本文選題：激光器 + 波長測量�。� 參考：《華中科技大學》2015年碩士論文

【摘要】：激光干涉技術是重要的測量技術,廣泛應用于尺寸、形位和表面形貌測量。在這些測量中,激光波長均作為測量基準,其穩(wěn)定性、準確性對儀器的精度具有很大的影響。然而,由于環(huán)境條件和驅動電源波動的影響,激光器波長變化不可避免。因此,為保證儀器的測量精度和穩(wěn)定性,激光器波長的實時測量校準是必要的。本文基于光柵衍射原理,開發(fā)一種激光器波長測量裝置,主要研究內容與成果包括:1、研究分析了四象限光電探測器(QD)光斑中心定位原理,提出了基于光柵衍射原理結合雙四象限光電探測器進行光斑中心定位的波長測量原理,設計了測量系統(tǒng)架構,構建了測量裝置。2、設計了四象限光電探測器信號處理電路,包括探測器前置放大電路和光斑中心計算電路。其中,前置放大電路將光電單元電流信號轉換為電壓信號,光斑中心計算電路將四路電壓信號轉換為帶有光斑中心信息的電壓信號,通過PCI采集卡輸入計算機進行處理。3、建立了均勻分布和高斯分布兩種激光光斑模型,采用Matlab仿真,得到了四象限探測器在理論和實際情況下,不同光斑的中心定位偏移量曲線和誤差曲線。根據(jù)仿真結果,分析了影響四象限光斑中心定位精度的一些因素,給出了誤差補償辦法。在此基礎上,完成了波長測量系統(tǒng)測量程序設計。4、對激光器波長測量裝置進行了實驗測試,包括系統(tǒng)的穩(wěn)定性測試和重復性測試,并進行了誤差分析。實驗和分析結果反映了測量系統(tǒng)的有效性。
[Abstract]:Laser interferometry is an important measurement technique, which is widely used in measurement of dimension, configuration and surface morphology. In these measurements, the laser wavelength is used as the measurement datum, and its stability and accuracy have great influence on the accuracy of the instrument. However, the variation of laser wavelength is inevitable due to the environmental conditions and the fluctuation of driving power supply. Therefore, in order to ensure the accuracy and stability of the instrument, it is necessary to calibrate the laser wavelength in real time. Based on the principle of grating diffraction, a laser wavelength measuring device is developed in this paper. The main research contents and results include: 1. The principle of locating the spot center of a four-quadrant photodetector, QD), is studied and analyzed. The wavelength measurement principle based on grating diffraction principle and double four-quadrant photodetector is put forward, the measurement system architecture is designed, the measuring device is constructed, and the signal processing circuit of four-quadrant photodetector is designed. It includes detector preamplifier circuit and spot center calculation circuit. The preamplifier circuit converts the current signal of the photoelectric unit into the voltage signal, and the light spot center calculation circuit converts the four voltage signals into the voltage signal with the information of the spot center. Two kinds of laser spot models, uniform distribution and Gao Si distribution, are established by using PCI acquisition card input computer to process. The four-quadrant detector is obtained in theory and practice by Matlab simulation. The center location offset curve and error curve of different spot. Based on the simulation results, some factors affecting the accuracy of the four-quadrant optical spot location are analyzed, and the error compensation method is given. On this basis, the measurement program of the wavelength measurement system is designed. 4. The laser wavelength measuring device is tested experimentally, including the stability test and repeatability test of the system, and the error analysis is carried out. The experimental and analytical results reflect the effectiveness of the measurement system.
【學位授予單位】：華中科技大學
【學位級別】：碩士
【學位授予年份】：2015
【分類號】：TN248

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