CCD紫外增強薄膜旋涂法工藝優(yōu)化
發(fā)布時間:2018-07-16 07:40
【摘要】:在硅基探測器的入射窗上制備熒光下轉(zhuǎn)換薄膜,是一種有效降低成本的紫外熒光增強技術(shù)。從理論上探討了由聚二甲基硅氧烷與顏料黃101混合膠體的紫外熒光薄膜旋涂工藝參數(shù)與性能之間關(guān)系,搭建紫外熒光薄膜應用于光譜分析的性能測試實驗平臺,對紫外熒光增強薄膜旋涂工藝參數(shù)質(zhì)量配比、旋涂轉(zhuǎn)速進行優(yōu)化。光譜分析探測器有兩個主要指標,光譜響應靈敏度和光譜分辨率,分析與實驗結(jié)果表明,利用旋涂法制備紫外增強熒光薄膜,旋涂轉(zhuǎn)速將直接影響薄膜的厚度、表面粗糙度和熒光物質(zhì)的分布,從而影響光譜分析系統(tǒng)的分辨率;紫外熒光增強薄膜的增強效率與熒光溶劑聚二甲基硅氧烷與熒光物質(zhì)顏料黃101的質(zhì)量比密切相關(guān),質(zhì)量比低無法滿足對紫外響應效率的提高,但高質(zhì)量比,熒光物質(zhì)處在聚集態(tài)熒光自猝滅嚴重,也不利于增強薄膜的紫外響應效率。最終,在薄膜旋涂工藝優(yōu)化的基礎(chǔ)上,旋涂轉(zhuǎn)速2 500~3 000r·min~(-1),熒光物質(zhì)與熒光溶劑質(zhì)量比為7∶100制備出紫外熒光增強薄膜。汞燈特征光譜測試結(jié)果表明該薄膜313nm紫外波長處探測響應靈敏度提高了1.6倍左右,對比分析鍍膜前后特征光譜的半波帶寬,鍍制紫外增強熒光薄膜對其影響很小。
[Abstract]:It is an effective technology to reduce the cost of UV fluorescence enhancement by preparing fluorescence downconversion thin films on the incident window of silicon based detectors. The relationship between the process parameters and the properties of the UV fluorescent thin film, which is mixed with polydimethylsiloxane and pigment yellow 101, is discussed theoretically, and the experimental platform for testing the performance of the ultraviolet fluorescent film used in spectral analysis is built. The mass ratio and rotation speed of UV fluorescence enhanced film spin-coating process parameters were optimized. Spectral analysis detector has two main indexes, spectral response sensitivity and spectral resolution. The results of analysis and experiment show that the rotational speed of spin coating will directly affect the thickness of ultraviolet enhanced fluorescence film. The surface roughness and the distribution of fluorescent substances affect the resolution of the spectral analysis system, and the enhancement efficiency of the UV-enhanced film is closely related to the mass ratio of the fluorescent solvent polydimethylsiloxane to the fluorescent pigment yellow 101. The low mass ratio can not satisfy the improvement of the UV response efficiency, but the high mass ratio, the fluorescence substance in the aggregation state fluorescence self-quenching is serious, also is not conducive to enhance the UV response efficiency of the film. Finally, on the basis of the optimization of the spin-coating process, UV enhanced fluorescence films were prepared by the spin coating rotation speed of 2 500 ~ (3 000) r / min ~ (-1) and the mass ratio of fluorescent substance to fluorescent solvent at 7: 100. The measured results of the characteristic spectrum of mercury lamp show that the detection sensitivity at the UV wavelength of the film is about 1.6 times higher. Compared with the half-wave bandwidth of the characteristic spectrum before and after the deposition, the UV enhanced fluorescence film has little effect on it.
【作者單位】: 中國科學院長春光學精密機械與物理研究所應用光學國家重點實驗室;長春理工大學光電工程學院;
【基金】:國家(863)計劃項目(2015AA042402) 吉林省自然科學基金項目(20160101272JC) 吉林省科技發(fā)展計劃項目(20140201011GX) 國家自然科學基金青年基金項目(61504143)資助
【分類號】:TN23
本文編號:2125703
[Abstract]:It is an effective technology to reduce the cost of UV fluorescence enhancement by preparing fluorescence downconversion thin films on the incident window of silicon based detectors. The relationship between the process parameters and the properties of the UV fluorescent thin film, which is mixed with polydimethylsiloxane and pigment yellow 101, is discussed theoretically, and the experimental platform for testing the performance of the ultraviolet fluorescent film used in spectral analysis is built. The mass ratio and rotation speed of UV fluorescence enhanced film spin-coating process parameters were optimized. Spectral analysis detector has two main indexes, spectral response sensitivity and spectral resolution. The results of analysis and experiment show that the rotational speed of spin coating will directly affect the thickness of ultraviolet enhanced fluorescence film. The surface roughness and the distribution of fluorescent substances affect the resolution of the spectral analysis system, and the enhancement efficiency of the UV-enhanced film is closely related to the mass ratio of the fluorescent solvent polydimethylsiloxane to the fluorescent pigment yellow 101. The low mass ratio can not satisfy the improvement of the UV response efficiency, but the high mass ratio, the fluorescence substance in the aggregation state fluorescence self-quenching is serious, also is not conducive to enhance the UV response efficiency of the film. Finally, on the basis of the optimization of the spin-coating process, UV enhanced fluorescence films were prepared by the spin coating rotation speed of 2 500 ~ (3 000) r / min ~ (-1) and the mass ratio of fluorescent substance to fluorescent solvent at 7: 100. The measured results of the characteristic spectrum of mercury lamp show that the detection sensitivity at the UV wavelength of the film is about 1.6 times higher. Compared with the half-wave bandwidth of the characteristic spectrum before and after the deposition, the UV enhanced fluorescence film has little effect on it.
【作者單位】: 中國科學院長春光學精密機械與物理研究所應用光學國家重點實驗室;長春理工大學光電工程學院;
【基金】:國家(863)計劃項目(2015AA042402) 吉林省自然科學基金項目(20160101272JC) 吉林省科技發(fā)展計劃項目(20140201011GX) 國家自然科學基金青年基金項目(61504143)資助
【分類號】:TN23
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