基于摩擦電原理的自供能電阻式氣體傳感器研究
發(fā)布時間：2018-08-18 11:09
【摘要】：生活生產(chǎn)中廢氣的排放造成了大氣的污染,嚴重威脅了人們的身體健康,同時人類也一直面臨能源問題的困擾,所以研發(fā)一種低成本、低功耗、高靈敏度的氣體傳感器是一件十分有意義的事情。摩擦電荷在生活中到無處不在,在很多情況下,摩擦起電被認為是一種負面的物理現(xiàn)象,然而摩擦發(fā)電機的發(fā)明,為摩擦電荷應用打開了廣闊的空間。叉指電極是一種性能優(yōu)良的電極結構,在其上沉積氣體敏感薄膜,可以制備電阻式氣體傳感器。將摩擦發(fā)電機與電阻式氣體傳感器相結合,可以制備一種新型的氣體傳感器—自供能氣體傳感器,其中摩擦發(fā)電機是自供能氣體傳感器的能量收集部件。該類型的氣體傳感器具有諸多優(yōu)點,比如成本低、功耗低、魯棒性強等。本文基于二氧化氮(NO_2)氣體的檢測,制備了基于摩擦電原理的分離式電阻式自供能氣體傳感器,主要內容有以下幾個方面:首先,制備了不同尺寸、不同接觸材料的接觸分離模式的摩擦發(fā)電機,并研究了摩擦發(fā)電機開路電壓,短路電流,電壓阻抗效應和電流阻抗效應的機理,同時研究了摩擦發(fā)電機的面積大小和接觸材料對發(fā)電機性能的影響。實驗結果表明,增大摩擦發(fā)電機接觸面的面積以及間距、采用得失電子能力相差大的接觸面材料、加快極板運動速度有利于提高摩擦發(fā)電機峰峰值電壓或電流的輸出性能。其次,用PTFE和Cu材料制備了接觸面積為100cm2的摩擦發(fā)電機和在紫外光輔助條件下,制備了基于氧化鋅(ZnO)材料的NO_2氣體傳感器。研究了敏感薄膜厚度對NO_2的響應性能,發(fā)現(xiàn)存在一個最佳的響應薄膜厚度,結果表明,噴涂量為2mL的的ZnO酒精懸浮液(3mg/mL)響應最佳:其靈敏度為0.167ppm-1,在100ppm的NO_2的濃度下,其響應達到14.8。最后,在最佳噴涂量的條件下,研究了基于氧化鋅(ZnO)和還原石墨烯(RGO)材料制備的單層、分層、混合五種類型的器件,并對五種類型的器件進行了響應測試、重復性測試和選擇性進行測試。測試結果表明,RGO和ZnO混合器件其響應靈敏度最高,達到0.196ppm-1。該器件在100ppm NO_2濃度下,響應為16.7,同時具有較好的選擇性,但相對于純的ZnO器件,RGO和ZnO混合器件重復性能略微降低。
[Abstract]:The emission of waste gas in daily production has caused air pollution and seriously threatened the health of people. At the same time, human beings have been confronted with energy problems, so we have developed a kind of low cost and low power consumption. A highly sensitive gas sensor is a very meaningful thing. Friction charge is ubiquitous in daily life. In many cases, friction charging is regarded as a negative physical phenomenon. However, the invention of friction generator opens a wide space for the application of friction charge. InterDigital electrode is a kind of excellent electrode structure on which gas sensitive film can be deposited and resistive gas sensor can be prepared. By combining friction generator with resistive gas sensor, a new type of gas sensor, self-supply gas sensor, is developed, in which friction generator is the energy collecting component of self-supply gas sensor. This type of gas sensor has many advantages, such as low cost, low power consumption, strong robustness and so on. In this paper, based on the detection of nitrogen dioxide (NO_2) gas, a separate resistive self-energy gas sensor based on triboelectric principle is prepared. The main contents are as follows: firstly, different sizes are prepared. The mechanism of open circuit voltage, short circuit current, voltage impedance effect and current impedance effect of friction generator is studied. At the same time, the effect of the area size and contact material of friction generator on the performance of the generator is studied. The experimental results show that increasing the area and spacing of the contact surface of friction generator, using contact surface materials with large difference in gain and loss electronic capacity, and accelerating the speed of plate motion are conducive to improving the output performance of peak and peak voltage or current of friction generator. Secondly, friction generator with contact area of 100cm2 and NO_2 gas sensor based on ZnO (ZnO) material were fabricated by using PTFE and Cu materials. The response performance of the sensitive film thickness to NO_2 was studied. It was found that there was an optimal response film thickness. The results showed that the ZnO alcohol suspension (3mg/mL) with the spraying amount of 2mL had the best response: its sensitivity was 0.167 ppm-1, under the concentration of NO_2 of 100ppm. The response reached 14.8. Finally, under the condition of optimum spraying amount, the monolayer, delamination and mixing of five kinds of devices based on zinc oxide (ZnO) and reduced graphene (RGO) are studied, and the responses of five kinds of devices are tested. Repeatability test and selective test. The test results show that the RGO / ZnO hybrid device has the highest response sensitivity, reaching 0.196 ppm-1. The response of the device at 100ppm NO_2 concentration is 16.7, and it has good selectivity, but compared with pure ZnO device, the repeatability of RGO and ZnO hybrid device is slightly reduced.
