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Morphological and electrical properties of SrTiO 3 /TiO 2 /S

發(fā)布時(shí)間:2021-04-17 04:22
  SrTiO3(STO) and TiO2 are insulating materials with large dielectric constants and opposite signs of the quadratic coefficient of voltage(α). Insertion of a TiO2 thin film between STO layers increases the linearity of the capacitance in response to an applied voltage, to meet the increasing demand of large-capacitance-density dynamic random access memory capacitors. Both STO and TiO2 suffer from the problem of high leakage current owing to their almost ... 

【文章來(lái)源】:Chinese Physics B. 2017,26(01)EISCI

【文章頁(yè)數(shù)】:4 頁(yè)


本文編號(hào):3142799

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