本文選題：單晶片　切入點：壓電振子　出處：《吉林大學(xué)》2013年碩士論文

【摘要】：壓電泵是利用壓電效應(yīng)使振子產(chǎn)生彎曲變形，再由變形引起密閉泵腔的容積變化來實現(xiàn)流體傳輸?shù)囊环N微型泵，具有結(jié)構(gòu)簡單，能耗低，體積小，，精度高，無電磁干擾，易集成，易控制等諸多優(yōu)點，現(xiàn)已廣泛應(yīng)用在生物醫(yī)學(xué)、航空電子設(shè)備、機(jī)器人視覺、微機(jī)電工程、石化設(shè)備等各種領(lǐng)域。 壓電泵的核心部件為壓電振子，壓電振子通常是在循環(huán)的交變電場下連續(xù)工作，長時間工作以后，壓電振子會出現(xiàn)裂紋萌生和擴(kuò)展、疲勞斷裂甚至是退極化等各種問題，嚴(yán)重時甚至?xí)䦟?dǎo)致整個壓電泵的疲勞失效，這會嚴(yán)重限制壓電泵在微機(jī)電領(lǐng)域各個方面的廣泛應(yīng)用。同時，隨著壓電泵產(chǎn)品的實用化，系列化，市場化的不斷發(fā)展，也急需我們明確壓電泵產(chǎn)品的失效形式和疲勞壽命等。 本文通過振子疲勞仿真分析、振子疲勞試驗和壓電泵加速疲勞壽命試驗，分析了振子的失效模式并確定出壓電泵的疲勞壽命，從而為壓電泵的廣泛應(yīng)用打下基礎(chǔ)。主要研究內(nèi)容如下： 分析了壓電陶瓷的極化處理和制造工藝對其疲勞壽命的影響；分析了壓電陶瓷的失效模式，主要包括機(jī)械疲勞和電疲勞。機(jī)械疲勞主要導(dǎo)致陶瓷的斷裂破壞，而電疲勞容易引起陶瓷發(fā)生退極化或介電擊穿。 利用Miner線性疲勞積累損傷理論，通過ANSYS有限元軟件對壓電振子進(jìn)行疲勞仿真分析，得到單晶片壓電振子的疲勞耗用系數(shù)，確定了振子振動時長六個月內(nèi)的疲勞穩(wěn)定性。同時研究了不同結(jié)構(gòu)參數(shù)對壓電振子疲勞壽命的影響，進(jìn)而對振子進(jìn)行參數(shù)優(yōu)選。 對壓電振子實施了疲勞試驗，得出了電載荷、振子性能和可循環(huán)次數(shù)之間的關(guān)系，并從可靠性角度，判定其疲勞失效定級試驗結(jié)果為合格。同時對比了自粘振子與進(jìn)口振子的疲勞特性。通過繼續(xù)給振子施加高電壓循環(huán)疲勞實驗，得出部分振子完全破壞的循環(huán)振動次數(shù)，根據(jù)描點法和曲線擬合，繪制出壓電振子的疲勞特性曲線。 對壓電泵實施定數(shù)截尾恒加疲勞壽命試驗，得到了PSD35型壓電泵產(chǎn)品的特征壽命、加速系數(shù)、瞬時失效率、平均失效率、平均壽命以及可靠壽命。并求得可靠度為0.95時，PSD35型壓電泵在額定電壓130V（峰峰值367Vpp）下的可靠壽命為5102小時。 同時分析了壓電泵疲勞破壞的失效類型。其失效類型主要包括：1.壓電振子損壞；2.被動截止閥片的塑性變形；3.密封圈的性能失效；4.流道堵塞。并提出相應(yīng)的改進(jìn)措施，主要包括振子的優(yōu)良選取，工作電壓的合理選擇，閥片加工工藝的改進(jìn)，密封圈安裝的精確定位以及流體的過濾和凈化處理等。
[Abstract]:Piezoelectric pump is a kind of miniature pump which can make the vibrator bend and deform by the piezoelectric effect, and then change the volume of the closed pump cavity by the deformation to realize the fluid transmission. It has simple structure, low energy consumption, small volume, high precision and no electromagnetic interference, and the piezoelectric pump has the advantages of simple structure, low energy consumption, small volume, high precision and no electromagnetic interference. It has been widely used in biomedical, avionics, robot vision, micro-electromechanical engineering, petrochemical equipment and other fields. The core component of a piezoelectric pump is a piezoelectric oscillator, which usually works continuously under a cyclic alternating electric field. After a long period of work, the piezoelectric vibrator will have crack initiation and propagation, fatigue fracture and even depolarization, and so on. At the same time, with the development of the practical, serialized and market-oriented piezoelectric pump products, the fatigue failure of the whole piezoelectric pump will seriously limit the wide application of the piezoelectric pump in the field of MEMS. There is also an urgent need for us to define the failure form and fatigue life of piezoelectric pump products. In this paper, the failure mode of the vibrator is analyzed and the fatigue life of the piezoelectric pump is determined by means of the fatigue simulation analysis of the vibrator, the fatigue test of the vibrator and the accelerated fatigue life test of the piezoelectric pump. Thus lay the foundation for the wide application of piezoelectric pump. The main