【摘要】：提出一種新型的基于基片集成波導(dǎo)和消失模諧振腔的壓力傳感結(jié)構(gòu)。設(shè)計(jì)了圓形空腔,當(dāng)施加外界壓力時(shí),圓形空腔發(fā)生形變從而使諧振腔諧振頻率變化。采用共面波導(dǎo)線對(duì)諧振腔進(jìn)行耦合饋電并將頻率信號(hào)傳輸出來。通過讀取傳感器的回波損耗參數(shù)(S11)來表征壓力與頻率的關(guān)系。利用高頻仿真軟件HFSS對(duì)諧振腔進(jìn)行了仿真設(shè)計(jì)和優(yōu)化,設(shè)計(jì)尺寸為30 mm×30 mm×1.93 mm,與傳統(tǒng)諧振腔相比體積明顯減小。傳感器基底為Rogers 4003C板材,采用PCB技術(shù)進(jìn)行加工。搭建壓力測試平臺(tái)對(duì)傳感器進(jìn)行測試,結(jié)果表明在0~3 N的壓力范圍內(nèi)變化100 MHz,絕對(duì)靈敏度為25 MHz/N。仿真和實(shí)測結(jié)果比較吻合,驗(yàn)證了所設(shè)計(jì)壓力結(jié)構(gòu)的有效性。
[Abstract]:A novel pressure sensing structure based on substrate integrated waveguide and lost mode resonator is proposed. The circular cavity is designed. When the external pressure is applied, the circular cavity is deformed and the resonant frequency of the resonator is changed. The resonator is fed by coplanar wave conductor and the frequency signal is transmitted. The relationship between pressure and frequency is characterized by reading the echo loss parameter (S11) of the sensor. The high frequency simulation software HFSS is used to simulate and optimize the resonator. The design size is 30 mm 脳 30 mm 脳 1.93 mm, which is obviously smaller than that of the traditional resonator. The sensor substrate is Rogers 4003C sheet, which is processed by PCB technology. The pressure test platform is built to test the sensor. The results show that the absolute sensitivity of 100 MHz, is 25 MHz/N. in the pressure range of 0 鈮，

本文編號(hào)：2490433