本文選題：光柵結(jié)構(gòu)反演 + 隨機(jī)微粒群優(yōu)化(SPSO)算法��； 參考：《北京航空航天大學(xué)學(xué)報》2017年11期

【摘要】：微結(jié)構(gòu)光柵是一種廣泛應(yīng)用的電子元件。采用隨機(jī)微粒群優(yōu)化(SPSO)算法反演了一維鋁基襯底矩形光柵的幾何結(jié)構(gòu)參數(shù)。首先介紹了嚴(yán)格耦合波分析(RCWA)法和微粒群優(yōu)化算法的基本原理,并采用RCWA法求解了光柵內(nèi)電磁場問題;然后根據(jù)正問題求得的光柵光譜反射率建立目標(biāo)函數(shù),并采用SPSO算法優(yōu)化目標(biāo)函數(shù),反演得到單槽和雙槽矩形光柵的周期、凸脊寬度和凹槽深度;最后分析了種群大小和搜索區(qū)間對反演結(jié)果的影響。結(jié)果表明,SPSO算法可以準(zhǔn)確地反演光柵幾何結(jié)構(gòu)參數(shù),并推薦種群數(shù)取30。
[Abstract]:Microstructural grating is a widely used electronic component. The geometric parameters of one-dimensional aluminum substrate rectangular grating are inversed by stochastic particle swarm optimization (SPSO) algorithm. The basic principles of strictly coupled wave analysis (RCWA) method and particle swarm optimization (PSO) algorithm are introduced, and the electromagnetic field problem in grating is solved by RCWA method, and then the objective function is established according to the spectral reflectivity of grating obtained from the positive problem. Using SPSO algorithm to optimize the objective function, the period, ridge width and groove depth of single and double grooved rectangular gratings are obtained. Finally, the effect of population size and search interval on the inversion results is analyzed. The results show that the SPSO algorithm can accurately retrieve the geometric structure parameters of the grating, and the population number is recommended to be 30.
【作者單位】： 哈爾濱工業(yè)大學(xué)能源科學(xué)與工程學(xué)院;上海衛(wèi)星工程研究所;
【基金】：國家自然科學(xué)基金(51476043)~~
【分類號】：TP18;V444.3
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本文編號：1927823