本文關(guān)鍵詞：高品質(zhì)因數(shù)微機(jī)械陀螺的溫度自補(bǔ)償，，由筆耕文化傳播整理發(fā)布。

高品質(zhì)因數(shù)微機(jī)械陀螺的溫度自補(bǔ)償

Self-temperature compensation for high quality factor micro-machined gyroscope

[1] [2] [3] [4]

YANG Liang, SU Yah, QIU An-ping, XIA Guo-ming （School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing 210094, China）

南京理工大學(xué)機(jī)械工程學(xué)院,江蘇南京210094

文章摘要：建立了以微機(jī)械陀螺驅(qū)動(dòng)模態(tài)固有頻率為虛擬溫度傳感器的溫度補(bǔ)償系統(tǒng),以實(shí)現(xiàn)對(duì)微機(jī)械陀螺標(biāo)度因數(shù)和零偏的高精度溫度補(bǔ)償.研究了自主設(shè)計(jì)的微機(jī)械陀螺的驅(qū)動(dòng)模態(tài)固有頻率的溫度特性,通過(guò)實(shí)驗(yàn)手段獲得了頻率的溫度系數(shù)為（-26.9±2.03）×10-6℃,且溫度測(cè)量精度1 s平均時(shí)為0.075℃,20 s平均時(shí)為0.004℃.在分析微機(jī)械陀螺標(biāo)度因數(shù)和零偏溫度特性的基礎(chǔ)上,提出了一種二階溫度補(bǔ)償方案,并給出了補(bǔ)償原理和算法示意圖.最后,利用驅(qū)動(dòng)模態(tài)固有頻率對(duì)標(biāo)度因數(shù)和零偏進(jìn)行了溫度自補(bǔ)償.實(shí)驗(yàn)結(jié)果表明,在-40℃到60℃,標(biāo)度因數(shù)的最大相對(duì)變化量從補(bǔ)償前的2.1％下降到了0.05％;零偏的最大相對(duì)變化量從補(bǔ)償前的8.9％下降到了0.1％;室溫下2h的零偏實(shí)驗(yàn)表明,溫度補(bǔ)償后微機(jī)械陀螺的零偏不穩(wěn)定性由4.1（°）/h降到了0.42（°）/h,滿足了微機(jī)械陀螺溫度補(bǔ)償?shù)母呔纫?

Abstr：A temperature compensation system was build by using the drive-mode natural frequency as a virtual temperature sensor to achieve high-precision temperature compensation for the scale factor and zero bias of a micro-machined gyroscope. The temperature characteristics of the drive-mode natu- ral frequency were explore, and its coefficient （-26.9±2.03） × 10 G℃ was obtained. The frequency stability was translated to temperature precision to be 0. 075 ℃ at 1 s average and 0. 004 ℃ at 20 s av- erage. On the basis of analysis of the temperature characteristics of scale factor and zero bias, a sec- ond-order temperature compensation scheme was proposed, and the principle and block-diagram of compensation algorithm were given. Finally, the scale factor and zero bias were compensated using the drive-mode natural frequency. The experiment results show that the maximum relative change of scale factor is reduced from 2.1% to 0.05% and that of zero bias is reduced from 8.9% to 0.1% at -40 ℃ to 60 ℃. The zero bias experiment at room temperature for 2 hours shows that the bias nonstability is reduced from 4. 1（%）/h to 0.42（%）/h after compensation. These results satisfy the demand of micro-machined gyroscopes for high-precision temperature compensation.

文章關(guān)鍵詞：

Keyword：:micro-machined gyroscope temperature compensation natural {requency scale factor zero bias

課題項(xiàng)目：國(guó)防預(yù)研基金資助項(xiàng)目（No.9140A09011011BQ02）

  本文關(guān)鍵詞：高品質(zhì)因數(shù)微機(jī)械陀螺的溫度自補(bǔ)償，由筆耕文化傳播整理發(fā)布。