本文關(guān)鍵詞：面向電子制造的高速精密宏微運(yùn)動(dòng)平臺(tái)減振研究與測(cè)試　出處：《廣東工業(yè)大學(xué)》2015年碩士論文　論文類(lèi)型：學(xué)位論文

  更多相關(guān)文章： 高加速度 宏微運(yùn)動(dòng)平臺(tái) 集成控制系統(tǒng) 動(dòng)力學(xué)建模 減振分析

【摘要】：隨著電子制造業(yè)的高速發(fā)展,電子封裝裝備對(duì)其核心運(yùn)動(dòng)平臺(tái)及系統(tǒng)提出了愈加苛刻的要求,要求實(shí)現(xiàn)高速、高加速度(10g-15g)運(yùn)動(dòng)條件下的微米級(jí)(1-3μm)精密定位。本文面向電子制造的高速精密運(yùn)動(dòng)平臺(tái)開(kāi)展研究,以高速、高精密定位等運(yùn)動(dòng)要求設(shè)計(jì)并搭建單軸宏微運(yùn)動(dòng)平臺(tái),開(kāi)發(fā)集成控制系統(tǒng),通過(guò)動(dòng)力學(xué)建模和減振方法及相關(guān)實(shí)驗(yàn),驗(yàn)證平臺(tái)性能。本文的主要研究?jī)?nèi)容概括如下：1、深入調(diào)研高速精密運(yùn)動(dòng)平臺(tái)的國(guó)內(nèi)外研究現(xiàn)狀,分析精密運(yùn)動(dòng)平臺(tái)的關(guān)鍵技術(shù)及其存在的難點(diǎn)問(wèn)題,確定本文的研究?jī)?nèi)容及研究重點(diǎn)。2、提出一種宏微復(fù)合驅(qū)動(dòng)方案,即基于音圈電機(jī)的宏運(yùn)動(dòng)和基于壓電陶瓷的微運(yùn)動(dòng)相結(jié)合,實(shí)現(xiàn)高速大行程精密定位的運(yùn)動(dòng)要求；提出一種雙光柵尺復(fù)合定位方法,宏運(yùn)動(dòng)采用增量式光柵尺、微運(yùn)動(dòng)采用絕對(duì)式光柵尺的位置信號(hào)反饋方式,實(shí)現(xiàn)平臺(tái)的精密定位；并設(shè)計(jì)出單軸宏微運(yùn)動(dòng)平臺(tái)模型。3、對(duì)所設(shè)計(jì)的宏微運(yùn)動(dòng)平臺(tái)進(jìn)行功能設(shè)計(jì)和集成控制系統(tǒng)開(kāi)發(fā),實(shí)現(xiàn)電機(jī)、壓電陶瓷、增量式光柵尺、絕對(duì)式光柵尺等信號(hào)的采集與運(yùn)動(dòng)控制集成。4、建立宏微運(yùn)動(dòng)平臺(tái)的動(dòng)力學(xué)模型,再利用MATLAB Simulink仿真工具對(duì)運(yùn)動(dòng)平臺(tái)進(jìn)行仿真分析；分析高速宏微運(yùn)動(dòng)平臺(tái)的振動(dòng)問(wèn)題,提出基于壓電陶瓷驅(qū)動(dòng)器的主動(dòng)減振方法。5、搭建宏微運(yùn)動(dòng)平臺(tái),開(kāi)展宏微運(yùn)動(dòng)平臺(tái)主動(dòng)減振方法的實(shí)驗(yàn)研究,基于所開(kāi)發(fā)的集成控制系統(tǒng)對(duì)平臺(tái)的運(yùn)動(dòng)特性及精度進(jìn)行分析測(cè)試。
[Abstract]:With the rapid development of electronic manufacturing industry, electronic packaging equipment has put forward more and more stringent requirements for its core motion platform and system, which requires the realization of high speed. High acceleration 10g-15g) precise positioning of micrometer scale 1-3 渭 m. In this paper, the high speed precision motion platform for electronic manufacturing is studied. High precision positioning and other motion requirements to design and build a single axis macro and micro motion platform, the development of integrated control system, through dynamic modeling and vibration reduction methods and related experiments. Verify the performance of the platform. The main research content of this paper is summarized as follows: 1, in-depth investigation of the domestic and foreign research status of high-speed precision motion platform, analysis of the key technology of precision platform and its difficult problems. Determine the research content and focus of this paper. 2, propose a macro and micro composite drive scheme, that is, the combination of macro motion based on voice coil motor and micro motion based on piezoelectric ceramics. The motion requirement of precision positioning with high speed and large stroke; A compound positioning method of double grating ruler is proposed. The macro motion adopts the incremental grating ruler and the micro motion adopts the absolute grating ruler position signal feedback to realize the precision positioning of the platform. And designed the uniaxial macro and micro motion platform model. 3, the design of the macro and micro motion platform function design and integrated control system development, the realization of motor, piezoelectric ceramics, incremental grating ruler. The acquisition and motion control of absolute grating ruler signal is integrated. 4, and the dynamic model of macro and micro motion platform is established. Then we use MATLAB Simulink to simulate and analyze the motion platform. The vibration problem of high speed macro and micro motion platform is analyzed. The active vibration reduction method based on piezoelectric ceramic actuator is proposed. The macro and micro motion platform is built and the experimental research on active vibration reduction method of macro and micro motion platform is carried out. Based on the developed integrated control system, the motion characteristics and accuracy of the platform are analyzed and tested.
【學(xué)位授予單位】：廣東工業(yè)大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2015
【分類(lèi)號(hào)】：TN05

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