本文選題：LTCC + 低熱膨脹系數(shù)　； 參考：《電子科技大學(xué)》2017年碩士論文

【摘要】：在微電子技術(shù)迅猛發(fā)展的今天,電子元器件不斷向小型化、多功能化、集成化的方向發(fā)展,電子器件的集成度越來(lái)越高,這對(duì)電路的封裝材料要求也越來(lái)越高。鋰鋁硅微晶玻璃由于具有高抗彎強(qiáng)度、低熱膨脹系數(shù)、良好的介電性能,因此具有作為L(zhǎng)TCC封裝材料的潛能。本文將其選作為研究對(duì)象,通過(guò)對(duì)配方和機(jī)理的研究,制備出符合要求的LTCC封裝材料。本文采用熔融法制備鋰鋁硅微晶玻璃,研究了晶核劑、稀土氧化物摻雜對(duì)樣品的晶相變化、微觀結(jié)構(gòu)、抗彎強(qiáng)度、熱膨脹系數(shù)、介電性能的影響。研究表明,當(dāng)ZrO_2+TiO_2復(fù)合摻雜的摻雜量不變,ZrO_2含量較高的樣品擁有更高的抗彎強(qiáng)度和更好的機(jī)械性能;在鋰鋁硅微晶玻璃中外摻La_2O_3,能夠提升樣品的抗彎強(qiáng)度和熱膨脹系數(shù),La_2O_3摻雜量為0.2wt%時(shí),抗彎強(qiáng)度達(dá)到163MPa,熱膨脹系數(shù)為2.64×10-6/℃,綜合性能最佳;在鋰鋁硅微晶玻璃中外摻1wt%Sm_2O_3,樣品擁有最低的介電常數(shù)(7.9)和介電損耗(1.23×10-3)、最高的抗彎強(qiáng)度(162MPa),綜合性能最佳,繼續(xù)增加摻雜量會(huì)惡化樣品的微觀結(jié)構(gòu),影響樣品的性能;在鋰鋁硅微晶玻璃中外摻Cr_2O_3,能夠改善樣品的微觀結(jié)構(gòu)、顯著提高樣品的抗彎強(qiáng)度,Cr_2O_3摻雜量為3wt%時(shí),樣品擁有最為致密的微觀結(jié)構(gòu)和最高的抗彎強(qiáng)度(208MPa),綜合性能最佳。通過(guò)對(duì)鋰鋁硅微晶玻璃的摻雜改性研究,提升了樣品的性能,最終得到了性能優(yōu)異的LTCC封裝材料。為了預(yù)測(cè)和控制微晶玻璃樣品的熱膨脹系數(shù),本文借鑒已有的熱膨脹系數(shù)計(jì)算模型,提出了氧化物法和晶相法兩種熱膨脹系數(shù)的計(jì)算方法。氧化物法從微晶玻璃配方的原材料入手,其計(jì)算值與實(shí)際測(cè)試值之間的誤差很大;晶相法從微晶玻璃的組成入手,對(duì)殘余玻璃相和各晶相分別進(jìn)行了分析,得到的計(jì)算值與實(shí)際測(cè)試值相吻合,其誤差在±15%以?xún)?nèi),說(shuō)明了可以通過(guò)控制微晶玻璃的析晶來(lái)調(diào)整熱膨脹系數(shù)。本文對(duì)鋰鋁硅微晶玻璃的析晶動(dòng)力學(xué)進(jìn)行了研究,分別采用Kissinger分析法和Ozawa分析法計(jì)算了樣品的析晶活化能E,得到了相近的計(jì)算結(jié)果。采用Ozawa分析法計(jì)算了析晶指數(shù)n,結(jié)果表明本實(shí)驗(yàn)中的微晶玻璃為整體析晶。
[Abstract]:With the rapid development of microelectronic technology, electronic components have been developing towards miniaturization, multi-function and integration. The integration of electronic devices is becoming more and more high, which requires more and more packaging materials. Because of its high bending strength, low thermal expansion coefficient and good dielectric properties, Li-Al-Si glass-ceramics have the potential to be used as LTCC packaging materials. In this paper, the LTCC packaging materials which meet the requirements are prepared by studying the formula and mechanism. Li-Al-Si glass-ceramics were prepared by melting method. The effects of nucleating agent and rare earth oxide doping on the crystal phase change, microstructure, bending strength, thermal expansion coefficient and dielectric properties of the samples were studied. The results show that the samples with higher content of ZrO_2 TiO_2 have higher flexural strength and better mechanical properties. The bending strength and thermal expansion coefficient of Li-Al-Si glass-ceramics are 163mpa and 2.64 脳 10-6 / 鈩，

本文編號(hào)：1781838