發(fā)布時間：2018-06-21 23:02

  本文選題：諧振式壓力傳感器 + 敏感結(jié)構(gòu)��； 參考：《儀表技術(shù)與傳感器》2017年03期

【摘要】：根據(jù)雙端固支梁的諧振頻率求解,以及方形膜片在壓力下形變和應(yīng)力的理論分析,設(shè)計了一個基于梁-膜結(jié)構(gòu)硅諧振式壓力傳感器敏感結(jié)構(gòu)的模型。對該模型進行ANSYS仿真,得到它在1個大氣壓下的總形變和應(yīng)力分布,以及前六階的振動模態(tài)。比較方形膜片和長方形膜片下敏感結(jié)構(gòu)的仿真結(jié)果,得出相同面積下長方形膜片的靈敏度更高,檢測時非線性誤差更小。通過對不同厚度硅梁與硅膜下敏感結(jié)構(gòu)的仿真,最終設(shè)定硅膜與硅梁的厚度分別為50μm和10μm。該傳感器主要用于航空儀器儀表中對大氣壓的高精度檢測。
[Abstract]:According to the solution of the resonant frequency of the double-end clamped beam and the theoretical analysis of the deformation and stress of the square diaphragm under the pressure, a sensitive structure model of silicon resonant pressure sensor based on the beam-membrane structure is designed. The total deformation and stress distribution of the model at 1 atmospheric pressure and the first six vibration modes are obtained by ANSYS simulation. By comparing the simulation results of the sensitive structure under the square diaphragm and the rectangular diaphragm, it is concluded that the sensitivity of the rectangular diaphragm is higher and the nonlinear error of the detection is less. Through the simulation of silicon beam with different thickness and sensitive structure under silicon film, the thickness of silicon film and silicon beam is set to be 50 渭 m and 10 渭 m respectively. The sensor is mainly used for high precision measurement of atmospheric pressure in aeronautical instruments and instruments.
【作者單位】： 合肥工業(yè)大學(xué)電子科學(xué)與應(yīng)用物理學(xué)院;中國科學(xué)院合肥智能機械研究所傳感技術(shù)國家重點實驗室;安徽工業(yè)大學(xué)機械工程學(xué)院;
【基金】：2014年國家青年自科基金項目(51405001) 2014年安徽省青年自科基金項目(1408085QE98) 中國科學(xué)院合肥物質(zhì)科學(xué)研究院院長基金項目(YZJJ201504)
【分類號】：TP212
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本文編號：2050407