發(fā)布時(shí)間：2018-08-07 06:34

【摘要】：微機(jī)電系統(tǒng)(MEMS)垂直腔面發(fā)射激光器(VCSELs)是一種特殊光源,具有低功耗、高調(diào)制速率、寬波長(zhǎng)調(diào)諧范圍、易耦合等優(yōu)點(diǎn),被廣泛應(yīng)用于激光通信領(lǐng)域。為提升激光器工作性能,如擴(kuò)大波長(zhǎng)調(diào)諧范圍、提高偏振對(duì)比度等,需要優(yōu)化內(nèi)腔亞波長(zhǎng)光柵結(jié)構(gòu)參數(shù)來(lái)改善腔內(nèi)光場(chǎng)分布以及偏振輸出模式�；诘刃Ы橘|(zhì)理論(EMT),并結(jié)合薄膜理論設(shè)計(jì)了針對(duì)調(diào)諧范圍中心波長(zhǎng)為850nm、GaAs材料的亞波長(zhǎng)光柵的較優(yōu)周期、占空比、脊高的取值。分析了橫電(TE)、橫磁(TM)光,占空比與脊高對(duì)光柵透射率的影響。另外,通過(guò)系統(tǒng)模擬,對(duì)比了未刻蝕光柵、光柵未優(yōu)化及光柵優(yōu)化后的激光器波長(zhǎng)調(diào)諧范圍,結(jié)果表明:針對(duì)特定波長(zhǎng)調(diào)諧范圍及光柵材料,通過(guò)優(yōu)化光柵參數(shù)可實(shí)現(xiàn)光柵對(duì)TE或TM光的增透,增強(qiáng)半導(dǎo)體腔和空氣隙之間光場(chǎng)的耦合,進(jìn)而擴(kuò)大激光器的波長(zhǎng)調(diào)諧范圍。
[Abstract]:(MEMS) vertical cavity surface emitting laser (VCSELs) in MEMS is a special light source, which has the advantages of low power consumption, high modulation rate, wide wavelength tuning range and easy coupling. It is widely used in the field of laser communication. In order to improve the performance of the laser, such as enlarging the wavelength tuning range and increasing the polarization contrast, it is necessary to optimize the structure parameters of the subwavelength grating in the cavity to improve the optical field distribution and the polarization output mode in the cavity. Based on the equivalent dielectric theory (EMT),) and the thin film theory, the optimal period, duty cycle and ridge height of the subwavelength grating with tuning range of 850 nm are designed. The effects of transverse (TE), transverse magnetic (TM) light, duty cycle and ridge height on the transmittance of the grating are analyzed. In addition, through systematic simulation, the wavelength tuning range of the laser with unetched grating, unoptimized grating and optimized grating is compared. The results show that: for specific wavelength tuning range and grating material, By optimizing the grating parameters, the grating can enhance the optical field coupling between the semiconductor cavity and the air gap, and then enlarge the wavelength tuning range of the laser.
【作者單位】： 長(zhǎng)春理工大學(xué)高功率半導(dǎo)體激光國(guó)家重點(diǎn)實(shí)驗(yàn)室;北京工業(yè)大學(xué)光電子技術(shù)省部共建教育部重點(diǎn)實(shí)驗(yàn)室;
【基金】：國(guó)家自然科學(xué)基金(60908012,61575008) 吉林省科技計(jì)劃重點(diǎn)項(xiàng)目(201502040689x)
【分類號(hào)】：TN248

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