本文選題：磁導(dǎo)率頻譜 + 共面波導(dǎo)�。� 參考：《電子科技大學(xué)》2014年碩士論文

【摘要】：伴隨著現(xiàn)代科學(xué)技術(shù)的迅速發(fā)展,利用磁性薄膜材料設(shè)計和制備的高性能磁性器件具有尺寸小、精度高以及速度快等特點,廣泛地應(yīng)用在微機電系統(tǒng)、微波通訊系統(tǒng)、電子對抗系統(tǒng)和信息存儲系統(tǒng)等領(lǐng)域。隨著電子器件工作頻率的提高,磁性薄膜大量地應(yīng)用在微波頻段,準(zhǔn)確地表征磁性材料的微波電磁參數(shù)如微波磁導(dǎo)率以及鐵磁共振線寬不僅是其應(yīng)用的基礎(chǔ),同時也是研究磁性薄膜高頻磁化動力學(xué)的基礎(chǔ)。因而準(zhǔn)確表征磁性薄膜的微波磁性能(主要包括微波磁導(dǎo)率和鐵磁共振線寬)具有十分重要的意義。論文首先建立了利用共面波導(dǎo)傳輸線來測試薄膜磁導(dǎo)率的計算模型,根據(jù)傳輸線的集總電路模型結(jié)合微波網(wǎng)絡(luò)散射參數(shù)推導(dǎo)了利用測試得到的散射參數(shù)來計算磁性薄膜微波磁導(dǎo)率頻譜的公式。然后設(shè)計了共面波導(dǎo)測試夾具,并對其尺寸進(jìn)行了仿真優(yōu)化,確定接地共面波導(dǎo)(GCPW)測試夾具尺寸為:基片材料選用厚度為0.508mm的Roggers5880,GCPW的中間信號導(dǎo)帶寬度為1.2mm,信號導(dǎo)帶與兩邊接地板的間距為0.1mm。對加載了磁性薄膜的測試夾具的仿真計算結(jié)果表明,計算出的磁譜與仿真時輸入磁譜基本一致。利用GCPW夾具測試了各向同性NiFe膜、各向異性NiFe薄膜以及傾斜濺射制備的NiFe膜的磁譜,并用理論磁譜公式進(jìn)行了擬合。結(jié)果表明所有NiFe薄膜測試計算出的磁譜均可以用理論公式進(jìn)行很好的擬合,驗證了該測試夾具以及測試?yán)碚摰恼_性。測試結(jié)果表明,各向同性NiFe膜的共振頻率為0.9GHz,擬合得到的飽和磁化強度sM?686 kA m,各向異性場kH=0.608 kA m,阻尼系數(shù)?=0.0 2。各向異性NiFe膜共振頻率為2GHz,sM?495 kA m,kH=5.2 kA m,阻尼因子?=0.02。傾斜濺射制備的普通NiFe膜共振頻率為2.2GHz,sM?724 kA m,kH=5.6 kA m,阻尼因子?=0.012。利用鐵磁共振過程中磁性薄膜吸收能量與外加磁場的關(guān)系建立了利用共面波導(dǎo)測試夾具來測試磁性薄膜鐵磁共振線寬的方法。用GCPW夾具測試了普通NiFe膜和加熱條件鍍的NiFe膜鐵磁共振頻率隨外磁場的變化,結(jié)果表明,共振頻率隨著外加穩(wěn)恒磁場的增大向高頻移動。普通NiFe薄膜在3GHz、3.5GHz、4GHz頻率下的鐵磁共振線寬分別為41.7Oe、45.9Oe、50.4Oe而加熱條件下制備的NiFe膜在3GHz、3.5GHz、4GHz頻率下的的鐵磁共振線寬分別為90Oe、100.3Oe、110.2Oe。
[Abstract]:With the rapid development of modern science and technology, the high performance magnetic devices designed and fabricated by using magnetic thin film materials have the characteristics of small size, high precision and high speed. They are widely used in MEMS and microwave communication systems. Electronic countermeasures systems and information storage systems and other areas. With the increasing of the working frequency of electronic devices, magnetic thin films are widely used in microwave frequency band. It is not only the basis of their application to accurately characterize the microwave electromagnetic parameters of magnetic materials such as microwave permeability and ferromagnetic resonance linewidth. At the same time, it is the basis of studying the high frequency magnetization kinetics of magnetic thin films. Therefore, it is of great significance to accurately characterize the microwave magnetic properties of magnetic films (including microwave permeability and ferromagnetic resonance linewidth). In this paper, a calculation model for measuring the permeability of thin films using coplanar waveguide transmission lines is established. Based on the lumped circuit model of transmission line and the scattering parameters of microwave network, the formula for calculating the microwave permeability spectrum of magnetic thin films is derived by using the measured scattering parameters. Then the coplanar waveguide testing fixture is designed and its size is simulated and optimized. The size of the test fixture is determined as follows: the width of intermediate signal conduction band of Rogers 5880 GCPW with thickness of 0.508mm is 1.2 mm, and the distance between the signal conduction band and the floor connected to both sides is 0.1 mm.. The simulation results of the test fixture loaded with magnetic film show that the calculated magnetic spectrum is basically consistent with the input magnetic spectrum in the simulation. The magnetic spectra of isotropic nife films, anisotropic nife films and nife films prepared by tilt sputtering were measured by GCPW clamp. The results show that all the magnetic spectra of nife films can be fitted well by theoretical formula, and the correctness of the testing fixture and testing theory is verified. The results show that the resonance frequency of the isotropic nife film is 0.9GHz, the saturation magnetization (sm) is 686kA / m, the anisotropic field is 0.608kA / m, and the damping coefficient is 0.02. The resonance frequency of the anisotropic nife film is 2 GHz / m ~ (495) KH ~ (5. 2) KH ~ (2 +), and the damping factor is 0. 02. The resonance frequency of ordinary nife films prepared by inclined sputtering is 2.2GHz / s Mn 724kA / KH ~ + 5.6 kA / m, and the damping factor is 0.012 / m. Based on the relationship between the absorption energy of magnetic thin films and the applied magnetic field in ferromagnetic resonance, a method for measuring the linewidth of magnetic thin films using coplanar waveguide testing fixture is established. The change of ferromagnetic resonance frequency with external magnetic field of ordinary nife film and nife film deposited under heating condition was measured by GCPW clamp. The results show that the resonance frequency moves to high frequency with the increase of external steady magnetic field. The ferromagnetic resonance linewidths of ordinary nife thin films at the frequency of 3 GHz and 3.5 GHz are 41.7 OeN 45.9 Oe and 50.4 Oe, respectively, and the ferromagnetic resonance linewidth of the nife films prepared at 3GHz 3.5GHz is 90Oe100.3Oe110.2Oerespectively.
【學(xué)位授予單位】：電子科技大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2014
【分類號】：TN814

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本文編號：2045457