本文選題：柔性力敏薄膜 + 單點壓力傳感器��； 參考：《電子科技大學》2017年碩士論文

【摘要】：柔性壓力傳感器是用來測量感知各種復雜表面的壓力實時變化的柔性傳感電子器件,一般由柔性襯底材料,柔性電極,柔性力敏薄膜組成,按照組合方式主要分為單點式壓力傳感器和陣列式壓力傳感器。單點式壓力傳感器主要針對點目標,可用于實時精確測量某一個單點微小位置的壓力變化情況,柔性陣列式壓力傳感器主要針對面目標,適用于檢測復雜物體表面所受到的壓力大小和壓力分布狀態(tài)。本論文針對構成壓力傳感器核心部分的柔性力敏薄膜進行了深入研究,設計制作了基于TPU(熱塑性聚氨酯)和高導電炭黑復合材料的柔性力敏薄膜,并基于該柔性力敏薄膜設計制作了柔性單點壓力傳感器和陣列壓力傳感器。研究了改善壓力傳感器靈敏度、穩(wěn)定性、重復性、響應時間、抗蠕變性能等的工藝方法。然后設計制作了相應的采集調理電路,最后利用Labview測控軟件開發(fā)工具開發(fā)了相應的上位機軟件,實現(xiàn)了對傳感器信號的采集、標定、優(yōu)化、處理、存儲和顯示。本論文首先探究了0-3構型的柔性力敏薄膜復合材料的導電機理,包括常用的導電復合材料加和效應:滲流模型理論和隧道效應理論,以及導電復合材料乘法效應:壓阻效應(正壓阻效應和負壓阻效應),概況分析了力敏薄膜內(nèi)部導電網(wǎng)絡的形成與破壞過程;然后對力敏薄膜的各種性能表征方法進行了介紹。進一步的,通過具體實驗研究了柔性力敏薄膜的制備工藝過程,包括柔性基體材料的選擇,導電物質的選擇和其他納米改性材料的選擇,以及有機溶劑的選擇。本文實驗中采用的是熱塑性聚氨酯(TPU)作為基體材料,高導電炭黑作為導電物質,ITO納米顆粒作為改性材料,用流延涂覆法制備力敏薄膜。研究了不同炭黑摻雜濃度下力敏薄膜的初始電阻變化,根據(jù)滲流模型理論找出該導電復合材料的滲流閾值為10%wt,滲流區(qū)域為10%wt-12%wt;然后在滲流區(qū)域附近制備了幾種不同摻雜濃度下的力敏薄膜并分別測試其壓阻性能,找出了TPU與高導電炭黑的最優(yōu)化配比濃度為12%wt;最后利用各種性能表征手段對力敏薄膜的表面形貌、靈敏系數(shù)、線性度、重復性、響應時間等性能參數(shù)進行了測試。為了改善導電材料在基體材料的分散效果和抗蠕變性能,比較了摻雜ITO納米顆粒與SiO2納米顆粒對改善力敏薄膜重復性和一致性的影響。通過上述工作制備了性能良好的厚度為200μm的柔性力敏薄膜以及單點壓力傳感器、彎曲度應變傳感器和4×4陣列式壓力傳感器,靈敏度和響應時間(㩳100ms)都得到極大優(yōu)化,具備了對壓力變化實時動態(tài)監(jiān)測的能力。最后分別設計制作了單點和陣列壓力傳感器的后端信號調理電路和上位機軟件,將力敏薄膜的電阻變化轉化為易于測量的電壓變化。單點壓力傳感器后端電路利用反相運算放大器mcp6001將傳感器電阻變化轉化為電壓信號,經(jīng)AVR單片機內(nèi)置的模數(shù)器轉換后由串口發(fā)送到上位機進行數(shù)據(jù)處理和顯示;陣列壓力傳感器后端調理電路利用AVR單片機控制CD4051數(shù)字模擬開關實現(xiàn)了對陣列式壓力傳感器的行列掃描,將多點問題轉化為易于處理的單點問題,采集的電壓數(shù)據(jù)經(jīng)串口發(fā)送到上位機進行數(shù)據(jù)處理和顯示。針對陣列電阻測量中不可避免的電阻交叉耦合問題,提出了通過改進傳感器結構來消除陣列壓力傳感器各傳感單元之間交叉耦合問題的新方法。最后利用Labview測控開發(fā)軟件開發(fā)了對應的上位機軟件,實現(xiàn)了對傳感器信號的讀取和顯示。
[Abstract]:Flexible pressure sensor is a flexible sensing electronic device used to measure real time change of pressure in various complex surfaces. It consists of flexible substrate material, flexible electrode and flexible force sensitive film. According to combination, it is divided into single point pressure sensor and array pressure sensor. Single point pressure sensor is mainly aimed at point order. The standard can be used to measure the pressure change of a single point position in real time. The flexible array pressure sensor is mainly aimed at the surface, and is suitable for measuring the pressure and pressure distribution of the surface of a complex object. This paper has studied the flexible force sensitive film which is the core of the pressure sensor. A flexible force sensitive film based on TPU (thermoplastic polyurethane) and high conductive carbon black composites was designed and fabricated. A flexible single point pressure sensor and an array pressure sensor were designed and fabricated based on the flexible thin film. The process to improve the sensitivity, stability, repeatability, response time and creep resistance of the pressure sensor was studied. And then the corresponding collection and adjustment circuit is designed and produced. At last, the corresponding PC software is developed by using the Labview software development tool, which realizes the acquisition, calibration, optimization, processing, storage and display of the sensor signals. This paper first explores the conductive mechanism of the flexible force sensitive thin film composite with 0-3 configurations. The addition and effect of conductive composite materials: seepage model theory and tunneling effect theory, and the multiplicative effect of conductive composite material: piezoresistive effect (positive piezoresistive effect and negative pressure resistance effect), the formation and failure process of the internal