【摘要】：當(dāng)自混合干涉(SMI)發(fā)生在一個(gè)非準(zhǔn)直激光器外腔時(shí),反射光將在激光器和外部物體之間發(fā)生多次反射,然后再返回激光內(nèi)腔與發(fā)出光耦合形成自混合干涉效應(yīng),這現(xiàn)象被稱為多重反饋?zhàn)曰旌细缮嫘?yīng)(MSMI)。與自混合干涉相比,它可以在不增加復(fù)雜算法和設(shè)備的前提下,成倍提高測(cè)量?jī)x器的分辨率。這對(duì)于提高儀器的測(cè)量精度具有非常重要的意義。許多科研人員已經(jīng)開展了多重反饋?zhàn)曰旌细缮娆F(xiàn)象和產(chǎn)生機(jī)理的研究。然而,目前還缺少多重反饋?zhàn)曰旌细缮嬲駝?dòng)測(cè)量技術(shù)和多重反饋次數(shù)的判定等相關(guān)問題的研究。本課題利用多重反饋?zhàn)曰旌细缮娴姆直媛矢?光路簡(jiǎn)單、能判別方向、自準(zhǔn)直、結(jié)構(gòu)緊湊、成本低等特點(diǎn),開展多重反饋?zhàn)曰旌细缮嬲駝?dòng)測(cè)量技術(shù)的研究,旨在解決自混合干涉振動(dòng)測(cè)量中存在的測(cè)量誤差大、實(shí)時(shí)性差、抗干擾能力弱、通用性不強(qiáng)等問題,力求提高振動(dòng)測(cè)量準(zhǔn)確性和通用性。本文主要研究對(duì)象是低頻微納米級(jí)的振動(dòng)測(cè)量。在低頻范圍內(nèi),振動(dòng)強(qiáng)度與位移成正比,所以本文通過振動(dòng)位移表征振動(dòng)強(qiáng)度和形變。本文的主要研究?jī)?nèi)容如下:首先,針對(duì)多重反饋?zhàn)曰旌细缮嬲駝?dòng)測(cè)量時(shí),缺少相應(yīng)振動(dòng)測(cè)量理論支持的問題,以自混合干涉三鏡腔(F-P)模型理論為基礎(chǔ),建立了多重反饋?zhàn)曰旌细缮嫱ㄓ玫南辔环匠�、功率方程和位移方�?并對(duì)測(cè)量分辨率進(jìn)行了分析。為多重反饋?zhàn)曰旌细缮嬲駝?dòng)測(cè)量技術(shù)研究奠定了理論基礎(chǔ),并通過實(shí)驗(yàn)方法研究外腔長(zhǎng)和傾斜角度對(duì)多重反饋?zhàn)曰旌细缮娴挠绊�。其�?針對(duì)相位解卷算法中跳變點(diǎn)檢測(cè)閾值判斷的問題,提出一種不需要判斷閾值的改進(jìn)跳變點(diǎn)檢測(cè)算法。該算法利用干涉信號(hào)經(jīng)過微分處理后,有效條紋趨勢(shì)波動(dòng)大,而無(wú)效條紋趨勢(shì)波動(dòng)小的特點(diǎn),通過獲取識(shí)別方波判別有效干涉條紋,根據(jù)有效干涉條紋確定峰谷值點(diǎn)位置,進(jìn)而確定相位解卷算法中重構(gòu)振動(dòng)位移的關(guān)鍵參數(shù),提高了干涉條紋檢測(cè)的準(zhǔn)確率,并把該算法應(yīng)用于多重反饋?zhàn)曰旌细缮娴恼駝?dòng)重構(gòu)中。實(shí)驗(yàn)結(jié)果表明,多重反饋?zhàn)曰旌细缮娴闹貥?gòu)誤差比自混合干涉減少了38%。再次,針對(duì)基于相位解卷方法中需要對(duì)光反饋因子和線性展寬因子進(jìn)行聯(lián)合估計(jì)的問題,提出基于功率譜分析的多重反饋?zhàn)曰旌细缮嬲駝?dòng)快速解調(diào)算法。該算法利用多重反饋?zhàn)曰旌细缮嫘盘?hào)功率譜中的極大值與第一類貝塞爾函數(shù)極大值對(duì)應(yīng)的特點(diǎn),建立功率譜極大值與外部物體振幅的對(duì)應(yīng)關(guān)系及功率譜主頻的判斷規(guī)則,進(jìn)而能快速計(jì)算出外部物體振動(dòng)頻率和振幅。該方法不需對(duì)光反饋因子和線性展寬因子進(jìn)行聯(lián)合估計(jì),在獲取外部物體振動(dòng)頻率及幅度的過程中只提取干涉信號(hào)功率譜的基頻及主頻所對(duì)應(yīng)的頻率,其他干擾信息均被屏蔽,提高了算法的抗干擾能力和解調(diào)速度。實(shí)驗(yàn)結(jié)果表明,當(dāng)外部物體振幅小于5μm時(shí),振幅解調(diào)的最大誤差是75nm,比自混合干涉的降低了53%。同時(shí),本章提出了多重反饋?zhàn)曰旌细缮娣答伌螖?shù)的判定規(guī)則,解決了多重反饋?zhàn)曰旌细缮娣答伌螖?shù)無(wú)法區(qū)分的問題,并通過實(shí)驗(yàn)進(jìn)行了驗(yàn)證。然后,針對(duì)多重反饋?zhàn)曰旌细缮嬲駝?dòng)位移重構(gòu)誤差大,無(wú)法進(jìn)行高精度測(cè)量的問題,提出正弦相位調(diào)制的振動(dòng)位移重構(gòu)方法,該方法用電光相位調(diào)制器(EOM)對(duì)干涉信號(hào)進(jìn)行正弦相位調(diào)制,建立調(diào)制信號(hào)頻譜的一次諧波和二次諧波與第一類貝塞爾函數(shù)第一階和第二階的對(duì)應(yīng)關(guān)系,提取頻譜的一次諧波和二次諧波進(jìn)行實(shí)時(shí)相位計(jì)算,根據(jù)實(shí)時(shí)相位重構(gòu)外部物體的振動(dòng)位移。實(shí)驗(yàn)結(jié)果表明,對(duì)于振幅小于5μm的低頻振動(dòng),重構(gòu)誤差小于5nm。因?yàn)橹貥?gòu)振動(dòng)位移時(shí)只用到了調(diào)制信號(hào)頻譜一次、二次諧波,其它成分均被屏蔽,所以該方法具有很好的抗干擾性能。最后,為了驗(yàn)證基于正弦相位調(diào)制的多重反饋?zhàn)曰旌细缮嬲駝?dòng)測(cè)量技術(shù)的性能,從不同振幅、不同頻率兩方面與多普勒測(cè)振儀(LDV)進(jìn)行對(duì)比。實(shí)驗(yàn)結(jié)果表明,該技術(shù)重構(gòu)的速度在不同振幅、不同頻率兩方面與LDV有較好的一致性。將多重反饋?zhàn)曰旌细缮嬗糜诠艿佬孤z測(cè)上,提出了管道泄漏檢測(cè)單點(diǎn)定位方法。在管道的一端同一檢測(cè)點(diǎn)安裝兩個(gè)多重反饋?zhàn)曰旌细缮鎮(zhèn)鞲衅?一個(gè)用于測(cè)量管道橫向振動(dòng),另一個(gè)用于測(cè)量管道縱向振動(dòng),利用管道壁內(nèi)橫波和縱波傳播速度不同,通過二者的時(shí)間差測(cè)量泄漏點(diǎn)到檢測(cè)點(diǎn)的距離,同時(shí)利用干涉條紋傾斜方向來判斷聲源方向。實(shí)驗(yàn)結(jié)果表明,所設(shè)計(jì)的單點(diǎn)泄漏定位傳感器能在管道一端正確測(cè)量泄漏位置,定位誤差小于5%。
[Abstract]:When a self-mixing interference (smi) occurs in an outer cavity of a non-collimated laser, the reflected light will be reflected multiple times between the laser and the external object and then return to the laser cavity to form a self-mixing interference effect with the emitted light, This phenomenon is referred to as multiple feedback self-mixing interference effect (MSMI). Compared with the self-mixing interference, it can multiply the resolution of the measuring instrument under the premise of not adding complex algorithm and equipment. This is of great importance to improve the measuring accuracy