本文選題：微納米三坐標(biāo)測量機(jī) + 三維諧振觸發(fā)測頭��； 參考：《合肥工業(yè)大學(xué)》2017年碩士論文

【摘要】：隨著科學(xué)技術(shù)的進(jìn)步,超精密加工技術(shù)的精度已經(jīng)可以達(dá)到納米級別,這些超精密元器件對微納米尺度的測量提出了更高的要求。傳統(tǒng)的三坐標(biāo)測量機(jī)已經(jīng)無法適用,因此微納米三坐標(biāo)測量機(jī)(Micro-Nano Coordinate Measuring Machine,簡稱微納米CMM)已經(jīng)成為當(dāng)今測量領(lǐng)域研究的熱門課題。而作為微納米CMM的核心部件,微納米CMM測頭的研究顯得尤為重要。國內(nèi)外研究機(jī)構(gòu)在微納米CMM測頭的研究上,已經(jīng)取得了一定的科研成果,但是面對高測量效率、高精度、低測量力、具有三維空間測量能力等苛刻的要求,目前仍然沒有較為成熟的解決方案。本文針對現(xiàn)有的微納米CMM測頭測量效率低、測量精度低、測量力大等問題,提出了一種基于視覺引導(dǎo)的三維諧振觸發(fā)測量方案,并根據(jù)該方案設(shè)計(jì)了三維諧振觸發(fā)測頭系統(tǒng)。該測頭系統(tǒng)在三維方向上都具有小于1nm的觸發(fā)分辨力,小于10μN(yùn)的測量力,可以實(shí)現(xiàn)對微結(jié)構(gòu)試樣形貌的空間三維觸發(fā)測量。本文主要介紹的研究工作有:1.三維觸發(fā)測量的理論模型的建立:本文分析了三維諧振觸發(fā)測頭與被測物體表面動態(tài)接觸的力學(xué)模型,在介觀尺度上研究和分析了測頭在三維方向上的觸發(fā)機(jī)理,建立了Z方向上輕敲模式(tapping mode),X(Y)方向上摩擦模式(friction mode)的理論,使用matlab對運(yùn)動模型進(jìn)行模擬仿真,并對仿真的結(jié)果進(jìn)行實(shí)驗(yàn)論證。2.系統(tǒng)軟件的編寫:結(jié)合視覺系統(tǒng)的引導(dǎo),本測頭系統(tǒng)具有自動逼近試樣的能力,從而達(dá)到高測量效率的目的。利用C++語言在VS編程環(huán)境下編寫測頭系統(tǒng)控制軟件,主要實(shí)現(xiàn)測頭系統(tǒng)性能測試、機(jī)器視覺引導(dǎo)逼近、三維自動測量等功能。3.實(shí)驗(yàn)測試:針對搭建的測頭系統(tǒng)原型機(jī),進(jìn)行接近力曲線和觸發(fā)重復(fù)性誤差等測量實(shí)驗(yàn),由此得到該觸發(fā)測頭的性能指標(biāo)。并且,用該測頭系統(tǒng)對微孔試樣和柴油機(jī)噴油嘴針閥體噴孔進(jìn)行三維形貌測量,從而驗(yàn)證該測頭系統(tǒng)是否具有三維形貌測量的能力。
[Abstract]:With the development of science and technology, the precision of ultra-precision machining technology has reached the nanometer level. These ultra-precision components have put forward higher requirements for the measurement of micro-nanometer scale. Traditional CMMs can not be used, so Micro-Nano Coordinate Measuring Machine, (Micro-Nano-CMM) has become a hot topic in the field of measurement. As the core component of micro-nano CMM, the research of micro-nano CMM probe is particularly important. Research institutions at home and abroad have made some achievements in the research of micro and nano CMM probe, but in the face of high measuring efficiency, high precision, low measuring force and so on, there are harsh requirements such as three-dimensional spatial measurement ability. At present, there is still no more mature solution. In order to solve the problems of low measuring efficiency, low measuring precision and large measuring force, a three dimensional resonant trigger measurement scheme based on vision guidance is proposed in this paper. According to this scheme, a three dimensional resonant trigger probe system is designed. The system has less trigger resolution than 1nm and less than 10 渭 N in 3D direction. The main research work introduced in this paper is 1: 1. The establishment of theoretical model of 3D trigger measurement: this paper analyzes the mechanical model of dynamic contact between 3D resonant trigger probe and measured object surface, and studies and analyzes the triggering mechanism of probe in 3D direction on mesoscopic scale. The theory of friction mode friction mod in Z direction is established. The motion model is simulated by matlab, and the simulation results are proved by experiment. System software writing: combined with the guidance of visual system, the probe system has the ability to approach the sample automatically, so as to achieve the purpose of high measuring efficiency. The control software of probe system is programmed by C language in vs programming environment. The functions of performance test, machine vision guided approach, 3D automatic measurement and so on are mainly realized. Experimental test: according to the prototype machine of the probe system, the near force curve and the repeatability error of trigger are measured, and the performance index of the trigger probe is obtained. In addition, the microporous sample and the injection nozzle valve body were measured by the probe system to verify whether the probe system has the ability of 3D shape measurement.
【學(xué)位授予單位】：合肥工業(yè)大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2017
【分類號】：TG806

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