conductive network of the force sensitive film is analyzed, and the various performance characterization methods of the force sensitive film are introduced. One step, the preparation process of flexible force sensitive thin films was studied by specific experiments, including the selection of flexible matrix materials, selection of conductive materials and the selection of other nano modified materials, and the selection of organic solvents. In this experiment, the thermoplastic polyurethane (TPU) was used as the matrix material, and the high conductive carbon black was used as the conductive material. ITO nanoparticles are used as modified materials to prepare the force sensitive thin film with a flow coating method. The initial resistance changes of the force sensitive film under different carbon black doping concentration are studied. The percolation threshold of the composite is 10%wt, and the percolation zone is 10%wt-12%wt. Then several different doping is prepared near the seepage area. The piezoresistive performance of the force sensitive film under the concentration was tested and the optimal ratio of TPU to high conductive carbon black was found to be 12%wt. Finally, the properties of the surface morphology, sensitivity coefficient, linearity, repeatability and response time of the film were tested by various performance characterization methods. In order to improve the conductive material in the matrix material The effects of the dispersion and creep resistance of the material were compared. The effects of doped ITO nanoparticles and SiO2 nanoparticles on the reproducibility and consistency of the Li Min film were compared. Through the above work, a flexible force sensitive film with a good thickness of 200 mu and a single point pressure sensor, a flexural strain sensor and a 4 x 4 array pressure sensor were prepared. The sensitivity and response time (? 100ms) have been greatly optimized and have the ability to monitor the pressure change in real time. Finally, the back end signal conditioning circuit and the host computer software for single point and array pressure sensors are designed and made respectively. The resistance change of the force sensitive film is converted to the voltage change easily measured. The back end circuit uses the inverse operational amplifier mcp6001 to convert the change of the sensor resistance to voltage signal, and transmits it to the upper computer through the serial port after conversion of the built-in analog digital device of the AVR single chip microcomputer to carry out data processing and display. The array pressure sensor backend circuit uses the AVR single chip computer to control the CD4051 digital analog switch to realize the array column. The multi point problem is transformed into a single point problem which is easy to be handled by the column scan of the pressure sensor. The voltage data collected is sent to the host computer for data processing and display by serial port. In view of the unavoidable resistance cross coupling problem in the array resistance measurement, an improved sensor structure is proposed to eliminate the transmission of the array pressure sensors. A new method of cross coupling between sensing elements is used. At last, the corresponding PC software is developed by using Labview test and control development software, which realizes the reading and display of the sensor signals.
【學位授予單位】：電子科技大學
【學位級別】：碩士
【學位授予年份】：2017
【分類號】：TP212

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