of the instrument. Many researchers have conducted multiple feedback self-mixing interference phenomena and mechanism research. However, there is a lack of research on the related problems of multi-feedback self-mixing interference vibration measurement technology and multiple feedback times. This paper makes use of the characteristics of high resolution, simple optical path, direction, self-collimation, compact structure and low cost of multiple feedback self-mixing interference, and carries out the research on multi-feedback self-mixing interference vibration measurement technology. aiming at solving the problems of large measurement error, poor real-time performance, weak anti-interference capability, strong universality and the like existing in the self-mixing interference vibration measurement, and aims to improve the accuracy and the universality of vibration measurement. The main research object is the low-frequency micro-scale vibration measurement. In the low frequency range, the vibration intensity is proportional to the displacement, so the vibration intensity and deformation are characterized by vibration displacement. The main contents of this paper are as follows: Firstly, based on the theory of hybrid interference three-mirror cavity (F-P) model, a general phase equation of multiple feedback self-mixing interference is established based on the theory of hybrid interference three-mirror cavity (F-P) model. The power equation and displacement equation are analyzed and the measurement resolution is analyzed. This paper establishes a theoretical basis for multi-feedback self-mixing interference vibration measurement technology, and studies the influence of external cavity length and tilt angle on multi-feedback self-mixing interference through experimental methods. Secondly, an improved hop-point detection algorithm which does not need to judge the threshold is proposed for the problem of threshold judgment of the jump point detection in the phase deconvolution algorithm. According to the algorithm, after the interference signal is subjected to differential processing, the effective fringe trend fluctuation is large, and the characteristic that the fluctuation of the invalid stripe trend is small, the peak valley value point position is determined according to the effective interference fringe by acquiring the identification square wave judging effective interference fringe, Furthermore, the key parameters of the reconstruction vibration displacement in the phase deconvolution algorithm are determined, the accuracy of the interference fringe detection is improved, and the algorithm is applied to the vibration reconstruction of multiple feedback self-mixing interference. The experimental results show that the reconstruction error of multiple feedback self-mixing interference is reduced by 38% compared with the self-mixing interference. Thirdly, a multi-feedback self-mixing interference vibration fast demodulation algorithm based on power spectrum analysis is proposed for the problem of combining the optical feedback factor and the linear broadening factor in the phase-based deconvolution method. The algorithm uses the characteristic of the maximum value in the power spectrum of the multi-feedback self-mixing interference signal and the maximum value of the first class Bezier function to establish a judgment rule of the corresponding relation between the power spectrum maximum value and the amplitude of the external object and the dominant frequency of the power spectrum, in addition, that vibration frequency and the amplitude of the external object can