【摘要】：在不改變現(xiàn)有硬件條件的情況下,開展超分辨掃描重建方法,可以在不增加系統(tǒng)成本的基礎(chǔ)上提高高分辨X射線顯微鏡的成像性能.設(shè)計(jì)了基于亞像素掃描的超分辨掃描模式,按照設(shè)計(jì)的調(diào)制方式進(jìn)行亞像素位移的移動(dòng),采集多幅具有互補(bǔ)信息的低分辨率圖像;然后基于系統(tǒng)的點(diǎn)擴(kuò)散函數(shù),對(duì)高分辨率圖像進(jìn)行復(fù)原;最后結(jié)合POCS超分辨重建算法重建出高分辨圖像.實(shí)驗(yàn)結(jié)果表明,10倍光耦探測(cè)器下的襯度噪聲比提高了20%左右,空間分辨力提高了0.2μm(約15%),細(xì)節(jié)分辨能力超過探測(cè)器像素尺寸1.35μm的限制,可以看到在低分辨率圖像中看不到的細(xì)節(jié).實(shí)驗(yàn)說明用超分辨技術(shù)提高高分辨X射線顯微鏡的分辨率是有意義的.
[Abstract]:Without changing the existing hardware conditions, the super-resolution scanning reconstruction method can improve the imaging performance of high-resolution X-ray microscope without increasing the system cost. The super-resolution scanning mode based on sub-pixel scanning is designed, and the sub-pixel displacement is moved according to the modulation mode designed, and several low-resolution images with complementary information are collected, and then based on the point diffusion function of the system, The high resolution image is restored and the high resolution image is reconstructed with POCS super-resolution reconstruction algorithm. The experimental results show that the contrast noise ratio increases by about 20%, the spatial resolution increases by 0.2 渭 m (about 15%), and the resolution of detail exceeds the pixel size of 1.35 渭 m, which can be seen in the low-resolution image. The experiment shows that it is significant to improve the resolution of high resolution X-ray microscope by super-resolution technique.
【作者單位】： 天津大學(xué)精密儀器與光電子工程學(xué)院;天津三英精密儀器股份有限公司;中國(guó)科學(xué)院高能物理研究所;
【基金】：國(guó)家自然科學(xué)基金(No.61372144) 第61批博士后面上項(xiàng)目資助(No.2017M610996)~~
【分類號(hào)】：TH742;TP391.41

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