閉環(huán)系統(tǒng)穩(wěn)定性及優(yōu)化性能指標(biāo)的方法,建立了在線自適應(yīng)調(diào)整控制參數(shù)的模糊控制規(guī)則,判斷規(guī)則簡(jiǎn)單,有利于進(jìn)行PI參數(shù)的在線調(diào)整且適用于工程實(shí)際。仿真結(jié)果表明:PI參數(shù)在線模糊自整定控制磁控濺射過(guò)程為確保鍍膜過(guò)程系統(tǒng)穩(wěn)定,工藝標(biāo)準(zhǔn)提供了技術(shù)基礎(chǔ);整個(gè)磁控濺射鍍膜過(guò)程在系統(tǒng)參數(shù)變動(dòng)情況下可實(shí)現(xiàn)全自動(dòng)穩(wěn)定控制。實(shí)驗(yàn)結(jié)果表明:利用大型真空磁控濺射鍍膜裝備能夠?qū)崿F(xiàn)對(duì)冷軋鋼片的深加工。通過(guò)在真空環(huán)境下對(duì)冷軋鋼片添加硅元素及對(duì)其表面絕緣薄膜的制備,大型真空磁控濺射技術(shù)能夠降低冷軋鋼片的鐵損,獲得表面絕緣膜,提高電工鋼性能。該工藝方法比較人工涂層具有自動(dòng)化水平高,膜附著力強(qiáng),沒(méi)有毒害物質(zhì)生成,生產(chǎn)過(guò)程綠色環(huán)保。整個(gè)生產(chǎn)過(guò)程在系統(tǒng)參數(shù)變化情況下可實(shí)現(xiàn)自動(dòng)穩(wěn)定控制。
[Abstract]:Electrical steel is an indispensable and important magnetic material in electric power, telecommunication and instrument industry. It is closely related to the energy consumption of a country. The production technology of electrical steel is complicated and the manufacturing technology is strict. The production technology at home and abroad is protected by patent form, it is regarded as the life of the enterprise. The manufacturing technology and production of silicon steel for electrical engineering Product quality is one of the important marks to measure the production of special steel and the development level of science and technology in a country. With the rapid growth of the leading industries such as automobile, energy, chemical industry and equipment manufacturing, the production of electrical steel is facing new opportunities and challenges in quality, resources and environment. This paper uses large vacuum magnetron sputtering green coating. Preparation and technology, using cold rolled steel coil as base material, adding silicon element to substrate in vacuum environment and preparing electrical insulation film on substrate surface, research on dynamic stability control and static stability control of green coating process and its coating process, trying to explore and find green film to improve the performance of electric steel and to prepare the green film of electrical steel. The working mechanism of magnetron sputtering is studied in this paper. The production and microphysical process of low temperature plasma in the magnetron sputtering process are analyzed. Based on the conservation of energy, the control model of large vacuum magnetron sputtering is established. In the process of modeling and control, the atomic scale is attempted. The collision process and the collective effect of the charged particles and the neutral particles are linked to the behavior of the large scale plasma in the meter scale. According to the characteristics of the magnetron sputtering, the adaptive fuzzy PI control strategy is adopted in the control process. The magnetron sputtering is used for the magnetron sputtering with the characteristics of PI control and without static error. The discharge can quickly enter the abnormal glow discharge stage from normal glow discharge, and when the system reaches steady state, the actual ion sputtering current of the magnetron sputtering coating system is exactly the same as the desired ion sputtering current. At the same time, the on-line adaptive tuning PI controller is used to control the control parameter by using the fuzzy parameter self tuning technique. The combination of the fuzzy control with good dynamic response and good PI control can effectively solve the problem that the conventional PI controller has a great over or oscillation in the control of the magnetron sputtering coating system, so that the dynamic response of the magnetron sputtering coating system controlled by the fuzzy PI can not jump out of the plasma ion current. It ensures that the magnetron sputtering process will not accidentally enter the arc discharge stage by the abnormal glow discharge stage, so that the magnetron sputtering power supply and the vacuum equipment will not be damaged, and the dynamic stability and static stability control of the magnetron sputtering coating process can be realized. The magnetron sputtering coating process is a dynamic process, which is necessary for the realization of the process. In this paper, a method to determine the stability of the closed loop system and the optimal performance index is proposed by using the variation of deviation variable and the deviation variable. The fuzzy control rule of the on-line adaptive adjustment control parameters is established. The rule is simple and the PI parameters are adjusted online and applied to the engineering practice. The simulation results show that the PI parameters are on-line model. In order to ensure the stability of the coating process system, the process standard provides a technical basis for the process system stability. The whole magnetron sputtering coating process can achieve full automatic stability control under the change of the system parameters. The experimental results show that the deep processing of cold rolled steel sheet can be realized by the large vacuum magnetron sputtering film equipment. In the vacuum environment, the silicon element is added to the cold rolled steel sheet and its surface insulation film is prepared. The large vacuum magnetron sputtering technology can reduce the iron loss of the cold rolled steel sheet, obtain the surface insulation film and improve the performance of the electrical steel. The whole production process can achieve automatic stability control under the change of system parameters.

【學(xué)位授予單位】：蘭州交通大學(xué)
【學(xué)位級(jí)別】：博士
【學(xué)位授予年份】：2015
【分類號(hào)】：TM275

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