本文選題：精密定位 + 壓電微位移平臺(tái)��； 參考：《昆明理工大學(xué)》2017年碩士論文

【摘要】：精密定位技術(shù)已成為高新技術(shù)領(lǐng)域的核心之一,在尖端工業(yè)生產(chǎn)(如微納CPU的生產(chǎn)、MEMS微納機(jī)電系統(tǒng)的加工制造等)和科學(xué)研究(如細(xì)胞注射、AFM原子力學(xué)顯微鏡精度的提高等)中占有極其重要的地位。因此,對(duì)精密定位技術(shù)的研究成為了全球科學(xué)家和學(xué)者關(guān)注的熱點(diǎn)。而精密定位技術(shù)定位精確度的提高、準(zhǔn)確度的增強(qiáng)、分辨力的提升以及定位速度的提高一直是該技術(shù)研究的難點(diǎn)。為此,本文以自行搭建的壓電微位移平臺(tái)精密定位系統(tǒng)作為研究對(duì)象,編寫了相關(guān)的控制程序,對(duì)壓電微位移平臺(tái)遲滯特性進(jìn)行了建模,通過基于電壓補(bǔ)償前饋控制及PID反饋控制的閉環(huán)控制方法對(duì)其遲滯進(jìn)行了補(bǔ)償,以達(dá)到線性控制的目的。主要的研究類容如下:1.針對(duì)XP-611型壓電微位移平臺(tái),搭建了基于壓電微位移平臺(tái)的精密定位實(shí)驗(yàn)系統(tǒng)。實(shí)驗(yàn)系統(tǒng)由以下幾個(gè)工作模塊組成:位移傳感模塊、驅(qū)動(dòng)電源模塊、壓電微動(dòng)工作臺(tái)、計(jì)算機(jī)機(jī)控制系統(tǒng)。2.針對(duì)以一體式壓電微位移平臺(tái)XP-611為核心的精密定位實(shí)驗(yàn)系統(tǒng),采用基于LabVIEW的數(shù)據(jù)采集程序?qū)ξ⑽灰乒ぷ髋_(tái)的數(shù)據(jù)進(jìn)行采集。采用基于MATLAB的測(cè)試程序?qū)ξ⑽灰破脚_(tái)的特性進(jìn)行測(cè)試。3.對(duì)壓電微位移平臺(tái)的遲滯特性進(jìn)行了研究,闡明了其遲滯非線性機(jī)理,并利用Bouc-Wen模型對(duì)其遲滯特性進(jìn)行數(shù)學(xué)描述。通過分析該模型的優(yōu)缺點(diǎn),發(fā)現(xiàn)該模型在壓電微位移平臺(tái)快速定位中存在建模不準(zhǔn)確的現(xiàn)象,提出了以Bouc-Wen模型為核心結(jié)合壓電微位移平臺(tái)固有特性的復(fù)合建模方式。建立的復(fù)合模型在平臺(tái)快速定位實(shí)驗(yàn)中,能夠提升模型的準(zhǔn)確率,驗(yàn)證了該復(fù)合模型的優(yōu)越性,同時(shí)還建立了基于Bouc-Wen遲滯模型機(jī)理的類Bouc-Wen遲滯模型,以應(yīng)用于有時(shí)效性要求的壓電微位移平臺(tái)的快速定位中。4.根據(jù)建立的遲滯模型,編寫了相應(yīng)的控制算法,以消除壓電微位移平臺(tái)的遲滯特性,達(dá)到線性控制的目的,具體為:分析了 Bouc-Wen模型的特點(diǎn),編寫了以電壓補(bǔ)償為前饋環(huán)節(jié),PID控制反饋環(huán)節(jié)的閉環(huán)控制程序,將壓電微位移臺(tái)的遲滯電壓進(jìn)行補(bǔ)償,以達(dá)到線性輸出的目的,并和單一使用PID控制的方法以及單一使用Bouc-Wen模型電壓補(bǔ)償控制的方法進(jìn)行了對(duì)比,驗(yàn)證了復(fù)合控制的優(yōu)越性。
[Abstract]:Precision positioning technology has become one of the core fields of high and new technology. It plays a very important role in the advanced industrial production (such as the fabrication of MEMS MEMS micromechanical systems) and scientific research (such as the improvement of the precision of AFM atomic mechanical microscope). Therefore, the research of precision positioning technology has become the focus of attention of scientists and scholars all over the world. The improvement of positioning precision, accuracy, resolution and positioning speed are the difficulties in the research of precision positioning technology. Therefore, in this paper, the precision positioning system of piezoelectric micro-displacement platform is taken as the research object, and a related control program is compiled to model the hysteresis characteristics of the piezoelectric micro-displacement platform. The hysteresis is compensated by the closed-loop control method based on voltage compensation feedforward control and pid feedback control to achieve the purpose of linear control. The main categories of research are as follows: 1. Aiming at the XP-611 piezoelectric micro displacement platform, a precision positioning experiment system based on the piezoelectric micro displacement platform is built. The experimental system consists of the following working modules: displacement sensing module, driving power module, piezoelectric micromotion table, computer control system. Aiming at the precision positioning experiment system based on the integrated piezoelectric micro-displacement platform XP-611, the data acquisition program based on LabVIEW is used to collect the data of the micro-displacement table. The testing program based on MATLAB is used to test the characteristics of micro displacement platform. 3. 3. The hysteresis characteristics of piezoelectric micro-displacement platform are studied, the nonlinear hysteresis mechanism is explained, and the hysteresis characteristics of piezoelectric micro-displacement platform are described by using Bouc-Wen model. By analyzing the advantages and disadvantages of the model, it is found that the model is not accurate in the rapid positioning of piezoelectric micro-displacement platform. A composite modeling method based on Bouc-Wen model and inherent characteristics of piezoelectric micro-displacement platform is proposed. The composite model can improve the accuracy of the model in the platform rapid positioning experiment, and verify the superiority of the composite model. At the same time, the Bouc-Wen hysteresis model based on Bouc-Wen hysteresis model mechanism is established. In order to apply to the rapid positioning of piezoelectric micro-displacement platform with time-dependent requirements. 4. According to the established hysteresis model, the corresponding control algorithm is compiled to eliminate the hysteresis characteristics of the piezoelectric micro-displacement platform and to achieve the purpose of linear control. The characteristics of Bouc-Wen model are analyzed. A closed-loop control program with voltage compensation as feedforward link and pid control feedback link is written to compensate the hysteresis voltage of piezoelectric microdisplacement table in order to achieve the purpose of linear output. Compared with the single pid control method and the single Bouc-Wen model voltage compensation control method, the superiority of the compound control is verified.
【學(xué)位授予單位】：昆明理工大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2017
【分類號(hào)】：TP273

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