be rapidly calculated. The method does not need to jointly estimate the optical feedback factor and the linear broadening factor, extracts only the frequency corresponding to the fundamental frequency and the dominant frequency of the interference signal power spectrum in the process of acquiring the vibration frequency and amplitude of the external object, and the other interference information is shielded, and the anti-jamming capability and the demodulation speed of the algorithm are improved. The experimental results show that when the amplitude of external object is less than 5. m, the maximum error of amplitude demodulation is 75nm, which is 53% lower than that of self-mixing interference. At the same time, this chapter puts forward the decision rule of multiple feedback self-mixing interference feedback times, solves the problem that multiple feedback self-mixing interference feedback times cannot be distinguished, and verifies by experiment. then, aiming at the problem that the multi-feedback self-mixing interference vibration displacement reconstruction error is large and the high-precision measurement cannot be carried out, a sinusoidal phase modulation vibration displacement reconstruction method is proposed, and the method uses an electro-optical phase modulator (EOM) to carry out sine phase modulation on the interference signal, establishing a corresponding relation between the primary harmonic and the second harmonic of the frequency spectrum of the modulated signal and the first order and the second order of the first class of bezier functions, extracting the primary harmonic and the second harmonic of the frequency spectrum for real-time phase calculation, and reconstructing the vibration displacement of the external object according to the real-time phase. The experimental results show that the reconstruction error is less than 5nm for low frequency vibration with amplitude less than 5. m the method has good anti-interference performance because only one time, the second harmonic and the other components of the modulation signal are shielded when the vibration displacement is reconstructed. Finally, in order to verify the performance of multi-feedback self-mixing interference vibration measurement technology based on sinusoidal phase modulation, it is compared with the Doppler vibrometer (LDV) from different amplitudes and different frequencies. The experimental results show that the speed of the technique is consistent with LDV at different amplitudes and different frequencies. Multi-feedback self-mixing interference is used for pipeline leakage detection, and a single point positioning method for pipeline leakage detection is proposed. two multiple feedback self-mixing interference sensors are arranged at the same detection point at one end of the pipeline, one is used for measuring the transverse vibration of the pipeline, the other is used for measuring the longitudinal vibration of the pipeline, and the transverse wave and the longitudinal wave propagation speed in the pipeline wall are different, the distance between the leakage point and the detection point is measured by the time difference of the two, and the direction of the sound source is judged by the oblique direction of the interference fringe. The experimental results show that the designed single-point leak positioning sensor can measure the leakage position correctly at one end of the pipeline, and the positioning error is less than 5%.
【學(xué)位授予單位】：哈爾濱工業(yè)大學(xué)
【學(xué)位級(jí)別】：博士
【學(xué)位授予年份】：2017
【分類號(hào)】：TH744.5

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