【摘要】：硅微諧振加速度計(jì)是一種頻率輸出的MEMS儀表,針對(duì)其差動(dòng)頻率輸出的特點(diǎn)和對(duì)靜態(tài)與動(dòng)態(tài)高精度測(cè)試精度的要求,設(shè)計(jì)并實(shí)現(xiàn)了一種高精度頻率輸出電路,實(shí)現(xiàn)了差動(dòng)頻率的實(shí)時(shí)相減和靜態(tài)與動(dòng)態(tài)頻率信號(hào)輸出。對(duì)電路及儀表的精度進(jìn)行了測(cè)試,測(cè)試結(jié)果表明,該電路穩(wěn)定性可達(dá)到1×10-9,全溫范圍內(nèi)(-40~+70℃)非線性優(yōu)于1×10-7,頻率分辨率可達(dá)到1×10-5,測(cè)試精度滿足儀表系統(tǒng)精度要求,使儀表更滿足工程應(yīng)用的條件。根據(jù)實(shí)際工程應(yīng)用要求,還對(duì)該電路提出了抗干擾設(shè)計(jì),進(jìn)一步提高了該電路的工程應(yīng)用可靠性。
[Abstract]:Silicon microresonant accelerometer is a frequency output MEMS instrument. According to the characteristics of its differential frequency output and the requirement of static and dynamic high precision measurement precision, a high precision frequency output circuit is designed and implemented. Real-time subtraction of differential frequency and output of static and dynamic frequency signals are realized. The accuracy of the circuit and the instrument is tested. The test results show that the stability of the circuit can reach 1 脳 10 ~ (-9), the nonlinearity is better than 1 脳 10 ~ (-7) and the frequency resolution can reach 1 脳 10 ~ (-5) in the full temperature range (-40 ~ 70 鈩，

本文編號(hào)：2187602