本文關(guān)鍵詞：芯片封裝的伺服控制系統(tǒng)與快速高精度定位技術(shù)研究　出處：《上海交通大學(xué)》2015年博士論文　論文類型：學(xué)位論文

  更多相關(guān)文章： 高加速度運(yùn)動系統(tǒng) 高精度定位 直線電機(jī) 繼電反饋技術(shù) 殘余振動 干擾觀測器 嵌入式運(yùn)動控制器

【摘要】：隨著芯片封裝技術(shù)不斷向著多引線、細(xì)間距及高效封裝方向發(fā)展,高端引線鍵合機(jī)對其高加速度運(yùn)動系統(tǒng)的響應(yīng)能力、定位精度、定位時(shí)間等伺服性能提出了更高的要求,往往要求運(yùn)動平臺在幾毫秒或十幾毫秒內(nèi)快速、平穩(wěn)、精確地運(yùn)行到給定的目標(biāo)位置。然而,在頻繁快速啟停的高加速度短行程點(diǎn)到點(diǎn)運(yùn)動過程中,外部干擾、機(jī)械共振模態(tài)及系統(tǒng)本身電氣、機(jī)械部分的非線性特征不同程度地影響著系統(tǒng)的伺服性能,極易引起系統(tǒng)的殘余振動。這不僅降低了高加速度直線伺服系統(tǒng)的定位精度,而且延長了系統(tǒng)的定位時(shí)間,給高性能運(yùn)動控制系統(tǒng)的設(shè)計(jì)與開發(fā)帶來了極大的挑戰(zhàn)。本論文結(jié)合國家科技重大專項(xiàng)“極大規(guī)模集成電路制造裝備及成套工藝”項(xiàng)目“封裝設(shè)備關(guān)鍵部件與核心技術(shù)”,對高端引線鍵合機(jī)的關(guān)鍵部件和核心技術(shù)——專用多軸控制硬件和快速高精度定位技術(shù)展開深入的研究。首先,建立高加速度運(yùn)動系統(tǒng)的仿真研究平臺,定量分析外部干擾和機(jī)械共振模態(tài)對高加速度直線伺服系統(tǒng)性能的影響及探討影響高加速度直線伺服系統(tǒng)快速高精度定位的關(guān)鍵技術(shù)。之后,在充分考慮移植載體(DSP芯片)性能的前提下,依據(jù)探索出的關(guān)鍵技術(shù)分別從模型參數(shù)辨識、點(diǎn)位軌跡規(guī)劃和高性能控制算法三個(gè)方面展開深入的研究,并將相關(guān)的核心技術(shù)移植到自行設(shè)計(jì)開發(fā)的專用嵌入式運(yùn)動控制器中。本論文的研究內(nèi)容和研究成果如下:1.為有效分析機(jī)械共振模態(tài)對高加速度直線伺服系統(tǒng)性能的影響,本文提出了采用直線電機(jī)電磁模型、平臺動力學(xué)模型及高頻共振模型進(jìn)行系統(tǒng)建模的方法。建立高加速度運(yùn)動系統(tǒng)的仿真研究平臺,并定量分析外部干擾和機(jī)械共振模態(tài)對高加速度直線伺服系統(tǒng)性能的影響及探討影響高加速度直線伺服系統(tǒng)快速高精度定位的關(guān)鍵技術(shù)。2.針對影響高加速度直線伺服系統(tǒng)快速高精度定位的模型參數(shù)辨識問題,在頻域辨識方面,本文提出了基于速度(位置)反饋的標(biāo)準(zhǔn)繼電器濾波整形頻域辨識方法,有效解決了標(biāo)準(zhǔn)繼電器頻域辨識中的“主諧波近似”問題,使其輸出方波更逼近于正弦波;在時(shí)域辨識方面,本文提出了基于位置信號反饋的標(biāo)準(zhǔn)繼電器時(shí)域辨識方法,極大提高了模型參數(shù)的辨識精度,仿真表明模型參數(shù)的辨識誤差均保持在0.05%內(nèi)。3.針對高加速度運(yùn)行下參考輸入信號極易激起系統(tǒng)強(qiáng)烈振動及產(chǎn)生較高幅值的殘余振動問題,本文借助Morlet小波變換分析出一條在固有頻率處具有最小激勵幅值的點(diǎn)位軌跡,半實(shí)物仿真系統(tǒng)上的實(shí)驗(yàn)結(jié)果表明相比“時(shí)間最優(yōu)”的點(diǎn)位軌跡,在定位精度為±2.5μm的約束下,采用本文優(yōu)化方法獲取的點(diǎn)位軌跡作為參考輸入時(shí)的定位時(shí)間縮短了近50%,減少為11.4 ms。4.為有效抑制內(nèi)部干擾、外部干擾及高頻噪聲等因素對高加速度直線伺服系統(tǒng)快速高精度定位的影響,設(shè)計(jì)出一個(gè)基于干擾觀測器的二自由度伺服控制方案,由基于極點(diǎn)配置的PD反饋控制單元、基于模型逆的前饋控制單元和力-位干擾觀測器三部分組成。并針對實(shí)際應(yīng)用過程中的“力-位干擾觀測器低通濾波器的時(shí)間常數(shù)取值不能過低”問題,設(shè)計(jì)出一種有效抑制諧振峰值的低通濾波器。半實(shí)物仿真系統(tǒng)上的實(shí)驗(yàn)結(jié)果表明,在定位精度為±2.5μm的約束下,此方法可在12 ms內(nèi)完成2.54 mm的典型運(yùn)動。5.依據(jù)高端引線鍵合機(jī)運(yùn)動控制系統(tǒng)的技術(shù)需求,開發(fā)了一種基于CPCI總線和“DSP+FPGA”架構(gòu)方式的專用嵌入式運(yùn)動控制器,并將本課題研究的快速高精度定位技術(shù)移植到此專用嵌入式運(yùn)動控制硬件中。引線鍵合機(jī)平臺上的實(shí)驗(yàn)結(jié)果表明,在定位精度為±2.5μm的約束下,本文研究的運(yùn)動控制軟硬件系統(tǒng)具有在12 ms至16 ms內(nèi)完成2.54 mm典型運(yùn)動的能力,可實(shí)現(xiàn)引線鍵合機(jī)高加速度運(yùn)動系統(tǒng)的快速高精度定位。最后,在總結(jié)研究成果的基礎(chǔ)上,本文提出一些值得研究與探索的問題,并對嵌入式運(yùn)動控制器與快速高精度定位技術(shù)的后續(xù)研究工作進(jìn)行了展望。
[Abstract]:With the continuous multi chip package technology to lead, fine pitch and high efficiency packaging development, high-end wire bonding machine for its high response ability, acceleration system positioning precision, higher performancerequirements positioning time servo, often require fast motion platform, in a few milliseconds or tens of milliseconds smoothly and accurately run to a given target position. However, the external interference in high acceleration short stroke point frequently and quickly start stop point during the movement, mechanical resonance modes and the nonlinear characteristics of electrical system itself, the mechanical parts of the different degrees affect the servo performance of the system, easy to cause the residual vibration of the system. This not only reduces the high precision acceleration linear servo system, but also prolong the time of positioning system, design and development for high performance motion control system has brought great challenge. This paper. National Science and technology major projects "great scale integrated circuit manufacturing equipment and complete sets of" project "the key components of packaging equipment and core technology, in-depth research on the key components of the high-end wire bonding machine and the core technology of special multi axis control hardware and fast high precision positioning technology. Firstly, the simulation research platform to establish a high acceleration system, quantitative analysis of the influence of external interference and mechanical resonance modes on the performance of high acceleration linear servo system and to investigate the effect of high acceleration of fast and high precision positioning of linear servo system is the key