本文選題：微波等離子化學氣相沉積法 + 合成金剛石�。� 參考：《石家莊經(jīng)濟學院》2015年碩士論文

【摘要】：金剛石由于特殊的晶體結構使得其具有自然界已知材料中最高的硬度,同時還具有室溫下最高的熱導率,極低的熱膨脹系數(shù),優(yōu)良的半導體性能和化學穩(wěn)定性以及極佳的光學性能(高折射率、高色散值和高光學透過性)等多種優(yōu)異性質,具有廣泛的工業(yè)應用前景。但是,天然金剛石由于受到產(chǎn)量少,品質差異大,晶體形態(tài)及尺寸難以滿足工業(yè)要求,價格高等不利因素的影響,嚴重阻礙了人們對其開發(fā)利用。微波等離子化學氣相沉積法(Microwave Plasma Chemical Vapor Deposition,MPCVD)是利用微波等離子體化學氣相沉積裝置,在一定的溫度和壓力條件下生長金剛石晶體的方法,該方法具有生產(chǎn)成本低、沉積速度快、產(chǎn)品質量高等優(yōu)點,是目前化學氣相沉積法合成金剛石領域公認的最佳方法。本文通過多次實驗,探索研究甲烷、氫氣、氮氣和氧氣以及種晶類型、生長面、放置方式和反應倉壓強、基底溫度對MPCVD合成單晶金剛石的影響。通過常規(guī)寶石學儀器以及拉曼光譜、紅外光譜等現(xiàn)代測試技術對實驗樣品進行檢測分析,總結了MPCVD單晶金剛石的特征。最后總結展望其在工業(yè)領域及寶石學領域的應用前景。
[Abstract]:Due to its special crystal structure, diamond has the highest hardness of known materials in nature, the highest thermal conductivity at room temperature, and extremely low coefficient of thermal expansion. Excellent semiconductor properties, chemical stability and excellent optical properties, such as high refractive index, high dispersion value and high optical transmittance, have a wide range of industrial applications. However, due to the influence of unfavorable factors, such as low output, great difference in quality, difficult to meet the requirements of industry, high price and so on, the development and utilization of natural diamond are seriously hindered. Microwave Plasma Chemical Vapor deposition (MPCVD) is a method to grow diamond crystals under certain temperature and pressure by microwave plasma chemical vapor deposition (MPCVD). The method has the advantages of low production cost and fast deposition rate. High product quality is the best method in the field of diamond synthesis by chemical vapor deposition. In this paper, the effects of methane, hydrogen, nitrogen and oxygen on the synthesis of monocrystalline diamond by MPCVD were studied. The characteristics of MPCVD single crystal diamond were summarized by using conventional gemstone instruments, Raman spectroscopy, infrared spectroscopy and other modern testing techniques to detect and analyze the experimental samples. Finally, the prospect of its application in the field of industry and gemology is summarized and prospected.
【學位授予單位】：石家莊經(jīng)濟學院
【學位級別】：碩士
【學位授予年份】：2015
【分類號】：TQ163

【參考文獻】

相關期刊論文 前1條

1 呂反修;黑立富;劉杰;宋建華;李成明;唐偉忠;陳廣超;;CVD金剛石大單晶外延生長及高技術應用前景[J];熱處理;2013年05期

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本文編號：2040021