本文選題：壓電陶瓷　切入點(diǎn)：力輸出　出處：《哈爾濱工業(yè)大學(xué)》2017年碩士論文

【摘要】：壓電陶瓷作為一種驅(qū)動(dòng)元件因其響應(yīng)速度快、力輸出大、頻率范圍廣,精度高和結(jié)構(gòu)緊湊等優(yōu)勢,被廣泛應(yīng)用于各種精密系統(tǒng)。壓電陶瓷已經(jīng)成為驅(qū)動(dòng)元件發(fā)展的熱門方向。壓電陶瓷在機(jī)械抖動(dòng)激光陀螺中是成對應(yīng)用的。由于壓電陶瓷力輸出不一致,壓電陶瓷會(huì)被一對中的另一個(gè)壓壞。此外力輸出不同的一對壓電陶瓷還會(huì)影響激光陀螺的壽命和可靠性。造成一定的經(jīng)濟(jì)損失。因此精確地測量壓電陶瓷的力輸出具有重要的意義本文在壓電陶瓷位移輸出特性的基礎(chǔ)上,結(jié)合壓電陶瓷的介電性構(gòu)建了剛體-電極板模型。推導(dǎo)了壓電陶瓷的力輸出的數(shù)學(xué)模型。分析可知,壓電陶瓷力輸出主要取決于壓電陶瓷的極化強(qiáng)度,激勵(lì)電壓,自身剛度。此外還受到自身形狀和工作頻率的影響。本文分析了傳統(tǒng)壓電陶瓷力輸出測量方法的原理。該方法存在測試過程繁瑣,易引入誤差,測試過程易損傷壓電陶瓷元件等問題。針對這些問題提出一種主動(dòng)式測量方法。相比傳統(tǒng)測量方法增加了力施加裝置和位移控制裝置。測試過程中通過力施加裝置將被測元件壓回原始長度,并采用位移測量系統(tǒng)精確控制壓縮量,記錄壓電陶瓷不同位移輸出時(shí)的力輸出值。主動(dòng)式測量方法能測試多種形狀的壓電陶瓷,測量步驟簡單,結(jié)果準(zhǔn)確。本文依據(jù)提出的主動(dòng)式測量方法,搭建了相應(yīng)的測試系統(tǒng)。該系統(tǒng)包含基于壓電驅(qū)動(dòng)的柔性鉸鏈結(jié)構(gòu)、形狀保持架、壓電驅(qū)動(dòng)器、電容測微儀、力傳感器、工控機(jī)及相應(yīng)硬件電路。根據(jù)精度要求,系統(tǒng)地分析了該裝置的結(jié)構(gòu)和片狀陶瓷的傾斜對測量結(jié)果的影響。分析了軟件系統(tǒng)功能需求,并設(shè)計(jì)了基于Labview的上位機(jī)軟件。主要實(shí)現(xiàn)微動(dòng)結(jié)構(gòu)的位移控制,力輸出的數(shù)據(jù)采集和保存等功能。并對裝置進(jìn)行了性能測試。該裝置的最大可測力輸出為76.4N,測量分辨率分別為0.03μm和0.01N。本文基于該裝置進(jìn)行了一系列的實(shí)驗(yàn),探討了壓電陶瓷疊堆、長方形壓電陶瓷片和環(huán)狀壓電陶瓷片力輸出的位移輸出之間的關(guān)系。并且繪制力輸出-位移輸出、力輸出-電壓之間的關(guān)系圖。該裝置測量結(jié)果更加的直觀和精確。實(shí)驗(yàn)結(jié)果表明壓電陶瓷的力輸出特性可以被精確地測量。相比傳統(tǒng)的測量方法,新的儀器可以直接測量壓電陶瓷的力輸出,同時(shí)也可以分別繪制出壓電陶瓷的力輸出和位移輸出以及力輸出和激勵(lì)電壓之間的關(guān)系圖。經(jīng)過實(shí)驗(yàn)證明,該壓電陶瓷力輸出特性測試系統(tǒng)結(jié)構(gòu)設(shè)計(jì)合理,工作原理新穎,測試精度高且結(jié)果可靠,能夠?qū)崿F(xiàn)被測試壓電陶瓷力輸出特性。
[Abstract]:As a kind of driving element, piezoelectric ceramic has the advantages of high response speed, large force output, wide frequency range, high precision and compact structure. Piezoelectric ceramics have been widely used in various precision systems. Piezoelectric ceramics have become a hot direction in the development of driving components. Piezoelectric ceramics are used in pairs in mechanical dither laser gyroscopes. Piezoelectric ceramics will be crushed by another pair. In addition, a pair of piezoelectric ceramics with different force output will also affect the lifetime and reliability of the laser gyroscope, resulting in a certain economic loss. On the basis of the displacement output characteristics of piezoelectric ceramics, Based on the dielectric properties of piezoelectric ceramics, a rigid body-electrode plate model is constructed. The mathematical model of force output of piezoelectric ceramics is derived. The results show that the force output of piezoelectric ceramics mainly depends on the polarization strength and excitation voltage of piezoelectric ceramics. This paper analyzes the principle of the traditional piezoelectric ceramic force output measurement method. The measurement process is tedious and the error is easy to be introduced in this method. In view of these problems, an active measuring method is put forward. Compared with the traditional measuring method, the force exerting device and displacement control device are added. Press the measured element back into its original length, The displacement measurement system is used to accurately control the compression quantity and to record the force output values of piezoelectric ceramics with different displacements. The active measurement method can measure piezoelectric ceramics with various shapes and the steps of measuring are simple. The results are accurate. According to the active measurement method proposed in this paper, a corresponding testing system is built. The system consists of a piezoelectric driven flexure hinge structure, a shape cage, a piezoelectric actuator, a capacitive micrometer, a force sensor, and so on. Industrial control computer and corresponding hardware circuits. According to the precision requirements, the influence of the structure of the device and the tilting of the flake ceramics on the measurement results is systematically analyzed, and the functional requirements of the software system are analyzed. The software of upper computer based on Labview is designed to control the displacement of fretting structure. The performance of the device is tested. The maximum measurable force output of the device is 76.4N, and the measuring resolution is 0.03 渭 m and 0.01Nrespectively. A series of experiments are carried out based on the device. The relationship between displacement output of piezoelectric ceramic stack, rectangular piezoelectric ceramic plate and annular piezoelectric ceramic plate is discussed, and the output of force output and displacement output are plotted. The experimental results show that the force output characteristics of piezoelectric ceramics can be accurately measured. The new instrument can directly measure the force output of piezoelectric ceramics, and can also draw the relationship between force output and displacement output, force output and excitation voltage, respectively. The testing system has the advantages of reasonable structure, novel working principle, high precision and reliable results, and can realize the force output characteristics of the piezoelectric ceramics tested.
【學(xué)位授予單位】：哈爾濱工業(yè)大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2017
【分類號】：TQ174.75

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