【摘要】：為了提高全息光柵曝光系統(tǒng)的曝光對(duì)比度,抑制外部環(huán)境變化引起的曝光干涉條紋漂移,提出了一種移柵型干涉條紋鎖定方法。采用分束光柵實(shí)現(xiàn)光源激光的分光及干涉條紋的相位調(diào)整。通過(guò)疊柵條紋間接測(cè)量干涉條紋相位變化,給出了雙光電探測(cè)器的最佳探測(cè)位置。結(jié)合分光及相位調(diào)整功能,給出了分束光柵參數(shù)的設(shè)計(jì)方法。針對(duì)光柵曝光特點(diǎn)設(shè)計(jì)了控制器。從理論上對(duì)比了分束光柵與壓電反射鏡的相位調(diào)整性能。實(shí)驗(yàn)結(jié)果表明,采樣頻率為500Hz時(shí),干涉條紋的低頻漂移得到有效抑制,相位鎖定精度達(dá)到0.13rad(3σ),即條紋漂移量低于±0.021個(gè)周期。該方法可以實(shí)時(shí)有效地鎖定曝光干涉條紋,提高曝光對(duì)比度。且分束光柵偏轉(zhuǎn)對(duì)條紋周期影響小,相位調(diào)整性能僅與分束光柵參數(shù)相關(guān),便于光路設(shè)計(jì)。
[Abstract]:In order to improve the exposure contrast of the holographic grating exposure system and suppress the exposure interference fringe drift caused by the change of external environment, a grid-shifting interferometric fringe locking method is proposed. The beam splitting grating is used to realize the phase adjustment of laser beam splitting and interference fringes. The optimum detection position of double photodetectors is given by indirectly measuring the phase change of interference fringes by stacked grid fringes. The design method of the parameters of beam splitting grating is given in combination with the functions of light splitting and phase adjustment. According to the characteristic of grating exposure, the controller is designed. The phase adjustment performance of beam splitting grating and piezoelectric reflector is compared theoretically. The experimental results show that the low frequency drift of the interference fringes is effectively suppressed when the sampling frequency is 500Hz, and the phase locking accuracy is up to 0.13rad (3 蟽), that is, the fringe drift is less than 鹵0.021 periods. This method can lock the exposure interference fringes in real time and improve the exposure contrast. The deflection of the beam splitting grating has little effect on the fringe period, and the phase adjustment performance is only related to the parameters of the beam splitting grating, so it is convenient to design the optical path.
【作者單位】： 中國(guó)科學(xué)院長(zhǎng)春光學(xué)精密機(jī)械與物理研究所光柵技術(shù)研究中心;中國(guó)科學(xué)院大學(xué);
【基金】：國(guó)家自然科學(xué)基金國(guó)家重大科研儀器設(shè)備研制專項(xiàng)(61227901) 國(guó)家重大科學(xué)儀器設(shè)備開(kāi)發(fā)專項(xiàng)(2011YQ120023)
【分類號(hào)】：O436.1

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