【摘要】：近年來由于科學技術發(fā)展,各儀器設備的精度和穩(wěn)定性都不斷提升,各種振動的影響變得越發(fā)突出,如何有效地隔離低頻和超低頻振動現(xiàn)已成為研究熱點和難點。與被動隔振技術相比,主動隔振技術具有更小的振動傳遞率,并且具有更大的隔振帶寬,在精密測試和超精密制造設備中都得到廣泛應用。磁電式振動速度傳感器是主動隔振系統(tǒng)的重要組成部分,由于使用環(huán)境的限制,傳感器不能同時滿足小體積和低頻信號探測的要求。因此,在不改變傳感器機械結構的前提下,選擇合理的補償方案,設計滿足性能要求的良好的補償電路及補償軟件具有很高的實用價值。本文首先分析了隔振系統(tǒng)對傳感器的性能要求,并對各類絕對振動傳感器的工作特性進行了分析和比較,最終確定了關鍵技術指標和傳感器型號。在深入分析了磁電式速度傳感器的結構和工作原理的基礎上,建立傳感器的動力學模型,構建傳感器的傳遞函數(shù),得到傳感器的幅頻特性。根據(jù)傳遞函數(shù)分析傳感器的低頻測量局限及其原因,并且針對該局限提出傳感器低頻擴展方案,最后確定使用零極點補償法對傳感器進行低頻擴展。由于需要更為準確的傳遞函數(shù),本文還研究了磁電式速度傳感器的多種測試方法,例如直流激勵法、正弦激勵信號法和振動臺法等。分析了各種方法的優(yōu)缺點,結合各種因素,決定采用直流激勵法對傳感器參數(shù)進行測試,設計測試的硬件電路和軟件,獲取傳感器精確的傳遞函數(shù)。根據(jù)所測量得到的傳遞函數(shù)和零極點補償法原理設計相應補償硬件和軟件,完成信號處理。最后搭建磁電式速度傳感器參數(shù)識別實驗平臺,對傳感器參數(shù)進行識別,實驗結果表明,直流激勵法中心頻率測量相對誤差為0.35%,阻尼比相對誤差為0.92%。將測試參數(shù)用于零極點補償網(wǎng)絡,并進行低頻信號檢測實驗驗證擴展電路和軟件對磁電式速度傳感器的低頻擴展功能。實驗結果表明:利用硬件電路和軟件方法均能夠?qū)崿F(xiàn)將傳感器中心頻率由4.8Hz降至0.28Hz,實現(xiàn)傳感器低頻帶擴展目標。
[Abstract]:In recent years, due to the development of science and technology, the accuracy and stability of various instruments and equipments have been continuously improved, and the influence of various kinds of vibration has become more and more prominent. How to effectively isolate low-frequency and ultra-low frequency vibration has become a hot and difficult point. Compared with passive vibration isolation technology, active vibration isolation technology has smaller vibration transfer rate and larger vibration isolation bandwidth. It is widely used in precision testing and ultra-precision manufacturing equipment. Magnetoelectric vibration velocity sensor is an important part of active vibration isolation system. Due to the limitation of environment, the sensor can not meet the requirements of both small volume and low frequency signal detection. Therefore, under the premise of not changing the mechanical structure of the sensor, it is of great practical value to select a reasonable compensation scheme and design a good compensation circuit and compensation software to meet the performance requirements. In this paper, the performance requirements of the vibration isolation system to the sensor are analyzed, and the working characteristics of all kinds of absolute vibration sensors are analyzed and compared. Finally, the key technical specifications and the type of the sensor are determined. On the basis of deeply analyzing the structure and working principle of magnetoelectric speed sensor, the dynamic model of the sensor and the transfer function of the sensor are established, and the amplitude-frequency characteristic of the sensor is obtained. According to the transfer function, the low frequency measurement limitation of the sensor and its reasons are analyzed, and the low frequency expansion scheme of the sensor is put forward. Finally, the zero pole compensation method is used for the low frequency expansion of the sensor. Due to the need for more accurate transfer function, this paper also studies many testing methods of magnetoelectric velocity sensor, such as DC excitation method, sinusoidal excitation signal method and shaking table method, etc. The advantages and disadvantages of various methods are analyzed and the DC excitation method is adopted to test the sensor parameters. The hardware circuit and software are designed and the accurate transfer function of the sensor is obtained. According to the measured transfer function and the principle of zero-pole compensation, the corresponding compensation hardware and software are designed to complete the signal processing. Finally, an experiment platform is built to identify the parameters of magnetoelectric speed sensor. The experimental results show that the relative error of DC excitation method is 0.35 and the relative error of damping ratio is 0.92. The test parameters are applied to the zero-pole compensation network and the low-frequency signal detection experiments are carried out to verify the low-frequency spread function of the expansion circuit and software to the magnetoelectric speed sensor. The experimental results show that the center frequency of the sensor can be reduced from 4.8Hz to 0.28Hz by both hardware circuit and software method, and the target of low frequency band expansion can be realized.
【學位授予單位】：哈爾濱工業(yè)大學
【學位級別】：碩士
【學位授予年份】：2017
【分類號】：TP212

