【摘要】：本文利用中頻磁控濺射和等離子體增強(qiáng)化學(xué)氣相沉積技術(shù)在硅片和不同金屬表面上制備了一系列的類(lèi)金剛石薄膜。研究了工藝參數(shù)與薄膜結(jié)構(gòu)和性能之間的相關(guān)性,并考察了薄膜在不同測(cè)試條件下的摩擦學(xué)性能,主要的研究成果如下： (1)利用中頻磁控濺射沉積技術(shù)通過(guò)改變鎳靶電流在單晶硅表面上制備了不同鎳含量的摻鎳類(lèi)金剛石薄膜,并考察了鎳含量對(duì)薄膜的結(jié)構(gòu)和性能的影響。結(jié)果表明：鎳元素的摻雜,能大幅降低薄膜的殘余應(yīng)力和提高薄膜與基底之間的結(jié)合力。當(dāng)鎳含量比較低時(shí),薄膜表現(xiàn)出優(yōu)異的摩擦學(xué)性能,但其機(jī)械性能卻隨著鎳含量的增高而降低。 (2)利用等離子體增強(qiáng)化學(xué)氣相沉積技術(shù)在316L不銹鋼表面上制備了類(lèi)金剛石薄膜,并考察了前驅(qū)氣體流量比和沉積氣壓對(duì)薄膜的結(jié)構(gòu)、機(jī)械性能和摩擦學(xué)性能的影響。結(jié)果表明：前驅(qū)氣體流量比和沉積氣壓對(duì)所制備薄膜的結(jié)構(gòu)和性能有著顯著的影響。當(dāng)CH4和H2流量比為20：10的時(shí)候,所制備的薄膜表現(xiàn)出優(yōu)異的機(jī)械性能和摩擦學(xué)性能,薄膜的硬度和摩擦系數(shù)分別為25GPa和0.044;當(dāng)沉積氣壓為15Pa時(shí),所制備的薄膜表現(xiàn)出優(yōu)異的機(jī)械性能,薄膜的硬度為18.4GPa,當(dāng)沉積氣壓為31Pa時(shí),所制備的薄膜表現(xiàn)出優(yōu)異的摩擦學(xué)性能,摩擦系數(shù)為0.035。 (3)利用等離子體增強(qiáng)化學(xué)氣相沉積技術(shù)在316L不銹鋼表面上制備了類(lèi)金剛石薄膜,并考察了薄膜在不同測(cè)試環(huán)境下的摩擦學(xué)性能。結(jié)果表明：隨著載荷的增大,薄膜在空氣中的摩擦系數(shù)逐漸減小,在水環(huán)境中的摩擦系數(shù)逐漸增大,在柴油環(huán)境中的摩擦系數(shù)先增大后減小。而隨著滑動(dòng)速度的增大,薄膜在空氣、水和柴油環(huán)境中的摩擦系數(shù)都逐漸減小,且在空氣中的摩擦系數(shù)最大,柴油環(huán)境中的摩擦系數(shù)最小。 (4)利用等離子體增強(qiáng)化學(xué)氣相沉積技術(shù)在鈦合金和316L不銹鋼表面上制備了類(lèi)金剛石薄膜,并考察了薄膜在不同潤(rùn)滑條件下的摩擦學(xué)性能。結(jié)果表明：在316L不銹鋼表面上所制備的薄膜表現(xiàn)出優(yōu)異的機(jī)械和摩擦學(xué)性能,表明了基底的材質(zhì)對(duì)薄膜的結(jié)構(gòu)和性能有著顯著的影響。通過(guò)對(duì)薄膜在空氣、合成機(jī)油和水環(huán)境中的摩擦學(xué)性能研究,表明了流體潤(rùn)滑的化學(xué)過(guò)程是一個(gè)需要被考慮的重要參數(shù),且薄膜與合成機(jī)油接觸時(shí)得到了最低的摩擦系數(shù)和磨損量。
[Abstract]:A series of diamond-like carbon (DLC) films were prepared on silicon and different metal substrates by intermediate frequency magnetron sputtering and plasma enhanced chemical vapor deposition. The correlation between the process parameters and the structure and properties of the films was studied, and the tribological properties of the films under different test conditions were investigated. The main research results are as follows: (1) Nickel doped diamond films with different nickel content were prepared on the surface of single crystal silicon by medium frequency magnetron sputtering deposition by changing the current of nickel target. The effects of nickel content on the structure and properties of the films were investigated. The results show that the residual stress of the films can be greatly reduced and the adhesion between the films and the substrate can be improved by doping with nickel. When the nickel content is low, the film exhibits excellent tribological properties, but its mechanical properties decrease with the increase of nickel content. (2) Diamond-like carbon (DLC) films were prepared on 316L stainless steel by plasma enhanced chemical vapor deposition. The effects of flow rate of precursor gas and deposition pressure on the structure, mechanical properties and tribological properties of the films were investigated. The results show that the precursor gas flow ratio and deposition pressure have a significant effect on the structure and properties of the films. When the flow ratio of CH4 and H2 is 20:10, the films exhibit excellent mechanical properties and tribological properties. The hardness and friction coefficient of the films are 25GPa and 0.044, respectively. When the deposition pressure is 15Pa, the films exhibit excellent mechanical properties, the hardness of the films is 18.4 GPA, and when the deposition pressure is 31Pa, the films exhibit excellent tribological properties, the friction coefficient is 0.035. (3) Diamond-like carbon (DLC) films were prepared on 316L stainless steel by plasma enhanced chemical vapor deposition technique. The tribological properties of the films were investigated in different test environments. The results show that with the increase of load, the friction coefficient of the film decreases in air, increases in water environment, and then decreases in diesel oil environment. With the increase of sliding speed, the friction coefficient of the film decreases gradually in air, water and diesel environment, and the friction coefficient in air is the largest, and the friction coefficient in diesel oil environment is the smallest. (4) Diamond-like carbon films were prepared on titanium alloy and 316L stainless steel by plasma enhanced chemical vapor deposition. The tribological properties of the films were investigated under different lubrication conditions. The results show that the films prepared on the surface of 316L stainless steel exhibit excellent mechanical and tribological properties, indicating that the substrate material has a significant effect on the structure and properties of the films. By studying the tribological properties of the film in air, synthetic oil and water environment, it is shown that the chemical process of fluid lubrication is an important parameter to be considered. The lowest friction coefficient and wear rate were obtained when the film was in contact with synthetic engine oil.
【學(xué)位授予單位】：蘭州理工大學(xué)
【學(xué)位級(jí)別】：博士
【學(xué)位授予年份】：2013
【分類(lèi)號(hào)】：TH117;TB383.2

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