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  本文選題：PWM功率放大器　切入點：極諧振軟開關　出處：《電子科技大學》2015年碩士論文　論文類型：學位論文

【摘要】：光刻機系統(tǒng)是電子元器件的制造裝備,超精密平面電機及其伺服驅(qū)動是其中極其關鍵的部件,是決定光刻機系統(tǒng)精度的動力來源。用于驅(qū)動超精密平面電機的PWM功率放大器的在國內(nèi)研究空白,且國外對中國的技術封鎖,開展應用于該領域的PWM功率放大器的研究具有重要的意義。本文首先對PWM功率放大器中的兩個關鍵模塊進行了理論研究,包括功率拓撲和電流控制器。開關頻率越高,輸出電流紋波峰峰值越小,且系統(tǒng)可獲得更好的動態(tài)響應。但隨著開關頻率的增大,傳統(tǒng)硬開關電路的開關損耗和電磁干擾(EMI)都隨之增大,軟開關技術能有效解決這些問題。在諸多軟開關電路中,極諧振軟開關由于結(jié)構(gòu)簡單,應用廣泛。本文對基本的極諧振拓撲進行了詳細的理論推導,進而研究了改進的極諧振拓撲。PWM變換器的電流控制方法有很多種,由于滯環(huán)法的反饋電路結(jié)構(gòu)簡單,易實現(xiàn),且屬于閉環(huán)控制,動態(tài)響應好,應用也最為廣泛。本文對滯環(huán)電流控制方法進行了理論分析,討論了應用于極諧振軟開關功率拓撲的變環(huán)寬滯環(huán)電流控制方法的理論。當功率拓撲中使用了自舉電路來驅(qū)動橋臂高側(cè)的開關器件時,滯環(huán)電流控制的變換器的低側(cè)開關的最小導通時間和最大占空比便得不到保證,本文采用了電感電流變化率反饋來解決該問題的方法。在以上理論基礎上,本文對樣機的電路原理圖進行了詳細的設計。在基本的極諧振軟開關拓撲基礎上,設計了改進后的極諧振拓撲電路。提出了以開關頻率、濾波器諧振頻率以及最大占空比為依據(jù)的方法,來設計極諧振軟開關和濾波器的元器件參數(shù)。由于MOSFET的柵極驅(qū)動能力決定了整個環(huán)路的開關頻率,故主要依據(jù)開關速度參數(shù)對該電路進行了詳細的參數(shù)設計。反饋電路是變環(huán)寬滯環(huán)電流控制實現(xiàn)的硬件基礎,對整個系統(tǒng)的性能也有著重要的影響,本文提出了反饋電流的采樣方案,設計出滯環(huán)電流控制實現(xiàn)的霍爾傳感器采樣電路以及電流互感器采樣電路。最后設計了其他功能模塊,如主控模塊電路、上位機接口、過流保護電路和電源模塊等�；赑WM功率放大器的原理圖以及變環(huán)寬滯環(huán)電流控制的原理,加工出樣機,設計了基于FPGA的主控程序,并在此基礎上進行了原理驗證實驗。實驗結(jié)果證明了理論分析和原理設計的正確性與可行性。
[Abstract]:The lithography system is the manufacturing equipment of electronic components. The ultra-precision planar motor and its servo drive are the most important parts. The PWM power amplifier used to drive the ultra-precision planar motor is a blank in domestic research, and the technology of foreign countries is blocked against China. It is of great significance to study the PWM power amplifier applied in this field. Firstly, two key modules of PWM power amplifier are studied theoretically, including power topology and current controller. The higher the switching frequency, the higher the switching frequency. The smaller the peak value of output current ripple, and the better the dynamic response of the system, but with the increase of switching frequency, the switching loss and electromagnetic interference (EMI) of traditional hard-switching circuits increase. The soft switching technology can effectively solve these problems. In many soft switching circuits, the pole resonant soft switch is widely used because of its simple structure. In this paper, the basic pole resonant topology is derived in detail. The current control methods of the improved pole resonant topology. PWM converter are studied. Because the feedback circuit of hysteretic method is simple, easy to realize, and belongs to closed loop control, the dynamic response is good. The hysteresis current control method is theoretically analyzed in this paper. This paper discusses the theory of variable loop wide hysteresis current control method applied to the polarity soft switching power topology. When the bootstrap circuit is used to drive the high side switch devices of the bridge arm in the power topology, The minimum on time and maximum duty cycle of the low side switch of hysteresis current controlled converter can not be guaranteed. In this paper, the method of feedback of inductance current change rate is adopted to solve this problem. In this paper, the circuit schematic diagram of the prototype is designed in detail. On the basis of the basic pole resonant soft switch topology, the improved pole resonant topology circuit is designed. The resonant frequency and the maximum duty cycle of the filter are used to design the resonant soft switch and the component parameters of the filter. The switching frequency of the whole loop is determined by the gate drive ability of the MOSFET. The feedback circuit is the hardware foundation for the realization of hysteresis current control with variable loop width, and it also has an important influence on the performance of the whole system. In this paper, the sampling scheme of feedback current is proposed, the Hall sensor sampling circuit and current transformer sampling circuit are designed for hysteresis current control, and other functional modules, such as main control module circuit, upper computer interface, are designed. Based on the schematic diagram of PWM power amplifier and the principle of hysteresis current control with variable loop width, the prototype is machined and the main control program based on FPGA is designed. The experimental results show that the theoretical analysis and principle design are correct and feasible.
【學位授予單位】：電子科技大學
【學位級別】：碩士
【學位授予年份】：2015
【分類號】：TN722.75

【參考文獻】

相關期刊論文 前2條

1 洪峰;單任仲;王慧貞;嚴仰光;;一種變環(huán)寬準恒頻電流滯環(huán)控制方法[J];電工技術學報;2009年01期

2 宋強,劉文華,嚴干貴,陳遠華;大容量PWM電壓源逆變器的LC濾波器設計[J];清華大學學報(自然科學版);2003年03期

相關碩士學位論文 前1條

1 譚麗平;逆變器輸出濾波器設計及電感分析研究[D];長沙理工大學;2011年

，

本文編號：1601800