【摘要】：針對目前市面上的固晶機都是單吸嘴結(jié)構(gòu),本文設(shè)計了一款多吸嘴的焊頭機構(gòu)的固晶機,具有連續(xù)取晶、固晶的特點,比單吸嘴固晶機在速度和精度方面有優(yōu)勢。采用虛擬樣機技術(shù)和有限元技術(shù)對設(shè)計的機構(gòu)進行分析,其結(jié)果滿足固晶工藝要求,該設(shè)計方案具有一定的理論意義和實際應用價值。本文設(shè)計的固晶機主要由七大機構(gòu)組成,七大機構(gòu)分別是：多吸嘴焊頭機構(gòu)、點膠機構(gòu)、頂針機構(gòu)、X-Y支架工作臺、晶圓供送機構(gòu)、光學鏡筒及照明機構(gòu)和機架及其附屬機構(gòu)。本論文主要完成以下幾方面的工作：(1)多吸嘴焊頭機構(gòu)的設(shè)計分析了焊頭機構(gòu)的工作原理,包括：光電傳感器式檢測漏晶或吸嘴堵塞、電磁閥控制真空和吹氣完取成晶固晶、彈簧緩沖實現(xiàn)吸嘴“軟著路”等。設(shè)計的多吸嘴焊頭機構(gòu)提供兩種工作模式,模式一：采用8吸嘴結(jié)構(gòu),焊頭機構(gòu)每一工步都能完成取晶和固晶；模式二：采用4吸嘴、4點膠頭的結(jié)構(gòu),焊頭機構(gòu)能分兩工步完成取膠、點膠、取晶和固晶。本文詳細介紹了模式一的工作過程,并設(shè)計了相應的8吸嘴焊頭機構(gòu)。8吸嘴焊頭機構(gòu)中,焊頭機構(gòu)的旋轉(zhuǎn)運動部件采用DDR (Direct Drive Rotation)直驅(qū)電機驅(qū)動,利用直驅(qū)電機具有高重復定位精度、高加速度、免維護等特點,能大大提高焊頭機構(gòu)的性能；焊頭機構(gòu)的Z向運動部件采用高精度微型LM滾動導軌,在滿足精度的前提下盡量減輕Z向運動機構(gòu)的質(zhì)量,提高Z向運動響應性；焊頭機構(gòu)的電氣回轉(zhuǎn)接口部件采用了氣電混合旋轉(zhuǎn)接頭,有效解決了連續(xù)轉(zhuǎn)動導致電氣線路和氣管纏繞的問題。(2)其他部分機構(gòu)的設(shè)計其他部分機構(gòu)包括：X-Y支架工作臺、頂針機構(gòu)、晶圓供送機構(gòu)、點膠機構(gòu)、CCD (Charge coupled Device)光學鏡頭及調(diào)節(jié)機構(gòu)和機架等零部件。本文主要介紹了X-Y支架工作臺、頂針機構(gòu)、晶圓供送機構(gòu)的工作原理及結(jié)構(gòu)設(shè)計。X-Y支架工作臺采用伺服電機驅(qū)動,滾珠絲杠副傳動,并利用線性導軌滑塊完成承載和導向。支架載物臺還具有調(diào)節(jié)高度,可以適應不同規(guī)格的LED支架。該機構(gòu)具有快速響應,高精度、通用的特點。頂針機構(gòu)采用偏心輪機構(gòu)和精密V型導軌副相結(jié)合的機構(gòu),由步進電機通過聯(lián)軸器直接驅(qū)動,結(jié)構(gòu)簡單、成本較低,可以滿足刺晶需求。晶圓供送機構(gòu)的下部分為串聯(lián)的X-Y工作臺,可以實現(xiàn)位置的精密微調(diào),其上部分為懸臂結(jié)構(gòu)的晶圓環(huán)座,用于放置并固定晶圓。(3)焊頭機構(gòu)的仿真分析本文綜合運用CAD\CAE集成環(huán)境,對平面LED多吸嘴固晶機進行了較為系統(tǒng)的設(shè)計分析和研究。使用三維設(shè)計軟件SolidWorks2013對樣機進行了三維建模和虛擬裝配；結(jié)合有限元分析軟件ANSYS14.0對焊頭機構(gòu)的關(guān)鍵零件進行模態(tài)分析,確定其固有頻率和振型。建立柔性體,最后使用機械系統(tǒng)動力學仿真分析軟件ADAMS2012對多吸嘴焊頭機構(gòu)進行了仿真分析,得出吸嘴在取晶位和固晶位置的接觸力,由此來驗證機構(gòu)是否滿足設(shè)計要求。
[Abstract]:In view of the single-suction-nozzle structure of the current crystal-fixing machine on the market, this paper designs a multi-suction-nozzle solidifying machine for welding head mechanism, which has the characteristics of continuous crystallization and solidification, and has advantages over single-suction-nozzle solidifying machine in speed and precision. The design scheme has certain theoretical significance and practical application value. The crystal fixer designed in this paper is mainly composed of seven mechanisms: multi-suction welding head mechanism, dispensing mechanism, thimble mechanism, X-Y support workbench, wafer feeding mechanism, optical lens barrel and lighting mechanism, frame and its subsidiary mechanism. The main work of this paper is as follows: (1) The design and analysis of multi-nozzle welding head mechanism work principle, including: photoelectric sensor type detection of crystal leakage or nozzle blockage, solenoid valve control of vacuum and blowing complete crystallization, spring buffer to achieve the suction nozzle "soft path" and so on. There are two working