【摘要】：在一些高精密光學檢測中,例如高反射鏡、超光滑光學表面的散射率的檢測,一般大氣環(huán)境中存在大量散射粒子,粒子的散射光會對測量結果產生一定干擾,如果檢測信號非常微弱時,這樣的影響將不能忽略�，F(xiàn)階段對環(huán)境的評估方法主要是對環(huán)境中粒子濃度進行測量,但是這些方法要么測量過程復雜,難以推廣,要么對測量粒子要求苛刻,實用性不高。針對以上問題,本文設計了一種大氣環(huán)境散射率測量裝置,主要通過測量環(huán)境的散射率,以達到評估環(huán)境的目的。本散射率測量系統(tǒng)是以穩(wěn)功率激光器為光源。當光束穿過存有粒子的積分球空腔時散射光被收集在積分球內,并利用光電倍增管測量收集到的散射光。系統(tǒng)采用鎖相放大器進行信號處理,有效的去除背景噪聲。測量系統(tǒng)主要由光源、光路、探測、數(shù)據(jù)處理等部分組成。光源部分以半導體激光器作為核心器件,設計了半導體激光器的驅動電路以及調制電路,實現(xiàn)了激光器功率的穩(wěn)定輸出和電調制;光路部分主要完成了光束的轉折、衰減和雜散光消除等;探測部分完成了散射光收集,使用光電倍增管完成光電信號轉換和信號放大;數(shù)據(jù)處理部分利用鎖相放大器實現(xiàn)了相關檢測技術,有效的提高了信噪比。使用單片機作為控制芯片,設計了 A/D轉換及顯示電路等相關輔助電路。通過上述方案,搭建了散射率測量系統(tǒng),對實驗室環(huán)境進行了散射率測量,并對實驗數(shù)據(jù)進行了認真分析。實驗表明該測量系統(tǒng)達到了測量1～100ppm的設計要求。實現(xiàn)了激光環(huán)境散射率的準確測量,且精度高、測試方便迅速、適用范圍廣。
[Abstract]:In some high precision optical detection, such as high reflector, the detection of scattering rate of ultra-smooth optical surface, there are a large number of scattered particles in general atmospheric environment, the scattering light of particles will produce certain interference to the measurement results. If the detection signal is very weak, this effect can not be ignored. At present, the main methods of environmental assessment are to measure the concentration of particles in the environment. However, these methods are either complicated and difficult to be popularized, or they are demanding to measure particles and are not practical. Aiming at the above problems, this paper designs a measuring device for the scattering rate of atmospheric environment, mainly by measuring the scattering rate of the environment, in order to achieve the purpose of evaluating the environment. The scattering rate measurement system is based on a stable power laser as a light source. When the beam passes through the cavity of the integrated sphere containing particles, the scattered light is collected in the integral sphere and measured by photomultiplier tube. The system uses a phase-locked amplifier for signal processing to effectively remove background noise. The measurement system is mainly composed of light source, optical path, detection, data processing and so on. In the light source part, the semiconductor laser is used as the core device, the driving circuit and modulation circuit of the semiconductor laser are designed, the stable output and electric modulation of the laser power are realized. Attenuation and stray light elimination; detection part completed the collection of scattered light, using photomultiplier tube to complete the photomultiplier signal conversion and signal amplification; the data processing part of the use of phase-locked amplifier to achieve the correlation detection technology, effectively improve the signal-to-noise ratio. Using single chip computer as control chip, the auxiliary circuits such as A / D conversion and display circuit are designed. Through the above scheme, a scattering rate measurement system is set up, the scattering rate of the laboratory environment is measured, and the experimental data are carefully analyzed. Experiments show that the system meets the design requirements of 1~100ppm measurement. The accurate measurement of laser scattering rate is realized, with high accuracy, convenient and rapid measurement and wide range of application.
【學位授予單位】：西安工業(yè)大學
【學位級別】：碩士
【學位授予年份】：2017
【分類號】：O436.2

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本文編號：2225151