research contents are as follows:. The effects of polarization treatment and manufacturing process on fatigue life of piezoelectric ceramics are analyzed, and the failure modes of piezoelectric ceramics, including mechanical fatigue and electrical fatigue, are analyzed. However, electrical fatigue can easily lead to depolarization or dielectric breakdown of ceramics. Using the Miner linear fatigue accumulation damage theory, the fatigue simulation analysis of piezoelectric vibrator is carried out by ANSYS finite element software, and the fatigue consumption coefficient of single crystal piezoelectric oscillator is obtained. The fatigue stability of the vibrator within six months is determined, and the influence of different structural parameters on the fatigue life of the piezoelectric oscillator is studied, and the parameters of the vibrator are selected. The fatigue test of piezoelectric vibrator is carried out, and the relationship among electric load, oscillator performance and cycle times is obtained, and from the point of view of reliability, The fatigue failure rating test results are determined to be satisfactory. The fatigue characteristics of the self-adhesive oscillator and the inlet oscillator are compared at the same time. By continuing to apply the high voltage cyclic fatigue test to the oscillator, the cyclic vibration times of the partial oscillator are obtained. According to the point drawing method and curve fitting, the fatigue characteristic curve of piezoelectric vibrator is drawn. The characteristic life, acceleration coefficient, instantaneous failure rate and average failure rate of PSD35 piezoelectric pump are obtained by means of the constant fatigue life test of the pressure-electric pump. The average life and reliable life of PSD35 piezoelectric pump with reliability of 0.95 are obtained, and the reliable life of PSD35 piezoelectric pump is 5102 hours under rated voltage of 130 V (peak value 367 Vpp.). At the same time, the failure types of piezoelectric pump fatigue failure are analyzed. The failure types mainly include: 1. Piezoelectric vibrator damage. 2. Plastic deformation of passive stop valve. 3. Performance failure of sealing ring. 4. Flow channel clogging. Corresponding improvement measures are put forward. It mainly includes the excellent selection of the vibrator, the reasonable selection of the working voltage, the improvement of the processing technology of the valve plate, the precise location of the sealing ring installation, the filtration and purification of the fluid, etc.
【學(xué)位授予單位】：吉林大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2013
【分類號】：TH38

【參考文獻(xiàn)】

相關(guān)期刊論文 前5條

1 尹奇異,賃敦敏,肖定全,朱建國,余萍;無鉛壓電陶瓷及其應(yīng)用研究[J];金屬功能材料;2004年06期

2 闞君武,吳一輝,宣明,楊志剛,吳博達(dá),程光明;泵用兩疊片圓形壓電振子的彎曲振動分析[J];機(jī)械工程學(xué)報;2005年01期

3 何秀華;張睿;蔣權(quán)英;;基于MEMS的壓電泵及其研究進(jìn)展[J];排灌機(jī)械;2007年04期

4 李尚平,徐永利,蘇建華,田蒔;驅(qū)動器用陶瓷材料發(fā)展與展望[J];壓電與聲光;1999年06期

5 闞君武,曹仁秋,楊志剛,程光明;壓電薄膜泵結(jié)構(gòu)設(shè)計與性能分析[J];壓電與聲光;2002年05期

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