【參考文獻】

相關期刊論文 前9條

1 魏繼東;;檢波器反褶積對低頻信息的補償作用[J];石油地球物理勘探;2016年02期

2 程麗娜;匙慶磊;;一種有源超低頻速度傳感器樣機的設計[J];傳感技術學報;2012年08期

3 佘天莉;楊學山;王雷;楊巧玉;;基于DSP系統(tǒng)的測振傳感器低頻特性補償[J];儀表技術與傳感器;2010年04期

4 劉鳳舉;吳簡彤;劉力;;基于雙線性變換法的IIR數(shù)字濾波器設計與matlab仿真[J];自動化技術與應用;2008年09期

5 佘天莉;侯興民;楊學山;;測振傳感器的低頻特性補償研究[J];傳感器與微系統(tǒng);2006年11期

6 俞阿龍,陳華寶;振動速度傳感器的動態(tài)性能改進的軟件方法[J];淮陰師范學院學報(自然科學版);2004年04期

7 楊學山;高峰;候興民;;Low-frequency characteristics extension for vibration sensors[J];Earthquake Engineering and Engineering Vibration;2004年01期

8 范云霄,于濤,楊俊茹,趙擁軍;超低頻振動傳感器的研究[J];煤礦機電;2002年03期

9 劉恩澤,嚴濟寬,陳端石;噪聲主動控制系統(tǒng)研究概況及發(fā)展趨勢[J];噪聲與振動控制;1999年03期

相關會議論文 前1條

1 余水寶;張筱燕;成斌;鄭金菊;金永賢;;傳感器傳遞函數(shù)回歸算法及其應用研究[A];第三屆全國信息獲取與處理學術會議論文集[C];2005年

相關博士學位論文 前1條

1 張孝良;理想天棚阻尼的被動實現(xiàn)及其在車輛懸架中的應用[D];江蘇大學;2012年

相關碩士學位論文 前10條

1 蘇文;基于直流激勵的檢波器測試儀研制[D];吉林大學;2016年

2 王夢遠;基于FPGA的IIR數(shù)字濾波器設計[D];東南大學;2016年

3 陳譯;基于FPGA的數(shù)字檢波器系統(tǒng)設計與實現(xiàn)[D];蘇州大學;2016年

4 童聲群;基于FPGA的動圈檢波器參數(shù)測試儀的設計與實現(xiàn)[D];中國科學技術大學;2015年

5 楊小龍;基于Stewart機構的隔振技術研究[D];南京航空航天大學;2014年

6 曹雙蘭;基于零極點補償法的低頻檢波器設計及其標定方法研究[D];吉林大學;2013年

7 段疾病;基于串行通信的地震檢波器綜合測試系統(tǒng)的設計實現(xiàn)[D];中國海洋大學;2013年

8 肖明偉;磁電式振動速度傳感器低頻特性補償?shù)难芯縖D];重慶大學;2011年

9 劉雷鈞;主動隔振系統(tǒng)傳感器信號調(diào)理技術研究[D];華中科技大學;2011年

10 朱照;傳感器動態(tài)特性模擬及動態(tài)補償濾波器的DSP實現(xiàn)[D];中北大學;2010年

，

本文編號：2199437