本文選題：真空測(cè)量　切入點(diǎn)：帶電粒子　出處：《合肥工業(yè)大學(xué)》2015年碩士論文　論文類型：學(xué)位論文

【摘要】：在化工、制藥等一些特殊真空環(huán)境中,含有大量帶電粒子及飽和水蒸氣,常見(jiàn)的真空度測(cè)量方法對(duì)氣體環(huán)境中的帶電粒子十分敏感,會(huì)嚴(yán)重影響測(cè)量準(zhǔn)確度,進(jìn)而極大影響生產(chǎn)效率及產(chǎn)品質(zhì)量,因此該問(wèn)題是業(yè)界目前亟待解決的。針對(duì)這種特殊情況,本文分析了帶電粒子及其他因素對(duì)傳統(tǒng)測(cè)量設(shè)備的影響,選擇了電容薄膜真空計(jì)作為改進(jìn)對(duì)象,設(shè)計(jì)并提出使用全陶瓷規(guī)管進(jìn)行電荷屏蔽的方案。通過(guò)受力分析,探討提高傳感器精度的方法：為降低溫度對(duì)電容傳感器的影響,在有限元分析的幫助下設(shè)計(jì)了快速加熱恒溫控制系統(tǒng)；通過(guò)小型化、模塊化的設(shè)計(jì),提出了結(jié)構(gòu)簡(jiǎn)單、響應(yīng)快速的真空度測(cè)量電路及溫度測(cè)量與控制電路,并對(duì)其進(jìn)行仿真；通過(guò)合理的單片機(jī)系統(tǒng)設(shè)計(jì),提出了一整套真空度、溫度測(cè)量與控制系統(tǒng)方案,可以實(shí)現(xiàn)恒溫加熱、測(cè)量真空度并進(jìn)行相應(yīng)顯示。通過(guò)實(shí)驗(yàn),該系統(tǒng)測(cè)量準(zhǔn)確,結(jié)構(gòu)簡(jiǎn)單,成本較低,易于推廣,可以為國(guó)內(nèi)特殊環(huán)境下低真空度測(cè)量方法的研究提供一定參考。
[Abstract]:In some special vacuum environments, such as chemical industry and pharmacy, there are a large number of charged particles and saturated water vapor. The common vacuum measurement methods are very sensitive to charged particles in gas environment, which will seriously affect the accuracy of measurement. Thus, the production efficiency and product quality are greatly affected, so this problem is urgently needed to be solved. In view of this special situation, this paper analyzes the influence of charged particles and other factors on the traditional measuring equipment. The capacitance film vacuum gauge is selected as the object of improvement, and the scheme of charge shielding using all-ceramic regulation is designed and put forward. Through the force analysis, the methods of improving the sensor precision are discussed: to reduce the influence of temperature on the capacitance sensor, With the help of finite element analysis, the fast heating constant temperature control system is designed, and through the miniaturization and modularization design, the vacuum measurement circuit and the temperature measurement and control circuit with simple structure and fast response are proposed and simulated. Through the reasonable design of single-chip microcomputer system, a whole set of vacuum, temperature measurement and control system scheme is put forward, which can realize constant temperature heating, measure vacuum degree and display it accordingly. Through experiments, the system is accurate in measurement and simple in structure. It is easy to be popularized and can be used as a reference for the research of low vacuum measurement method in domestic special environment.
【學(xué)位授予單位】：合肥工業(yè)大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2015
【分類號(hào)】：TQ024

【參考文獻(xiàn)】

相關(guān)期刊論文 前10條

1 劉桂禮;王艷林;李東;;石英晶體諧振器電參數(shù)測(cè)量電路設(shè)計(jì)[J];北京機(jī)械工業(yè)學(xué)院學(xué)報(bào);2008年01期

2 陳言付;555電路的應(yīng)用初探[J];池州師專學(xué)報(bào);2003年05期

3 沈文琪;溫度、電壓、諧波、涌流等對(duì)電容器壽命的影響[J];電力電容器;2005年02期

4 劉振伶;耿林選;李建平;李洪濤;;線路分散補(bǔ)償電容器損壞原因簡(jiǎn)析及其改進(jìn)措施[J];電力電容器;2006年04期

5 汪朝虹;555時(shí)基電路的分析和應(yīng)用[J];江西電力職業(yè)技術(shù)學(xué)院學(xué)報(bào);2004年04期

6 段宗濤;;淺談石英晶體生產(chǎn)設(shè)備真空測(cè)量技術(shù)[J];電腦知識(shí)與技術(shù);2011年26期

7 王明娟;曾繁政;曲藝;;電容電感測(cè)試儀的設(shè)計(jì)[J];電子科技;2010年11期

8 徐海龍,侯少鋒,任永強(qiáng),張力;基于TL431的直流穩(wěn)壓電源設(shè)計(jì)[J];儀器儀表用戶;2003年01期

9 汪s，

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