本文關鍵詞： 快刀伺服 壓電陶瓷 零相差控制　出處：《中國工程物理研究院》2015年碩士論文　論文類型：學位論文

【摘要】：快刀伺服能夠用于精密微結構表面的高效、低成本加工。快刀伺服加工技術的一個關鍵點是設計滿足加工需求的快刀伺服系統(tǒng),即是設計具有較高的精度、快速響應能力以及良好的指令跟蹤性能的快刀伺服系統(tǒng)。需要從快刀伺服系統(tǒng)的設計分析出發(fā),研究影響快刀伺服系統(tǒng)性能的關鍵影響因素和優(yōu)化系統(tǒng)設計的方法。基于以上需求,本文分析了快刀伺服原型系統(tǒng)中影響系統(tǒng)性能的關鍵因素；對其中的關鍵問題提出相應的解決辦法；并通過仿真和實驗驗證了所提方法。工作內(nèi)容包括：(1)在分析國內(nèi)外快刀伺服系統(tǒng)的相關研究基礎上,根據(jù)其工作原理和性能需求,提出快刀伺服原型系統(tǒng)的原理方案；在原理性方案的基礎上建立了壓電型快速伺服刀架的模型,并對模型進行了仿真研究,為實驗平臺的設計構建提供理論支持。(2)根據(jù)原理性方案設計構建了快刀伺服原型實驗平臺；利用原型實驗平臺展開實驗測試和分析。實驗結果表明原型平臺具有良好的工作性能,位移分辨率優(yōu)于4nm最大行程達到60.06μm,在150Hz時的行程達到22.08μm,滿足設計要求。(3)針對實驗測試結果中發(fā)現(xiàn)的問題,對系統(tǒng)模型進行了修正。將接觸特性納入模型之后,模型仿真結果與實驗結果相符。提出了相移遲滯模型描述壓電陶瓷的動態(tài)遲滯特性,建模的最大相對誤差小于1.5%,利用相移遲滯模型對動態(tài)遲滯曲線進行線性化修正,修正后的線性相關系數(shù)在0.9992以上。(4)結合控制的需求,基于PID控制算法,將模型前饋和零相差前饋算法引入到跟蹤控制算法中,并通過MATLAB(?)程序進行控制仿真。仿真和實驗驗證的結果表明零相差前饋控制算法具有較好的跟蹤控制性能。本文通過上述理論、仿真與實驗相結合的研究,分析了快刀伺服刀架的關鍵參數(shù)對系統(tǒng)性能的影響規(guī)律；提出了一種基于相移特性的遲滯模型與補償方法；基于零相差控制原理給出了一種減小跟蹤誤差的控制算法。為快刀伺服工程樣機的研制提供了技術參考。
[Abstract]:Fast knife servo can be used in high efficiency and low cost machining of precision micro-structure surface. One of the key points of fast knife servo machining technology is to design a fast cutter servo system which can meet the need of machining, that is, the design has high precision. Rapid response ability and good command tracking performance of the fast knife servo system. Need to start from the design analysis of the fast knife servo system. The key factors affecting the performance of the fast cutter servo system and the method of optimizing the system design are studied. Based on the above requirements, the key factors affecting the performance of the system in the prototype system of the fast cutter servo system are analyzed in this paper. To propose the corresponding solution to the key problem; The proposed method is verified by simulation and experiment. The work includes: 1) on the basis of analyzing the relevant research of domestic and foreign sharpener servo system, according to its working principle and performance requirements. The principle scheme of the servo prototype system of sharpener is put forward. On the basis of the principle scheme, the model of piezoelectric fast servo tool holder is established, and the simulation of the model is carried out. Provide theoretical support for the design and construction of the experimental platform. The experimental results show that the prototype platform has good performance, and the displacement resolution is better than 4nm and the maximum stroke is 60.06 渭 m. At 150 Hz, the stroke reaches 22.08 渭 m, which meets the design requirements.) aiming at the problems found in the test results, the system model is modified and the contact characteristics are incorporated into the model. The simulation results are in agreement with the experimental results. A phase shift hysteresis model is proposed to describe the dynamic hysteresis characteristics of piezoelectric ceramics. The maximum relative error of the model is less than 1.5%. The phase shift hysteresis model is used to linearize the dynamic hysteresis curve. The modified linear correlation coefficient is above 0.9992. The modified linear correlation coefficient is more than 0.9992. The modified linear correlation coefficient is more than 0.9992. It is based on the PID control algorithm. The model feedforward algorithm and zero phase difference feedforward algorithm are introduced into the tracking control algorithm, and the model feedforward and zero phase difference feedforward algorithm are introduced into the tracking control algorithm. The simulation and experimental results show that the zero-phase feedforward control algorithm has better tracking control performance. The influence of the key parameters of the speed cutter servo tool holder on the performance of the system is analyzed. A hysteresis model and compensation method based on phase shift characteristics are proposed. Based on the principle of zero phase difference control, a control algorithm to reduce the tracking error is presented, which provides a technical reference for the development of the rapier servo engineering prototype.
【學位授予單位】：中國工程物理研究院
【學位級別】：碩士
【學位授予年份】：2015
【分類號】：TG502

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