【學位授予單位】：電子科技大學
【學位級別】：碩士
【學位授予年份】：2017
【分類號】：TP212
[Abstract]:The emission of waste gas in daily production has caused air pollution and seriously threatened the health of people. At the same time, human beings have been confronted with energy problems, so we have developed a kind of low cost and low power consumption. A highly sensitive gas sensor is a very meaningful thing. Friction charge is ubiquitous in daily life. In many cases, friction charging is regarded as a negative physical phenomenon. However, the invention of friction generator opens a wide space for the application of friction charge. InterDigital electrode is a kind of excellent electrode structure on which gas sensitive film can be deposited and resistive gas sensor can be prepared. By combining friction generator with resistive gas sensor, a new type of gas sensor, self-supply gas sensor, is developed, in which friction generator is the energy collecting component of self-supply gas sensor. This type of gas sensor has many advantages, such as low cost, low power consumption, strong robustness and so on. In this paper, based on the detection of nitrogen dioxide (NO_2) gas, a separate resistive self-energy gas sensor based on triboelectric principle is prepared. The main contents are as follows: firstly, different sizes are prepared. The mechanism of open circuit voltage, short circuit current, voltage impedance effect and current impedance effect of friction generator is studied. At the same time, the effect of the area size and contact material of friction generator on the performance of the generator is studied. The experimental results show that increasing the area and spacing of the contact surface of friction generator, using contact surface materials with large difference in gain and loss electronic capacity, and accelerating the speed of plate motion are conducive to improving the output performance of peak and peak voltage or current of friction generator. Secondly, friction generator with contact area of 100cm2 and NO_2 gas sensor based on ZnO (ZnO) material were fabricated by using PTFE and Cu materials. The response performance of the sensitive film thickness to NO_2 was studied. It was found that there was an optimal response film thickness. The results showed that the ZnO alcohol suspension (3mg/mL) with the spraying amount of 2mL had the best response: its sensitivity was 0.167 ppm-1, under the concentration of NO_2 of 100ppm. The response reached 14.8. Finally, under the condition of optimum spraying amount, the monolayer, delamination and mixing of five kinds of devices based on zinc oxide (ZnO) and reduced graphene (RGO) are studied, and the responses of five kinds of devices are tested. Repeatability test and selective test. The test results show that the RGO / ZnO hybrid device has the highest response sensitivity, reaching 0.196 ppm-1. The response of the device at 100ppm NO_2 concentration is 16.7, and it has good selectivity, but compared with pure ZnO device, the repeatability of RGO and ZnO hybrid device is slightly reduced.
【學位授予單位】：電子科技大學
【學位級別】：碩士
【學位授予年份】：2017
【分類號】：TP212
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