本文選題：納米孔 + 玻璃管��； 參考：《南京航空航天大學(xué)》2015年碩士論文

【摘要】：第三代DNA測序儀的基礎(chǔ)設(shè)備是擁有納米級通道的納流體器件。本課題在國家自然科學(xué)基金及國家重點基礎(chǔ)研究發(fā)展計劃項目(973計劃)支持下,力求制造出基于玻璃毛細管的5nm以下的三維納通道。而作為近年興起的一種新概念微特電機,直線超聲電機具有結(jié)構(gòu)簡單、響應(yīng)迅速、分辨率高、斷電自鎖以及無電磁干擾等優(yōu)點,非常適合作為高精度定位系統(tǒng)中的的運動平臺。因此,本文以直線超聲電機為精密運動平臺,激光器為加熱裝置,光柵尺位移傳感器為平臺位移反饋裝置搭建了玻璃基納米孔拉伸系統(tǒng),探究了玻璃基納米孔拉伸制造的可行性。針對拉伸系統(tǒng),本文完成了其控制與測試模塊的軟硬件設(shè)計:以Altera公司的FPGA(型號為EP4CE22E22C8)為核心,采用基于Nios II軟核的SOPC技術(shù),將用于電機調(diào)速的PWM信號驅(qū)動器、處理器、系統(tǒng)外設(shè)、光柵編碼計數(shù)器模塊和串口通信模塊集成在了FPGA中,并針對拉伸系統(tǒng)編寫了相應(yīng)的控制與測試程序,實現(xiàn)了對拉伸系統(tǒng)中各個裝置的控制與觀測。驅(qū)動控制器設(shè)計完成后,本文進行了以下測試與實驗:測試了兩相PWM驅(qū)動信號的頻率、相位和占空比對超聲電機速度的影響,根據(jù)結(jié)果比較了各種調(diào)速方法的優(yōu)劣;測試了直線超聲電機運動平臺的精度,測得的平臺最小步距是50nm,平臺定位精度可以達到0.5μm,精度測試展現(xiàn)出了超聲電機在精密定位系統(tǒng)中的優(yōu)勢;對毛細玻璃管進行了拉伸實驗,測試了用于調(diào)控激光器的PWM信號的占空比,以及激光加熱時間和超聲電機加速度對拉伸后玻璃管的內(nèi)、外徑的影響,并成功地拉制出了內(nèi)徑達0.5μm的玻璃管。實驗表明,本文設(shè)計的基于FPGA的直線超聲電機運動平臺的驅(qū)動控制與測試系統(tǒng)可滿足玻璃基納米孔拉伸系統(tǒng)的驅(qū)動控制要求。
[Abstract]:The basic equipment of the third generation DNA sequencer is a nanofluid device with nanoscale channels. This subject, supported by the National Natural Science Foundation and the national key basic research development program (973 Plan), strives to produce a three-dimensional nano channel under the 5nm of glass capillary. The linear ultrasonic motor has the advantages of simple structure, rapid response, high resolution, high resolution, self locking and no electromagnetic interference. It is very suitable to be a moving platform in high precision positioning system. Therefore, this paper uses a linear ultrasonic motor as a precision motion platform, a laser as a heating device, a grating ruler displacement sensor as a platform displacement feedback assembly. The glass based nano hole stretching system was set up to explore the feasibility of drawing the glass based nano holes. In view of the tensile system, the hardware and software design of the control and test module was completed: the FPGA (EP4CE22E22C8) of Altera company was the core, and the SOPC technology based on Nios II soft core was used to use the PWM signal for motor speed regulation. The driver, the processor, the system peripherals, the grating code counter module and the serial communication module are integrated in the FPGA, and the corresponding control and test procedures are written for the drawing system. The control and observation of each device in the drawing system are realized. After the design of the drive controller, the following tests and experiments are carried out in this paper: Test and test The frequency, phase and duty ratio of the two phase PWM drive signal are influenced by the ultrasonic motor speed. According to the results, the advantages and disadvantages of various speed regulating methods are compared. The precision of the motion platform of the linear ultrasonic motor is tested. The minimum platform distance of the platform is 50nm and the positioning accuracy of the platform can reach 0.5 u m. The precision test shows the precision of the ultrasonic motor. The advantage of the bit system; the tensile test of the capillary glass tube was carried out, the duty ratio of the PWM signal used to control the laser was tested, and the effect of the laser heating time and the ultrasonic motor acceleration on the inner and outer diameter of the glass tube after tension was influenced, and the glass tube with the inner diameter of 0.5 mu m was successfully drawn. The experiment shows that the design based on FPGA is based on the experiment. The driving control and testing system of the motion platform of the linear ultrasonic motor can meet the driving control requirements of the glass based nano hole stretching system.

【學(xué)位授予單位】：南京航空航天大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2015
【分類號】：TQ171.6

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本文編號：1810654