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超精密圓柱度誤差測量方法研究

發(fā)布時間:2018-07-29 12:51
【摘要】:圓柱類零件是各種機器設備的基礎部件,也是組成各種回轉(zhuǎn)運動副的必要元件,其表面的形狀誤差,對配合精度及性質(zhì)產(chǎn)生極大的影響,對控制回轉(zhuǎn)運動過程的振動、噪聲以及回轉(zhuǎn)運動副間的潤滑、密封效果有著重要意義。圓柱度誤差是圓柱類零件形狀精度的一項綜合評定指標,反映了被測圓柱面要素相對于理想圓柱面的變動量。簡易、實用、經(jīng)濟、高精度、高效率的圓柱度誤差測量方法一直是國內(nèi)外學者研究的熱點。作者查閱了大量文獻資料,分析了國內(nèi)外現(xiàn)行圓柱度誤差測量方法,根據(jù)圓柱度誤差評定標準以及電容傳感器的基本理論,提出了圓柱度誤差測量的電容形面?zhèn)鞲蟹?該方法利用采樣面的方式對圓柱類零件進行測量,通過一次采樣就能獲取被測面的全部信息,從而實現(xiàn)圓柱度誤差的快速、高精度、非接觸式測量,彌補了現(xiàn)有通過采樣點取樣進行測量的弊端。本文首先研究推導了多導體系統(tǒng)部分電容的求解過程及性質(zhì),并運用ANSYS軟件對三維實體模型的多導體系統(tǒng)部分電容進行提取,通過對提取的電容結(jié)果的對比分析,驗證了電容形面?zhèn)鞲蟹y量原理的準確性,同時也說明了電容形面?zhèn)鞲蟹椒ǖ目尚行。最?依據(jù)電容形面?zhèn)鞲蟹y量原理設計了電容式測量頭,對設計的電容式測量頭進行模擬實驗,通過對實驗結(jié)果和電場分布情況分析,表明所設計的電容式測量頭能夠極大減小邊緣效應和外界干擾對測量結(jié)果的影響,并對電容式測量頭結(jié)構(gòu)的尺寸參數(shù)進行了優(yōu)化,找到了各個尺寸參數(shù)因素對測量結(jié)果影響的主次關(guān)系和最優(yōu)水平組合。針對某公司生產(chǎn)零件的圓柱度誤差不能大于0.002mm的要求,以電容形面?zhèn)鞲蟹ǖ幕纠碚摓榛A,對測量裝置機械結(jié)構(gòu)進行了整體設計。
[Abstract]:Cylindrical parts are the basic parts of all kinds of machines and equipments, and they are also the necessary components to form various rotary motion pairs. The surface shape errors of cylindrical parts have a great influence on the matching accuracy and properties, and control the vibration of the rotary motion process. Noise and lubrication between rotary motion pairs, sealing effect has important significance. Cylindricity error is a comprehensive evaluation index for the shape accuracy of cylindrical parts, which reflects the variation of the measured cylinder surface relative to the ideal cylindrical surface. Simple, practical, economical, high precision and high efficiency cylindrical error measurement method has been a hot spot of domestic and foreign scholars. The author consulted a lot of literature and analyzed the current measurement methods of Cylindricity error at home and abroad. According to the evaluation standard of Cylindricity error and the basic theory of capacitive sensor, the method of measuring Cylindricity error by capacitive shape surface sensor was put forward. In this method, the cylindrical parts are measured by sampling surface, and all the information of the measured plane can be obtained by one sampling, so that the cylindrical error can be measured quickly, with high accuracy and without contact. It makes up for the shortcoming of sampling point sampling. This paper first studies and deduces the solution process and properties of partial capacitance of multi-conductor system, and uses ANSYS software to extract part capacitance of multi-conductor system based on three-dimensional solid model. The accuracy of the measurement principle of capacitive shape surface sensing method is verified, and the feasibility of the capacitance shape surface sensing method is also explained. Finally, the capacitive measuring head is designed according to the measuring principle of capacitive sensor. The simulation experiment of the designed capacitance measuring head is carried out, and the results of the experiment and the distribution of electric field are analyzed. The results show that the designed capacitive measuring head can greatly reduce the influence of edge effect and external interference on the measurement results, and optimize the dimension parameters of the capacitance measuring head structure. The primary and secondary relationships and the optimal horizontal combination of the influence of each dimension parameter on the measurement results are found. In view of the requirement that the cylinder error of parts produced by a company can not be greater than that of 0.002mm, based on the basic theory of capacitive shape surface sensing method, the mechanical structure of measuring device is designed as a whole.
【學位授予單位】:長春工業(yè)大學
【學位級別】:碩士
【學位授予年份】:2015
【分類號】:TG835

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