功能型微納復(fù)合結(jié)構(gòu)的制備及其應(yīng)用
發(fā)布時(shí)間：2019-05-13 08:00
【摘要】：人們?cè)谔剿髯匀唤绲倪^(guò)程中,觀察到了許多生物材料具有特殊功能,研究發(fā)現(xiàn)這些材料所具有的種種的特性都離不開其表面的微納結(jié)構(gòu),進(jìn)而在材料表面制備出具有相似的微納結(jié)構(gòu)就可以得到具有特殊性質(zhì)的界面材料。微納復(fù)合材料的種種特性使其在日常生活、藥物檢測(cè)、國(guó)防建設(shè)等諸多領(lǐng)域展現(xiàn)出巨大的應(yīng)用潛力。因此推動(dòng)微納米材料的制備發(fā)展在科學(xué)研究和實(shí)際生產(chǎn)應(yīng)用領(lǐng)域都有著非常重要的意義。本文基于紫外光刻和鋁基納米材料的制備技術(shù),通過(guò)使用前者完成鋁基微米陣列結(jié)構(gòu)的制備,之后使用一定的陽(yáng)極氧化技術(shù)或者水浴法在已制備的微米結(jié)構(gòu)基礎(chǔ)上完成微納米復(fù)合結(jié)構(gòu)勃姆石的制備。首先,對(duì)結(jié)合紫外光刻技術(shù)與陽(yáng)極氧化技術(shù)制備孔狀微納結(jié)構(gòu)的工藝進(jìn)行了研究；選用不同的基片材料作為光刻襯底,在完成圖形轉(zhuǎn)以后,發(fā)現(xiàn)硅片效果最好,鋁片次之,玻璃片最差。高純拋光鋁和拋光液拋光鋁材質(zhì)的不同會(huì)導(dǎo)致納米孔生長(zhǎng)的孔徑等方面出現(xiàn)較大差異同時(shí)納米孔排布不同。高純拋光鋁納米孔生長(zhǎng)速率明顯低于拋光液拋光鋁。分析了存在一定差異的基片作為襯底時(shí)對(duì)于光刻參數(shù)設(shè)置的影響；納米生長(zhǎng)前進(jìn)行退火處理會(huì)獲得相較于未退火更好的納米孔狀結(jié)構(gòu)；使用二次陽(yáng)極氧化工藝制備的微納復(fù)合結(jié)構(gòu)排列更規(guī)則。其次,研究了紫外光刻技術(shù)與鋁材料水浴法制備葉片狀微納結(jié)構(gòu)的工藝,確定使用鋁材料水浴所制備的材料為勃姆石。研究了鋁材料水浴過(guò)程中水質(zhì)對(duì)于納米葉片狀結(jié)構(gòu)的影響較大,自來(lái)水中的氯離子是影響葉片狀納米結(jié)構(gòu)的主要因素；時(shí)間的延長(zhǎng)納米葉片狀結(jié)構(gòu)的厚度有輕微增大；在使用600℃退火后,材料的表面形貌未發(fā)生較大的變化。最后,使用接觸角測(cè)量?jī)x對(duì)所制備的微納結(jié)構(gòu)進(jìn)行材料浸潤(rùn)性測(cè)試,發(fā)現(xiàn)微納復(fù)合材料的浸潤(rùn)性相對(duì)單純的納米結(jié)構(gòu)會(huì)有明顯的增強(qiáng)效果,孔狀微納米結(jié)構(gòu)可達(dá)高親水,葉片狀微納復(fù)合結(jié)構(gòu)可以增強(qiáng)至超親水狀態(tài)。使用勃姆石片狀納米材料作為增強(qiáng)拉曼散射(SESR)基底,發(fā)現(xiàn)了明顯的拉曼增強(qiáng)效果。對(duì)微納結(jié)構(gòu)的應(yīng)用前景及研究方向進(jìn)行了展望和深入的討論,為快速、高效、低成本制備微納米復(fù)合結(jié)構(gòu)材料提出了新的思路。
[Abstract]:In the process of exploring nature, it has been observed that many biomaterials have special functions, and it is found that the properties of these materials can not be separated from the micro-nano structure of their surface. Furthermore, the interface materials with special properties can be obtained by preparing similar micro-nano structures on the surface of the materials. The properties of micro-nano composites make it show great application potential in many fields, such as daily life, drug detection, national defense construction and so on. Therefore, it is of great significance to promote the preparation and development of micro-nanomaterials in the field of scientific research and practical production and application. In this paper, based on the preparation technology of ultraviolet lithography and aluminum-based nanomaterials, the preparation of aluminum-based micron array structure is completed by using the former. After that, some anodizing technology or water bath method was used to prepare boehmil with micro-nanocomposite structure on the basis of the prepared micron structure. Firstly, the preparation of pore micro-nano structure by UV lithography and anodizing was studied. Different substrate materials were selected as lithography substrate. After the graphic conversion was completed, it was found that the effect of silicon wafer was the best, that of aluminum sheet was the second, and that of glass sheet was the worst. The difference of high purity polished aluminum and polishing liquid polished aluminum will lead to great differences in the pore size of nanoporous growth and the arrangement of nanoporous. The growth rate of nano-pores in high purity polished aluminum was significantly lower than that in polishing solution. The influence of substrate as substrate on photolithography parameter setting is analyzed, and the nano-porous structure can be obtained by annealing before nano-growth compared with unannealed substrate, and the experimental results show that the nano-porous structure is better than that of non-annealed substrate before