本文選題：精密機(jī)械平臺(tái)　切入點(diǎn)：重力補(bǔ)償氣缸　出處：《哈爾濱工業(yè)大學(xué)》2017年碩士論文　論文類(lèi)型：學(xué)位論文

【摘要】：本課題來(lái)源于國(guó)家科技重大專(zhuān)項(xiàng)“極大規(guī)模集成電路制造裝備與成套工藝專(zhuān)項(xiàng)”[1],子項(xiàng)目“可變狹縫系統(tǒng)”�？勺儶M縫系統(tǒng)為光刻機(jī)曝光過(guò)程中的重要部分,其曝光過(guò)程中,豎直方向刀片組需要對(duì)重力進(jìn)行補(bǔ)償,本專(zhuān)項(xiàng)選用的是氣缸重力補(bǔ)償裝置,雖然氣缸運(yùn)動(dòng)過(guò)程中產(chǎn)生的摩擦力較小,但是考慮到平臺(tái)的精度,對(duì)其存在的摩擦進(jìn)行補(bǔ)償還是很有必要的。本課題針對(duì)其狹縫掃描系統(tǒng)中重力補(bǔ)償氣缸的摩擦力問(wèn)題,較深入的研究精密平臺(tái)精密平臺(tái)克服摩擦的理論和方法。首先,根據(jù)實(shí)際的工程背景,抽離出可變狹縫系統(tǒng)豎直方向重力補(bǔ)償部分,根據(jù)課題的各項(xiàng)指標(biāo)要求,對(duì)元器件進(jìn)行選型,并完成該部分實(shí)際平臺(tái)的搭建。之后為驗(yàn)證自主搭建的重力補(bǔ)償系統(tǒng)的可行性,在該系統(tǒng)平臺(tái)上進(jìn)行初步的控制調(diào)試及實(shí)驗(yàn)。在此過(guò)程中,發(fā)現(xiàn)重力補(bǔ)償氣缸運(yùn)動(dòng)過(guò)程中產(chǎn)生的摩擦對(duì)實(shí)驗(yàn)的精度有較大的影響。其次,針對(duì)本課題的重點(diǎn)研究對(duì)象,即重力補(bǔ)償氣缸,進(jìn)行研究。首先從氣缸的機(jī)械結(jié)構(gòu)入手,討論重力補(bǔ)償氣缸的組成及工作過(guò)程,然后通過(guò)理論推導(dǎo)得出所選氣缸的機(jī)理模型,最后對(duì)建立的模型進(jìn)行仿真,探究模型在加入外界擾動(dòng)的情況下,氣缸的位置、內(nèi)壓、內(nèi)部流量等的變化,得出仿真結(jié)果。針對(duì)LuGre摩擦模型進(jìn)行仿真,探究LuGre摩擦模型的各個(gè)待估參數(shù)對(duì)系統(tǒng)的影響,得出的仿真結(jié)論為后文的參數(shù)辨識(shí)過(guò)程打下良好基礎(chǔ)。再次,接下來(lái),分別用最小二乘法,非線(xiàn)性最小二乘法,及遺傳算法對(duì)摩擦參數(shù)進(jìn)行辨識(shí),對(duì)不同方法得到的辨識(shí)結(jié)果進(jìn)行比較,對(duì)不同的辨識(shí)方法進(jìn)行優(yōu)劣勢(shì)分析。然后通過(guò)實(shí)驗(yàn),測(cè)得原始數(shù)據(jù),通過(guò)測(cè)量驅(qū)動(dòng)電流的間接方法得到系統(tǒng)中實(shí)際的摩擦力,并通過(guò)遺傳算法,完成對(duì)實(shí)際系統(tǒng)中摩擦力模型的參數(shù)辨識(shí)。最后,通過(guò)實(shí)驗(yàn)對(duì)上文提出的方法進(jìn)行驗(yàn)證,并且通過(guò)實(shí)驗(yàn)完成對(duì)實(shí)際系統(tǒng)中的摩擦力的補(bǔ)償。驗(yàn)證了前文提出的摩擦力模型對(duì)實(shí)際系統(tǒng)的適用性,以及前文提出的辨識(shí)方法的辨識(shí)精確性。最后通過(guò)對(duì)比,選用實(shí)用性較高、控制效果較好的前饋控制方法,完成對(duì)實(shí)際系統(tǒng)重力補(bǔ)償氣缸部分存在的摩擦力的補(bǔ)償,提高了系統(tǒng)的控制精度,完成最初的指標(biāo)要求。
[Abstract]:This subject comes from the national science and technology major project, "maximum scale Integrated Circuit Manufacturing equipment and complete process Project" [1], a sub-item "variable slit system". The variable slit system is an important part of the exposure process of the lithography machine, and in the exposure process, the variable slit system is an important part in the exposure process of the lithography machine. The vertical blade group needs to compensate gravity. This special type is the cylinder gravity compensation device. Although the friction produced during the cylinder movement is small, the accuracy of the platform is considered. It is necessary to compensate the existing friction. Aiming at the friction problem of the cylinder compensated by gravity in the slit scanning system, the theory and method of the precision platform to overcome friction are studied in this paper. According to the actual engineering background, the vertical gravity compensation part of the variable slit system is extracted, and the components are selected according to the requirements of the project. In order to verify the feasibility of the self-built gravity compensation system, the preliminary control debugging and experiment are carried out on the platform. It is found that the friction produced during the motion of the gravity compensated cylinder has a great influence on the precision of the experiment. Secondly, the main research object of this subject, that is, the gravity compensated cylinder, is studied. Firstly, the mechanical structure of the cylinder is introduced. The composition and working process of the gravity compensation cylinder are discussed. Then the mechanism model of the selected cylinder is derived by theoretical derivation. Finally, the model is simulated to explore the position and internal pressure of the cylinder when the external disturbance is added to the model. According to the change of internal flow rate and so on, the simulation results are obtained. According to the simulation of LuGre friction model, the influence of the estimated parameters of LuGre friction model on the system is explored. The simulation results lay a good foundation for the parameter identification process in the following chapters. Then, the friction parameters are identified by least square method, nonlinear least square method and genetic algorithm respectively. The identification results obtained by different methods are compared, and the advantages and disadvantages of different identification methods are analyzed. The actual friction force in the system is obtained by measuring the driving current indirectly, and the parameter identification of the friction force model in the actual system is completed by genetic algorithm. Finally, The proposed method is verified by experiments, and the friction force in the actual system is compensated by experiments. The applicability of the proposed friction model to the actual system is verified. Finally, through comparison, the feedforward control method, which has high practicability and good control effect, is used to compensate the friction in the cylinder part of gravity compensation system. The control precision of the system is improved and the initial target requirement is fulfilled.
【學(xué)位授予單位】：哈爾濱工業(yè)大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2017
【分類(lèi)號(hào)】：TN305.7

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