【摘要】：采用直流磁控濺射技術(shù)制備了氮化鉻(CrNx)涂層,研究了制備CrNx涂層的工藝參數(shù)對(duì)所制備的CrNx涂層的膜基結(jié)合力及力學(xué)性能的影響。研究結(jié)果表明:工藝參數(shù)對(duì)CrNx涂層性能的影響不成各向同性關(guān)系;在較低的N_2含量、較高的脈沖偏壓、約100V的直流偏壓、較高的真空度、較高的沉積溫度和較高的靶功率下制備的CrNx涂層的硬度較高,而在較低的N_2含量、恰當(dāng)?shù)拿}沖偏壓和占空比配對(duì)、較高的直流偏壓、較高的真空度、較高的沉積溫度和較高的靶功率下制備的CrNx涂層的表面形貌較好。
[Abstract]:Chromium nitride (CrNx) coating was prepared by DC magnetron sputter. The effect of process parameters on the adhesion and mechanical properties of CrNx coating was studied. The results show that the effect of process parameters on the properties of CrNx coating is not isotropic. The CrNx coatings prepared at lower N 鈮，

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