本文選題：溶膠/凝膠法 + ZnO薄膜��； 參考：《蘭州理工大學學報》2017年01期

【摘要】：采用溶膠/凝膠法在石英襯底上制備Na-N共摻ZnO納米薄膜,研究Na摻雜原子分數(shù)對ZnO薄膜結(jié)構(gòu)和光學性能的影響.結(jié)果表明:適度的Na摻雜,使得薄膜結(jié)晶質(zhì)量明顯改善,但過高原子分數(shù)的摻雜,則會誘發(fā)新的缺陷,導致結(jié)晶質(zhì)量下降.在可見光區(qū)域,薄膜透光率隨Na摻雜原子分數(shù)的升高而升高,摻雜原子分數(shù)7.5%的薄膜透光率達到90%左右.Na摻雜原子分數(shù)對ZnO的光學帶隙產(chǎn)生了直接的影響.
[Abstract]:Na-N co-doped ZnO nanocrystalline films were prepared on quartz substrates by sol / gel method. The effects of Na doping atom fraction on the structure and optical properties of ZnO films were investigated. The results show that the crystal quality of the films is improved obviously by proper Na doping, but the doping with too high atomic fraction will induce new defects and lead to the decrease of crystal quality. In the visible region, the transmittance of ZnO films increases with the increase of Na doped atom fraction. The transmittance of doped films with 7.5% doped atom fraction reaches 90%. The Na doped atom fraction has a direct effect on the optical band gap of ZnO.
【作者單位】： 蘭州理工大學材料科學與工程學院;
【基金】：吉林大學集成光電子學國家重點聯(lián)合實驗室開放課題(IOSKL2014KF01) 甘肅省博士后科研項目擇優(yōu)基金資助 蘭州理工大學科研啟動基金資助
【分類號】：TN304.21
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本文編號：2015817