nano-growth. The arrangement of micro-nano composite structure prepared by secondary anodizing process is more regular. Secondly, the preparation of blade micro-nano structure by UV lithography and aluminum water bath was studied, and the material prepared by aluminum water bath was determined to be boehmil. The effect of water quality on the nano-blade-like structure was studied, the chloride ion in tap water was the main factor affecting the blade-like nanostructure, the thickness of the nano-blade-like structure was slightly increased with the prolongation of time, and the thickness of the nano-blade-like structure was slightly increased with the prolongation of the time. After annealing at 600 鈩，
本文編號(hào)：2475721
[Abstract]:In the process of exploring nature, it has been observed that many biomaterials have special functions, and it is found that the properties of these materials can not be separated from the micro-nano structure of their surface. Furthermore, the interface materials with special properties can be obtained by preparing similar micro-nano structures on the surface of the materials. The properties of micro-nano composites make it show great application potential in many fields, such as daily life, drug detection, national defense construction and so on. Therefore, it is of great significance to promote the preparation and development of micro-nanomaterials in the field of scientific research and practical production and application. In this paper, based on the preparation technology of ultraviolet lithography and aluminum-based nanomaterials, the preparation of aluminum-based micron array structure is completed by using the former. After that, some anodizing technology or water bath method was used to prepare boehmil with micro-nanocomposite structure on the basis of the prepared micron structure. Firstly, the preparation of pore micro-nano structure by UV lithography and anodizing was studied. Different substrate materials were selected as lithography substrate. After the graphic conversion was completed, it was found that the effect of silicon wafer was the best, that of aluminum sheet was the second, and that of glass sheet was the worst. The difference of high purity polished aluminum and polishing liquid polished aluminum will lead to great differences in the pore size of nanoporous growth and the arrangement of nanoporous. The growth rate of nano-pores in high purity polished aluminum was significantly lower than that in polishing solution. The influence of substrate as substrate on photolithography parameter setting is analyzed, and the nano-porous structure can be obtained by annealing before nano-growth compared with unannealed substrate, and the experimental results show that the nano-porous structure is better than that of non-annealed substrate before nano-growth. The arrangement of micro-nano composite structure prepared by secondary anodizing process is more regular. Secondly, the preparation of blade micro-nano structure by UV lithography and aluminum water bath was studied, and the material prepared by aluminum water bath was determined to be boehmil. The effect of water quality on the nano-blade-like structure was studied, the chloride ion in tap water was the main factor affecting the blade-like nanostructure, the thickness of the nano-blade-like structure was slightly increased with the prolongation of time, and the thickness of the nano-blade-like structure was slightly increased with the prolongation of the time. After annealing at 600 鈩，
本文編號(hào)：2475721
本文鏈接：http://www.sikaile.net/kejilunwen/cailiaohuaxuelunwen/2475721.html
最近更新
教材專著
