【摘要】：采用多靶位真空陰極電弧沉積技術(shù),在TC11鈦合金表面制備24周期的Ti-TiN-Zr-ZrN軟硬交替多元多層膜。用掃描電鏡、X射線衍射儀、顯微硬度計、結(jié)合力劃痕儀、球-盤摩擦磨損試驗儀、砂粒沖刷試驗儀和3D表面形貌儀,研究多層膜的表面及截面形貌、相結(jié)構(gòu)、厚度、硬度、膜/基結(jié)合力、摩擦磨損性能和抗砂粒沖蝕性能。結(jié)果表明:所制備TiTiN-Zr-ZrN多層膜厚度約為5.8μm,維氏顯微硬度為28.10GPa,膜基結(jié)合力為56N;TC11鈦合金表面鍍多層膜后耐磨性提高了一個數(shù)量級,體積磨損率由7.06×10~(-13) m~3·N~(-1)·m~(-1)降低到3.03×10~(-14) m~3·N~(-1)·m~(-1);多層膜軟硬層交替的結(jié)構(gòu),受砂粒沖蝕時裂紋擴展至金屬軟層時應力的緩沖而出現(xiàn)偏轉(zhuǎn),對TC11鈦合金有良好的抗砂粒沖蝕保護作用。
[Abstract]:Ti-TiN-Zr-ZrN soft and hard alternate multilayer films were prepared on the surface of TC11 titanium alloy by multi-target vacuum cathode arc deposition. The surface and cross section morphology, phase structure, thickness, hardness of multilayer films were studied by means of scanning electron microscope, X-ray diffractometer, microhardness tester, ball disk friction and wear tester, sand erosion tester and 3D surface topography instrument. Film / substrate adhesion, friction and wear resistance and erosion resistance of sand particles. The results show that the thickness of the TiTiN-Zr-ZrN multilayer is about 5.8 渭 m, the Vickers microhardness is 28.10 GPA, and the base adhesion is 56 N. The wear resistance of TC11 titanium alloy was improved by one order of magnitude, and the volume wear rate decreased from 7.06 脳 10 ~ (-13) m ~ (-1) to 3.03 脳 10 ~ (-14) m ~ (-1). The alternative structure of multilayer soft and hard layer deflects when the crack expands to the soft layer of metal during the erosion of sand particles, which has a good anti-erosion effect on TC11 titanium alloy.
【作者單位】： 華南理工大學材料科學與工程學院;廣東省新材料研究所現(xiàn)代材料表面工程技術(shù)國家工程實驗室;廣東省新材料研究所廣東省現(xiàn)代表面工程技術(shù)重點實驗室;中國航發(fā)湖南動力機械研究所;
【基金】：廣東省省級科技計劃項目資助(2014B070706026,2013B061800053)
【分類號】：TG174.4

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