technology. After considering the transfer vector (DSP chip) performance under the premise, according to the key technology respectively from the model parameter identification, point trajectory planning control and high performance in-depth study three aspects of algorithm, the core technology and transplant related to self. The special embedded motion controller developing. The research contents and research results are as follows: 1. for effect analysis of mechanical resonance mode on the performance of high acceleration linear servo system is presented in this paper, the electromagnetic model of linear motor, platform dynamics model and the high frequency resonance model for system modeling. The simulation research platform for the establishment of high the acceleration of the motor system, and quantitative analysis of the influence of external interference and mechanical resonance modes on the performance of high acceleration linear servo system and Study on parameter identification of key technology of.2. high speed high acceleration linear servo system precision positioning for high acceleration linear servo system with high accuracy and fast positioning, in the frequency domain identification is proposed in this paper. Based on the velocity (location) frequency domain identification method of standard relay feedback filter shaping, effective solution to the standard Relay frequency domain identification in the main harmonic approximation problem, so that the output square wave is more close to sine wave; in the time domain identification, proposed standard relay time domain identification method based on position feedback signals, which greatly improves the identification accuracy of model parameters, simulation results show that the identification error of model parameters were maintained at 0.05%.3. for high speed operation under the reference input signal easily the residual vibration problem aroused strong vibration system and produce high amplitude, with the help of Morlet wavelet transform a minimum amplitude at resonant frequency point trajectory, semi physical simulation system. The experimental results show that compared to the time optimal point trajectory the positioning accuracy is about 2.5 m under the constraints of the optimization method to obtain the point trajectory as the reference input when the positioning time is shortened by nearly 50%, reduced to 11.4 ms.4. in order to suppress the interference of internal, external interference and noise and other factors on the fast high precision positioning and high acceleration linear servo system, the design of a disturbance observer two DOF servo control scheme based on the pole assignment PD feedback control unit based on inverse model feed-forward control unit and the force position the disturbance observer based on three components. And according to the actual application in the process of "force - disturbance observer low-pass filter time constant value can not be too low" problem, design a low-pass filter effectively suppress the resonant peak. The semi physical simulation system. The experimental results indicate that the positioning accuracy is + 2.5 m under the constraints of the technical requirements of the motion control system machine typical motion.5. this method can complete the 2.54 mm within 12 ms on the basis of high-end wire bonding, the development of a CPCI bus based on DSP+FPGA and " "The special embedded motion controller architecture, and the special embedded motion fast high precision positioning technology transfer to the research results of control hardware. The wire bonding machine experiment, the positioning accuracy is 2.5 m under the constraint of the motion controller has completed 2.54 mm typical movement in 12 ms and 16 MS software and hardware system, can realize the rapid and high precision location of wire bonding machine and high acceleration motion system. Finally, based on summarizing the research results, this paper puts forward some problems worthy of study and exploration, and further research on embedded motion controller with high accuracy and fast positioning technology for in the future.

【學(xué)位授予單位】：上海交通大學(xué)
【學(xué)位級別】：博士
【學(xué)位授予年份】：2015
【分類號】：TN405;TP273
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本文編號：1387288