modes, one is using 8 suction nozzles structure, each step of the welding head mechanism can complete crystallization and solidification; the other is using 4 suction nozzles, 4 point head structure, the welding head mechanism can complete glue extraction, dispensing, crystallization and solidification in two steps. In structure.8 suction nozzle welding head mechanism, the rotating moving parts of the welding head mechanism are driven by DDR (Direct Drive Rotation) direct drive motor, which has the characteristics of high repetitive positioning accuracy, high acceleration and maintenance-free, and can greatly improve the performance of the welding head mechanism; the Z-direction moving parts of the welding head mechanism adopt high-precision micro LM rolling guide rail. On the premise of satisfying the precision, the quality of Z-direction motion mechanism is reduced as far as possible, and the Z-direction motion responsiveness is improved. The electric rotary joint of welding head mechanism adopts the pneumatic-electric hybrid rotary joint, which effectively solves the problem of winding of electric circuit and trachea caused by continuous rotation. (2) Other parts of mechanism design include: X-Y bracket. Workbench, ejector pin mechanism, wafer feeding mechanism, dispensing mechanism, CCD (Charge coupled device) optical lens and adjusting mechanism and rack and other parts and components. This paper mainly introduces the working principle and structure design of X-Y support workbench, ejector pin mechanism, wafer feeding mechanism. X-Y support workbench adopts servo motor drive, ball screw pair drive. The support platform also has adjustable height, which can adapt to different specifications of LED brackets. The mechanism has the characteristics of fast response, high precision and versatility. The lower part of the wafer feeding mechanism is a series X-Y workbench, which can adjust the position precisely. The upper part is a cantilever structure of the wafer ring seat, which is used to place and fix the wafer. (3) Simulation analysis of the welding head mechanism. This paper uses the CADCAE integrated environment to fix the plane LED multi-suction nozzle. The prototype was modeled and assembled by SolidWorks 2013, and the key parts of the welding head mechanism were analyzed by finite element analysis software ANSYS14.0 to determine its natural frequency and vibration mode. The mechanical simulation software ADAMS2012 is used to simulate and analyze the multi-suction head mechanism, and the contact force between the suction head and the solid crystal position is obtained to verify whether the mechanism meets the design requirements.
【學位授予單位】：廣東工業(yè)大學
【學位級別】：碩士
【學位授予年份】：2015
【分類號】：TN312.8

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本文編號：2231889