本文選題：壓電陶瓷　切入點：兩維偏擺鏡　出處：《中國科學(xué)院研究生院(長春光學(xué)精密機械與物理研究所)》2015年碩士論文

【摘要】：光束合成設(shè)備中,為每臺激光器配備了相應(yīng)的壓電陶瓷兩維偏擺鏡來補償激光的光路偏移。項目中偏擺鏡在兩個方向的擺角行程范圍都要不小于±1mrad,偏擺鏡的整行程重復(fù)定位精度要優(yōu)于20μrad。因此,需要設(shè)計壓電陶瓷兩維偏擺鏡的驅(qū)動系統(tǒng),實現(xiàn)高精度的定位要求。本設(shè)計首先建立了壓電陶瓷兩維偏擺鏡驅(qū)動系統(tǒng)硬件的總體框架,論述了各個模塊的設(shè)計原理,包括控制模塊、驅(qū)動電源模塊、檢測回路模塊�？刂颇K主要討論了DSP芯片和FPGA芯片選擇及其外圍電路設(shè)計、D/A轉(zhuǎn)換電路和A/D轉(zhuǎn)換電路設(shè)計;驅(qū)動電源模塊包括原理及需求分析、器件的選擇、電路的設(shè)計等;檢測回路模塊主要論述了放大電路的工作原理和電路設(shè)計。接著對所設(shè)計的硬件電路的性能進(jìn)行了測試,實驗表明該硬件電路的各項指標(biāo)都能滿足要求。然后,在壓電陶瓷遲滯特性的基礎(chǔ)上,建立了改進(jìn)非對稱PI遲滯模型,解決了遲滯曲線非對稱的問題,使得擬合精度提高了�；诟倪M(jìn)非對稱PI遲滯模型,采用二分法設(shè)計了前饋控制算法,補償?shù)魤弘娞沾傻倪t滯特性導(dǎo)致的非線性。然后進(jìn)行PID反饋控制算法的設(shè)計,將前饋控制與反饋控制結(jié)合得到了復(fù)合控制算法,使得跟蹤精度達(dá)到了16.2μrad。本文重點關(guān)注了小角度偏轉(zhuǎn)條件下驅(qū)動方式的選擇問題以及怎樣提高控制精度問題。理論研究和實驗表明,這項研究工作提高了壓電陶瓷的性能,對壓電陶瓷兩維偏擺鏡在光束合成設(shè)備中的應(yīng)用具有重要的理論意義和實際價值。
[Abstract]:In beam synthesis equipment, Each laser is equipped with the corresponding piezoelectric ceramic two dimensional pendulum mirror to compensate the optical path offset. The range of swing angle stroke of the pendulum mirror in both directions is not less than 鹵1mrad. the precision of the whole stroke repeat positioning of the pendulum mirror is better than 20 渭 rad. therefore, It is necessary to design the driving system of the piezoelectric ceramic two-dimensional pendulum mirror to achieve the high precision positioning requirements. Firstly, the overall hardware frame of the piezoelectric ceramic two-dimensional pendulum mirror driving system is established, and the design principle of each module is discussed. The control module mainly discusses the selection of DSP chip and FPGA chip and the peripheral circuit design of D / A conversion circuit and A / D conversion circuit, the driving power module includes the principle and requirement analysis, the control module includes the control module, the driving power supply module, the control module, the control module, the DSP chip and the FPGA chip selection and the peripheral circuit design. The circuit module mainly discusses the working principle and circuit design of the amplifier circuit. Then the performance of the designed hardware circuit is tested. Experiments show that all the parameters of the circuit can meet the requirements. Then, based on the hysteresis characteristics of piezoelectric ceramics, an improved asymmetric Pi hysteresis model is established to solve the problem of asymmetric hysteresis curve. Based on the improved asymmetric Pi hysteresis model, the feedforward control algorithm is designed by using dichotomy to compensate for the nonlinearity caused by hysteresis of piezoelectric ceramics. Then the PID feedback control algorithm is designed. The compound control algorithm is obtained by combining feedforward control with feedback control. The tracking accuracy reaches 16.2 渭 rad. this paper focuses on the choice of driving mode and how to improve the control precision under the condition of small angle deflection. The theoretical and experimental results show that the research work improves the performance of piezoelectric ceramics. It has important theoretical significance and practical value for the application of piezoelectric ceramic two dimensional pendulum mirror in beam synthesis equipment.
【學(xué)位授予單位】：中國科學(xué)院研究生院(長春光學(xué)精密機械與物理研究所)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2015
【分類號】：TN24;TM282

【相似文獻(xiàn)】

相關(guān)期刊論文 前4條

1 楊立芝;王明海;高正紅;;飛行器縱向俯仰氣動特性計算研究[J];應(yīng)用力學(xué)學(xué)報;2010年01期

2 杜智濤;魏洪峰;姜明波;張志標(biāo);;3種型號濕敏電容傳感器溫度和遲滯特性的分析比較[J];氣象水文海洋儀器;2012年02期

3 楊文艷;孫寶光;;壓電陶瓷非線性特性研究[J];科技信息;2014年09期

4 ;[J];;年期

相關(guān)會議論文 前2條

1 裘進(jìn)浩;姜皓;季宏麗;;基于改進(jìn)Prandtl-Ishlinskii模型的壓電陶瓷驅(qū)動器非對稱遲滯特性建模[A];中國力學(xué)學(xué)會學(xué)術(shù)大會'2009論文摘要集[C];2009年

2 孫舒;曹樹謙;;壓電材料遲滯特性建模研究[A];第十三屆全國非線性振動暨第十屆全國非線性動力學(xué)和運動穩(wěn)定性學(xué)術(shù)會議摘要集[C];2011年

相關(guān)碩士學(xué)位論文 前4條

1 雷艷妮;指尖密封動態(tài)遲滯特性分析[D];西北工業(yè)大學(xué);2006年

2 趙飛;精密定位系統(tǒng)中遲滯特性的建模與控制[D];浙江理工大學(xué);2013年

3 張娜;遲滯非線性系統(tǒng)滑模自適應(yīng)控制策略研究[D];河北大學(xué);2014年

4 吳伊玲;壓電陶瓷兩維偏擺鏡驅(qū)動系統(tǒng)的設(shè)計[D];中國科學(xué)院研究生院(長春光學(xué)精密機械與物理研究所);2015年

，

本文編號：1699418